公开(公告)号：US20070015373A1

公开(公告)日：2007-01-18

申请号：US11181427

申请日：2005-07-13

申请人： Christopher Cowen ,  Larry Rowland ,  Jesse Tucker ,  Jeffrey Fedison ,  Richard Saia ,  Kevin Durocher

发明人： Christopher Cowen ,  Larry Rowland ,  Jesse Tucker ,  Jeffrey Fedison ,  Richard Saia ,  Kevin Durocher

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： H01L21/02115 ,  H01L21/022 ,  H01L21/02274 ,  H01L21/046 ,  H01L21/312 ,  H01L21/3146

摘要： A method of processing a semiconductor substrate is provided. The method includes depositing an amorphous hydrogenated carbon film on a semiconductor substrate using a low temperature plasma deposition process and performing at least one high temperature processing step on the semiconductor substrate. The SiC substrate is processed by ion implanting at least one dopant species into at least one selected region of the SiC substrate, depositing a amorphous hydrogenated carbon film on the SiC substrate using a plasma enhanced chemical vapor deposition (PECVD) process, performing at least one high temperature processing step on the SiC substrate and removing the amorphous hydrogenated carbon film after performing the high temperature processing step.

摘要翻译： 提供一种处理半导体衬底的方法。 该方法包括使用低温等离子体沉积工艺在半导体衬底上沉积无定形氢化碳膜，并在半导体衬底上执行至少一个高温处理步骤。 通过将至少一种掺杂剂物质离子注入到SiC衬底的至少一个选定区域中来处理SiC衬底，使用等离子体增强化学气相沉积（PECVD）工艺在SiC衬底上沉积无定形氢化碳膜，执行至少一个 高温处理步骤，并且在进行高温处理步骤之后除去无定形氢化碳膜。

公开(公告)号：US08317944B1

公开(公告)日：2012-11-27

申请号：US13282211

申请日：2011-10-26

申请人： Paul D. Jablonski ,  David Alman ,  Omer Dogan ,  Gordon Holcomb ,  Christopher Cowen

发明人： Paul D. Jablonski ,  David Alman ,  Omer Dogan ,  Gordon Holcomb ,  Christopher Cowen

IPC分类号： C22C38/00

CPC分类号： C21D6/002 ,  C21D6/02 ,  C21D2211/004 ,  C21D2211/008 ,  C22C38/02 ,  C22C38/04 ,  C22C38/22 ,  C22C38/24 ,  C22C38/26 ,  C22C38/28 ,  C23C12/02

摘要： One or more embodiments relates to a high-temperature, titanium alloyed, 9 Cr-1 Mo steel exhibiting improved creep strength and oxidation resistance at service temperatures up to 650° C. The 9 Cr-1 Mo steel has a tempered martensite microstructure and is comprised of both large (0.5-3 μm) primary titanium carbides and small (5-50 nm) secondary titanium carbides in a ratio of. from about 1:1.5 to about 1.5:1. The 9 Cr-1 Mo steel may be fabricated using exemplary austenizing, rapid cooling, and tempering steps without subsequent hot working requirements. The 9 Cr-1 Mo steel exhibits improvements in total mass gain, yield strength, and time-to-rupture over ASTM P91 and ASTM P92 at the temperature and time conditions examined.

摘要翻译： 一个或多个实施方案涉及在高达650℃的使用温度下表现出改进的蠕变强度和抗氧化性的高温钛合金的9Cr-1 Mo钢.9Cr-1 Mo钢具有回火马氏体组织，并且是 由大（0.5-3μm）的主碳化钛和小（5-50nm）的二次碳化钛组成。 约1：1.5至约1.5：1。 9 Cr-1 Mo钢可以使用示例性的奥氏体化，快速冷却和回火步骤制造，而无需后续的热加工要求。 在所考察的温度和时间条件下，9Cr-1 Mo钢在总体质量增益，屈服强度和断裂时间方面均优于ASTM P91和ASTM P92。

公开(公告)号：US08246767B1

公开(公告)日：2012-08-21

申请号：US12209488

申请日：2008-09-12

申请人： Paul D. Jablonski ,  David Alman ,  Omer Dogan ,  Gordon Holcomb ,  Christopher Cowen

发明人： Paul D. Jablonski ,  David Alman ,  Omer Dogan ,  Gordon Holcomb ,  Christopher Cowen

IPC分类号： C21D6/02

CPC分类号： C21D6/002 ,  C21D6/02 ,  C21D2211/004 ,  C21D2211/008 ,  C22C38/02 ,  C22C38/04 ,  C22C38/22 ,  C22C38/24 ,  C22C38/26 ,  C22C38/28 ,  C23C12/02

摘要： The invention relates to a composition and heat treatment for a high-temperature, titanium alloyed, 9 Cr-1 Mo steel exhibiting improved creep strength and oxidation resistance at service temperatures up to 650° C. The novel combination of composition and heat treatment produces a heat treated material containing both large primary titanium carbides and small secondary titanium carbides. The primary titanium carbides contribute to creep strength while the secondary titanium carbides act to maintain a higher level of chromium in the finished steel for increased oxidation resistance, and strengthen the steel by impeding the movement of dislocations through the crystal structure. The heat treated material provides improved performance at comparable cost to commonly used high-temperature steels such as ASTM P91 and ASTM P92, and requires heat treatment consisting solely of austenization, rapid cooling, tempering, and final cooling, avoiding the need for any hot-working in the austenite temperature range.

摘要翻译： 本发明涉及一种高温，钛合金的9Cr-1 Mo钢的组成和热处理，其在高达650℃的使用温度下具有改进的蠕变强度和抗氧化性。组合和热处理的新颖组合产生 含有大的初级碳化钛和小的二次碳化钛的热处理材料。 主要的碳化钛有助于蠕变强度，而二次碳化钛在成品钢中保持较高水平的铬，以提高耐氧化性，并通过阻止位错通过晶体结构的运动来加强钢。 经热处理的材料与常规使用的高温钢（例如ASTM P91和ASTM P92）相当的成本提供了改进的性能，并且仅需要由奥氏体化，快速冷却，回火和最终冷却组成的热处理， 在奥氏体温度范围内工作。