PACKAGING FOR A MEMS TRANSDUCER
    6.
    发明申请

    公开(公告)号:US20200304921A1

    公开(公告)日:2020-09-24

    申请号:US16823588

    申请日:2020-03-19

    Abstract: The application relates to a MEMS transducer package comprising: a package substrate the package substrate comprising a substrate channel, the substrate channel comprising first and second channel portions, wherein the first portion extends in a first direction between a first channel opening in a side surface of the substrate and a junction between the first and second channel portions, and wherein the second portion extends in a second direction between said junction and a second channel opening at, or underlying, a substrate opening provided in an upper surface of the package substrate.

    MEMS DEVICE AND PROCESS
    7.
    发明申请

    公开(公告)号:US20210144482A1

    公开(公告)日:2021-05-13

    申请号:US16605155

    申请日:2018-04-13

    Abstract: The present disclosure describes techniques for altering the epoxy wettability of a surface of a MEMS device. Particularly applicable to flip-chip bonding arrangements in which a top surface of a MEMS device is adhered to a package substrate. A barrier region is provided on a top surface of the MEMs device, laterally outside a region which forms, or overlies, the backplate and/or the cavity in the transducer substrate. The barrier region comprises a plurality of discontinuities, e.g. dimples, which inhibit the flow of epoxy.

    PACKAGING FOR A MEMS TRANSDUCER
    8.
    发明申请

    公开(公告)号:US20200304923A1

    公开(公告)日:2020-09-24

    申请号:US16825549

    申请日:2020-03-20

    Abstract: The application describes a package substrate for a MEMS transducer package having a recessed region formed in an upper surface of the package substrate. The recessed region extends only partially through the package substrate from an opening in the upper surface of the package substrate in a first direction towards the lower surface of the substrate. The recessed region extends only partially though the package substrate from an opening in a side surface of the package substrate in a second direction towards an opposite side surface.

    SEMICONDUCTOR STRUCTURES
    9.
    发明申请

    公开(公告)号:US20200304920A1

    公开(公告)日:2020-09-24

    申请号:US16822771

    申请日:2020-03-18

    Abstract: The present application relates to structures for supporting mechanical, electrical and/or electromechanical components, devices and/or systems and to methods of fabricating such structures. The application describes a primary die comprising an aperture extending through the die. The aperture is suitable for receiving a secondary die. A secondary die may be provided within the aperture of the primary die.

    SEMICONDUCTOR STRUCTURES
    10.
    发明申请

    公开(公告)号:US20220060835A1

    公开(公告)日:2022-02-24

    申请号:US17520386

    申请日:2021-11-05

    Abstract: The present application relates to structures for supporting mechanical, electrical and/or electromechanical components, devices and/or systems and to methods of fabricating such structures. The application describes a primary die comprising an aperture extending through the die. The aperture is suitable for receiving a secondary die. A secondary die may be provided within the aperture of the primary die.

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