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公开(公告)号：US10180547B2
公开(公告)日：2019-01-15
申请号：US13403566
申请日：2012-02-23
申请人： Wan-Yu Lee , Chun-Hao Tseng , Hai-Ching Chen , Tien-I Bao
发明人： Wan-Yu Lee , Chun-Hao Tseng , Hai-Ching Chen , Tien-I Bao
摘要： An optical bench on substrate includes a substrate and a trench formed inside the substrate and having a sloping side. A reflector layer is formed over the sloping side. An optical component is mounted over the substrate. The reflector layer is configured to reflect an electromagnetic wave to or from the optical component.
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公开(公告)号：US09036956B2
公开(公告)日：2015-05-19
申请号：US13399098
申请日：2012-02-17
申请人： Chun-Hao Tseng , Wan-Yu Lee , Hai-Ching Chen , Tien-I Bao
发明人： Chun-Hao Tseng , Wan-Yu Lee , Hai-Ching Chen , Tien-I Bao
CPC分类号： G02B6/12004 , G02B6/0083 , G02B6/132 , G02B6/136 , G02B6/138 , G02B6/4214 , G02B2006/12061 , G02B2006/12104 , G02B2006/12121 , G02B2006/12176
摘要： A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region.
摘要翻译： 公开了一种制造波导器件的方法。 该方法包括提供具有选通互连区域和波导区域的衬底，并且在电互连区域中的衬底上形成图案化电介质层和图案化再分配层（RDL）。 该方法还包括通过结合堆叠将图案化的RDL结合到垂直腔表面发射激光器（VCSEL）。 在波导区域的基板上形成反射镜沟槽，反射层形成在波导区域内的反射镜区域的上方。 该方法还包括在波导区域内的波通道区域中形成和图案化底包层，并且在波导区域中形成和图案化芯层和顶包层。
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公开(公告)号：US20130216177A1
公开(公告)日：2013-08-22
申请号：US13399098
申请日：2012-02-17
申请人： Chun-Hao Tseng , Wan-Yu Lee , Hai-Ching Chen , Tien-I Bao
发明人： Chun-Hao Tseng , Wan-Yu Lee , Hai-Ching Chen , Tien-I Bao
CPC分类号： G02B6/12004 , G02B6/0083 , G02B6/132 , G02B6/136 , G02B6/138 , G02B6/4214 , G02B2006/12061 , G02B2006/12104 , G02B2006/12121 , G02B2006/12176
摘要： A method of fabricating a waveguide device is disclosed. The method includes providing a substrate having an elector-interconnection region and a waveguide region and forming a patterned dielectric layer and a patterned redistribution layer (RDL) over the substrate in the electro-interconnection region. The method also includes bonding the patterned RDL to a vertical-cavity surface-emitting laser (VCSEL) through a bonding stack. A reflecting-mirror trench is formed in the substrate in the waveguide region, and a reflecting layer is formed over a reflecting-mirror region inside the waveguide region. The method further includes forming and patterning a bottom cladding layer in a wave-tunnel region inside the waveguide region and forming and patterning a core layer and a top cladding layer in the waveguide region.
摘要翻译： 公开了一种制造波导器件的方法。 该方法包括提供具有选通互连区域和波导区域的衬底，并且在电互连区域中的衬底上形成图案化电介质层和图案化再分配层（RDL）。 该方法还包括通过结合堆叠将图案化的RDL结合到垂直腔表面发射激光器（VCSEL）。 在波导区域的基板上形成反射镜沟槽，反射层形成在波导区域内的反射镜区域的上方。 该方法还包括在波导区域内的波通道区域中形成和图案化底包层，并且在波导区域中形成和图案化芯层和顶包层。
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