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公开(公告)号：US20230003661A1
公开(公告)日：2023-01-05
申请号：US16606364
申请日：2018-04-18
Applicant: Corning Incorporated
Inventor： Sung-chan Hwang , Ji Hwa Jung , Tae-ho Keem , SoYoung Song
Abstract: An apparatus for testing an edge portion of a substrate, includes a first illumination source configured to irradiate light to an end portion of the edge portion of the substrate; a second illumination source configured to irradiate light to a lower portion of the edge portion; a third illumination source configured to irradiate light to an upper portion of the edge portion; and first to third photographing portions, respectively corresponding to the first to third illumination sources, wherein the first illumination source comprises a C-shaped cross-section and comprises a first curved surface facing the end portion of the edge portion, the second illumination source comprises a half C-shaped cross-section and comprises a second curved surface facing the lower portion of the edge portion, and the third illumination source comprises a half C-shaped cross-section and comprises a third curved surface facing the upper portion of the edge portion.
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Patent Agency Ranking
公开(公告)号：US20190257765A1
公开(公告)日：2019-08-22
申请号：US16346704
申请日：2017-10-31
Applicant: Corning Incorporated
Inventor： Uta-Barbara Goers , En Hong , Sung-chan Hwang , Ji Hwa Jung , Tae-ho Keem , Philip Robert LeBlanc , Rajeshkannan Palanisamy , Sung-jong Pyo , Correy Robert Ustanik
IPC: G01N21/896 , G02B7/182
Abstract: A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.
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公开(公告)号：US11639898B2
公开(公告)日：2023-05-02
申请号：US16606364
申请日：2018-04-18
Applicant: Corning Incorporated
Inventor： Sung-chan Hwang , Ji Hwa Jung , Tae-ho Keem , SoYoung Song
Abstract: An apparatus for testing an edge portion of a substrate, includes a first illumination source configured to irradiate light to an end portion of the edge portion of the substrate; a second illumination source configured to irradiate light to a lower portion of the edge portion; a third illumination source configured to irradiate light to an upper portion of the edge portion; and first to third photographing portions, respectively corresponding to the first to third illumination sources, wherein the first illumination source comprises a C-shaped cross-section and comprises a first curved surface facing the end portion of the edge portion, the second illumination source comprises a half C-shaped cross-section and comprises a second curved surface facing the lower portion of the edge portion, and the third illumination source comprises a half C-shaped cross-section and comprises a third curved surface facing the upper portion of the edge portion.
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公开(公告)号：US10677739B2
公开(公告)日：2020-06-09
申请号：US16346704
申请日：2017-10-31
Applicant: Corning Incorporated
Inventor： Uta-Barbara Goers , En Hong , Sung-chan Hwang , Ji Hwa Jung , Tae-ho Keem , Philip Robert LeBlanc , Rajeshkannan Palanisamy , Sung-jong Pyo , Correy Robert Ustanik
IPC: G01N21/896 , G02B7/182 , G02B21/18 , G02B21/10
Abstract: A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.
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公开(公告)号：US10732126B2
公开(公告)日：2020-08-04
申请号：US16346711
申请日：2017-10-31
Applicant: Corning Incorporated
Inventor： Chong Pyung An , Uta-Barbara Goers , En Hong , Sung-chan Hwang , Ji Hwa Jung , Tae-ho Keem , Philip Robert LeBlanc , Hyeong-cheol Lee , Michal Mlejnek , Johannes Moll , Rajeshkannan Palanisamy , Sung-jong Pyo , Amanda Kathryn Thomas , Correy Robert Ustanik
IPC: G01N21/896 , G01N21/958
Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.
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6.发明申请公开(公告)号：US20190277774A1
公开(公告)日：2019-09-12
申请号：US16346711
申请日：2017-10-31
Applicant: Corning Incorporated
Inventor： Chong Pyung An , Uta-Barbara Goers , En Hong , Sung-chan Hwang , Ji Hwa Jung , Tae-ho Keem , Philip Robert LeBlanc , Hyeong-cheol Lee , Michal Mlejnek , Johannes Moll , Rajeshkannan Palanisamy , Sung-jong Pyo , Amanda Kathryn Thomas , Correy Robert Ustanik
IPC: G01N21/896 , G01N21/958
Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.
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