CMP for corrosion-free CoFe elements for magnetic heads
    1.
    发明申请
    CMP for corrosion-free CoFe elements for magnetic heads 有权
    CMP用于磁头的无腐蚀CoFe元件

    公开(公告)号:US20050127027A1

    公开(公告)日:2005-06-16

    申请号:US10734361

    申请日:2003-12-11

    摘要: A method of manufacture of magnetic heads which include CoFe elements using CMP is presented. The method includes providing a slurry of Al2O3, adjusting the concentration of H2O2 in said slurry to within a range of 6-12% by volume and balancing mechanical polishing action. The balancing is done by adjusting the table speed of a mechanical polisher to within a range of 55-90 rpm, and adjusting polishing pressure to within a range of 5-7 psi. Also a magnetic head having elements made of CoFe material made by this method is disclosed.

    摘要翻译: 提出了使用CMP制造包括CoFe元素的磁头的制造方法。 该方法包括提供Al 2 N 3 O 3的浆料,调节所述的二氧化钛的浓度 浆料在6-12体积%的范围内,并平衡机械抛光作用。 通过将机械抛光机的工作台速度调节到55-90rpm的范围内并且将抛光压力调节到5-7psi的范围内来进行平衡。 还公开了一种具有由该方法制成的由CoFe材料制成的元件的磁头。

    Method for fabrication of magnetic write head with self aligned poles
    2.
    发明申请
    Method for fabrication of magnetic write head with self aligned poles 失效
    具有自对准极的磁性写头的制造方法

    公开(公告)号:US20050067375A1

    公开(公告)日:2005-03-31

    申请号:US10676466

    申请日:2003-09-30

    摘要: A method for fabrication of magnetic write heads for disk drives in which a P1 layer is formed having a P1 Protrusion, the P1 Protrusion having a longitudinal reference axis. A gap layer is deposited on the P1 Protrusion and a layer of fill material is deposited on the gap layer. The fill material layer is shaped to form a mold which surrounds a hollow which is aligned with the longitudinal axis of the P1 Protrusion. This hollow in the fill material layer is filled with P2 pole material to form a P2 pole which is then automatically substantially aligned with the longitudinal axis of the P1 Protrusion.

    摘要翻译: 一种制造用于盘驱动器的磁写头的方法,其中形成具有P1突起的P1层,P1突起具有纵向参考轴。 间隙层沉积在P1突起上,并且填充材料层沉积在间隙层上。 填充材料层被成形为形成围绕与P1突起的纵向轴线对准的中空部的模具。 填充材料层中的这个中空填充有P2极材料,以形成P2极,然后自动基本上与P1突起的纵向轴线对齐。