Methods and Apparatus for Protecting Plasma Chamber Surfaces
    1.
    发明申请
    Methods and Apparatus for Protecting Plasma Chamber Surfaces 审中-公开
    用于保护等离子体腔体表面的方法和装置

    公开(公告)号:US20110005922A1

    公开(公告)日:2011-01-13

    申请号:US12499453

    申请日:2009-07-08

    IPC分类号: C23C14/34

    摘要: A method for creating a protective layer over a surface of an object comprising aluminum and magnesium for use in a semiconductor processing system, which includes oxidizing the surface of the object using a plasma electrolytic oxidation process. The method also includes generating a halogen-comprising plasma by exciting a gas comprising a halogen. The method also includes exposing the oxidized surface to the halogen-comprising plasma or excited gas.

    摘要翻译: 一种用于在半导体处理系统中使用的用于在包括铝和镁的物体的表面上形成保护层的方法,其包括使用等离子体电解氧化工艺氧化物体的表面。 该方法还包括通过激发包含卤素的气体产生含卤素的等离子体。 该方法还包括将氧化的表面暴露于含卤素等离子体或激发气体。

    Laser fabrication of discontinuously reinforced metal matrix composites
    2.
    发明授权
    Laser fabrication of discontinuously reinforced metal matrix composites 失效
    激光制造不连续增强金属基复合材料

    公开(公告)号:US07521017B2

    公开(公告)日:2009-04-21

    申请号:US10147448

    申请日:2002-05-16

    IPC分类号: B22F3/00 B05D1/36 B23K26/00

    摘要: Disclosed are reinforced metal matrix composites and methods of shaping powder materials to form such composites. Articles of manufacture are formed in layers by a laser fabrication process. In the process, powder is melted and cooled to form successive layers of a discontinuously reinforced metal matrix. The matrix exhibits fine grain structure with enhanced properties over the unreinforced metal, including higher tensile modulus, higher strength, and greater hardness. In some preferred embodiments, an in-situ alloy powder, a powder metallurgy blend, or independently provided powders are reinforced with boron and/or carbon to form the composite.

    摘要翻译: 公开了增强金属基复合材料和成形粉末材料以形成这种复合材料的方法。 制造工艺通过激光制造工艺形成层。 在此过程中,将粉末熔化并冷却以形成连续层的不连续增强的金属基体。 该基质表现出比非增强金属具有更好性能的细晶粒结构,包括较高的拉伸模量,较高的强度和较高的硬度。 在一些优选实施方案中,原位合金粉末,粉末冶金共混物或独立提供的粉末用硼和/或碳增强以形成复合材料。

    Toroidal Plasma Chamber
    3.
    发明申请

    公开(公告)号:US20190006154A1

    公开(公告)日:2019-01-03

    申请号:US15635592

    申请日:2017-06-28

    申请人: Chaolin Hu

    发明人: Chaolin Hu

    摘要: An apparatus and methods for forming a toroidal plasma chamber includes metallic material, material forming process, heat treatment, anodization and a feature to form an ideal gas flow pattern in the plasma chamber. The gas passing through the plasma chamber that functions as a secondary wiring in a transformer will be dissociated when coupled with the current induced through a magnetic core by a primary wiring that is a semiconductor switching power source.