公开(公告)号：US10732126B2

公开(公告)日：2020-08-04

申请号：US16346711

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Chong Pyung An ,  Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Hyeong-cheol Lee ,  Michal Mlejnek ,  Johannes Moll ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Amanda Kathryn Thomas ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G01N21/958

Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.

公开(公告)号：US20190277774A1

公开(公告)日：2019-09-12

申请号：US16346711

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Chong Pyung An ,  Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Hyeong-cheol Lee ,  Michal Mlejnek ,  Johannes Moll ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Amanda Kathryn Thomas ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G01N21/958

Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.