-
公开(公告)号：US20090025598A1
公开(公告)日：2009-01-29
申请号：US11828657
申请日：2007-07-26
IPC分类号： B61B3/00
CPC分类号： B61B3/02 , B66F11/04 , H01L21/67733
摘要： A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.
摘要翻译： 架空运输服务车辆系统包括构造和布置为承载用户的托架框架。 提升机构使用至少一个提升装置来提升和降低托架框架和至少一个运动装置，用于使提升机构沿轨道或轨道中的一个移动。 控制器控制至少一个提升装置和至少一个移动装置中的至少一个。
-
公开(公告)号：US07854202B2
公开(公告)日：2010-12-21
申请号：US11828657
申请日：2007-07-26
IPC分类号： B61B3/00
CPC分类号： B61B3/02 , B66F11/04 , H01L21/67733
摘要： A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.
摘要翻译： 架空运输服务车辆系统包括构造和布置为承载用户的托架框架。 提升机构使用至少一个提升装置来提升和降低托架框架和至少一个运动装置，用于使提升机构沿轨道或轨道中的一个移动。 控制器控制至少一个提升装置和至少一个移动装置中的至少一个。
-
公开(公告)号：US08113123B2
公开(公告)日：2012-02-14
申请号：US12706676
申请日：2010-02-16
IPC分类号： B61B3/00
CPC分类号： B61B3/02 , B66F11/04 , H01L21/67733
摘要： A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.
摘要翻译： 架空运输服务车辆系统包括构造和布置为承载用户的托架框架。 提升机构使用至少一个提升装置来提升和降低托架框架和至少一个运动装置，用于使提升机构沿轨道或轨道中的一个移动。 控制器控制至少一个提升装置和至少一个移动装置中的至少一个。
-
公开(公告)号：US20100139520A1
公开(公告)日：2010-06-10
申请号：US12706676
申请日：2010-02-16
IPC分类号： B61B3/00
CPC分类号： B61B3/02 , B66F11/04 , H01L21/67733
摘要： A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.
摘要翻译： 架空运输服务车辆系统包括构造和布置为承载用户的托架框架。 提升机构使用至少一个提升装置来提升和降低托架框架和至少一个运动装置，用于使提升机构沿轨道或轨道中的一个移动。 控制器控制至少一个提升装置和至少一个移动装置中的至少一个。
-
5.发明授权公开(公告)号：US07591624B2
公开(公告)日：2009-09-22
申请号：US11306708
申请日：2006-01-09
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , H01L21/67276 , H01L21/67359 , H01L21/67379 , H01L21/68707 , Y10S414/14
摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及 其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。 提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造场地中使用现有设备，其仅需要对设备进行最小的修改，以使后者普遍适用于系统的组合 。
-
6.发明申请RETICLE STORAGE POD (RSP) TRANSPORT SYSTEM UTILIZING FOUP ADAPTER PLATE 有权使用FOUP适配板的物品存储POD（RSP）运输系统公开(公告)号：US20090297299A1
公开(公告)日：2009-12-03
申请号：US12537649
申请日：2009-08-07
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , H01L21/67276 , H01L21/67359 , H01L21/67379 , H01L21/68707 , Y10S414/14
摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及 其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。 提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造场地中使用现有设备，其仅需要对设备进行最小的修改，以使后者普遍适用于系统的组合 。
-
公开(公告)号：US20080260504A1
公开(公告)日：2008-10-23
申请号：US11736188
申请日：2007-04-17
IPC分类号： B65G1/12
CPC分类号： B65G1/12 , Y10S414/14
摘要： A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.
摘要翻译： 用于诸如衬底载体的物品的存储系统包括至少一个存储器，其包括多个存储区域，每个存储区域适于存储至少一个存储设备。 至少一个可移动支撑件布置在所述至少一个储料器上。 至少在第一位置和第二位置之间至少在第一位置和第二位置之间控制所述至少一个可移动支撑件的运动，其中所述至少一个可移动支撑件容纳至少一个存储装置，其中所述至少一个可移动支撑件被布置 基本上在一个存储区域内。
-
公开(公告)号：US09033638B2
公开(公告)日：2015-05-19
申请号：US11736188
申请日：2007-04-17
IPC分类号： H01L21/677 , B65G1/12
CPC分类号： B65G1/12 , Y10S414/14
摘要： A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.
摘要翻译： 用于诸如衬底载体的物品的存储系统包括至少一个存储器，其包括多个存储区域，每个存储区域适于存储至少一个存储设备。 至少一个可移动支撑件布置在所述至少一个储料器上。 至少在第一位置和第二位置之间至少在第一位置和第二位置之间控制所述至少一个可移动支撑件的运动，其中所述至少一个可移动支撑件容纳至少一个存储装置，其中所述至少一个可移动支撑件被布置 基本上在一个存储区域内。
-
公开(公告)号：US20080240892A1
公开(公告)日：2008-10-02
申请号：US11692226
申请日：2007-03-28
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , H01L21/67769
摘要： A storage buffer system for an automated material handling system (AMHS) includes a retractable buffer device disposed in proximity to a processing tool, the retractable buffer device having an extended position disposed directly below an overhead transport (OHT) vehicle path. The retractable buffer device further includes a retracted position that is removed from a process aisle space. In the extended position, the retractable buffer device is configured to facilitate loading and unloading of product therein without the use of lateral motion capability of an OHT vehicle.
摘要翻译： 一种用于自动化材料处理系统（AMHS）的存储缓冲系统包括设置在处理工具附近的伸缩缓冲装置，该伸缩缓冲装置具有直接位于架空运输（OHT）车辆路径下方的延伸位置。 可伸缩缓冲装置还包括从过程通道空间移除的缩回位置。 在伸出位置，可伸缩缓冲装置构造成便于在其中装载和卸载产品，而不使用OHT车辆的横向运动能力。
-
10.发明授权公开(公告)号：US07887277B2
公开(公告)日：2011-02-15
申请号：US12537649
申请日：2009-08-07
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , H01L21/67276 , H01L21/67359 , H01L21/67379 , H01L21/68707 , Y10S414/14
摘要： A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.
摘要翻译： FOUP（前开口统一舱）系统和用于运输晶片的掩模版系统和掩模版系统的组合，后者用于将掩模版从第一制造位置传送到另一位置的另一位置，以及 其提供统一的系统，使得能够在这些站点之间自动和可跟踪地传送标线。 提供了一种改进的FOUP基础结构，其适于保持掩模版并且能够在制造场地中使用现有设备，其仅需要对设备进行最小的修改，以使后者普遍适用于系统的组合 。
-
-
-
-
-
-
-
-
-
搜索结果
37 条记录 (耗时 0.019 秒)
