公开(公告)号：US20190257765A1

公开(公告)日：2019-08-22

申请号：US16346704

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G02B7/182

Abstract: A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.

公开(公告)号：US10677739B2

公开(公告)日：2020-06-09

申请号：US16346704

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G02B7/182 ,  G02B21/18 ,  G02B21/10

Abstract: A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.

公开(公告)号：US10732126B2

公开(公告)日：2020-08-04

申请号：US16346711

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Chong Pyung An ,  Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Hyeong-cheol Lee ,  Michal Mlejnek ,  Johannes Moll ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Amanda Kathryn Thomas ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G01N21/958

Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.

公开(公告)号：US20190277774A1

公开(公告)日：2019-09-12

申请号：US16346711

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Chong Pyung An ,  Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Hyeong-cheol Lee ,  Michal Mlejnek ,  Johannes Moll ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Amanda Kathryn Thomas ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G01N21/958

Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.