公开(公告)号：US10677739B2

公开(公告)日：2020-06-09

申请号：US16346704

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G02B7/182 ,  G02B21/18 ,  G02B21/10

Abstract: A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.

公开(公告)号：US11249032B2

公开(公告)日：2022-02-15

申请号：US16761706

申请日：2018-11-09

Applicant: CORNING INCORPORATED

Inventor： Jeffrey Allen Knowles ,  Correy Robert Ustanik ,  Jiaxiang Zhang

IPC: G01N21/89 ,  G01N21/896 ,  G01N21/47

Abstract: Methods for detecting defects on the surface of a sheet of material include collimating a beam of light and intersecting the collimated beam of light with a beam splitter. The beam splitter directs a first portion of the intersected beam of collimated light to illuminate a first surface of the sheet, wherein a first portion of the light illuminating the first surface is reflected and a second portion of the illuminating light is scattered by a defect. The reflected and scattered light is received with a first lens element that directs the reflected and scattered light to an inverse aperture. The reflected light is blocked by the inverse aperture and the scattered light is transmitted by the inverse aperture. The scattered light transmitted by the inverse aperture is directed with a second lens element to an imaging device.

公开(公告)号：US10739394B2

公开(公告)日：2020-08-11

申请号：US15781226

申请日：2016-11-30

Applicant: CORNING INCORPORATED

Inventor： Gabriel Pierce Agnello ,  Peter Knowles ,  Correy Robert Ustanik

IPC: G01R29/24 ,  G01R31/28 ,  G06F1/00

Abstract: Disclosed herein are apparatuses and methods for measuring electrostatic charge on a surface of a substrate. The apparatuses comprise a substrate mounting platform, a substrate contacting component, and at least one voltage sensor, wherein the apparatus is programmed to independently control the rotational and translation velocity of a roller and/or to measure a voltage of the substrate at multiple points to produce a two-dimensional map of voltage for at least a portion of the substrate.

公开(公告)号：US10732126B2

公开(公告)日：2020-08-04

申请号：US16346711

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Chong Pyung An ,  Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Hyeong-cheol Lee ,  Michal Mlejnek ,  Johannes Moll ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Amanda Kathryn Thomas ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G01N21/958

Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.

公开(公告)号：US20190277774A1

公开(公告)日：2019-09-12

申请号：US16346711

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Chong Pyung An ,  Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Hyeong-cheol Lee ,  Michal Mlejnek ,  Johannes Moll ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Amanda Kathryn Thomas ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G01N21/958

Abstract: A method of inspecting defects on a transparent substrate may include: selecting a gradient of an illumination optical system so that light incident on the transparent substrate has a first angle; selecting a gradient of a detection optical system so that an optical axis of the detection optical system located over the transparent substrate has a second angle, which is equal to or less than the first angle; adjusting a position of at least one of the illumination optical system, the transparent substrate, and the detection optical system so that a field-of-view of the detection optical system covers a first region where the light meets a first surface of the transparent substrate and does not cover a second region where light meets a second surface of the transparent substrate, the second surface being opposite to the first surface; illuminating the transparent substrate; and detecting light scattered from the transparent substrate.

公开(公告)号：US20200333258A1

公开(公告)日：2020-10-22

申请号：US16761706

申请日：2018-11-09

Applicant: CORNING INCORPORATED

Inventor： Jeffrey Allen Knowles ,  Correy Robert Ustanik ,  Jiaxiang Zhang

IPC: G01N21/896 ,  G01N21/47

Abstract: Methods for detecting defects on the surface of a sheet of material include collimating a beam of light and intersecting the collimated beam of light with a beam splitter. The beam splitter directs a first portion of the intersected beam of collimated light to illuminate a first surface of the sheet, wherein a first portion of the light illuminating the first surface is reflected and a second portion of the illuminating light is scattered by a defect. The reflected and scattered light is received with a first lens element that directs the reflected and scattered light to an inverse aperture. The reflected light is blocked by the inverse aperture and the scattered light is transmitted by the inverse aperture. The scattered light transmitted by the inverse aperture is directed with a second lens element to an imaging device.

公开(公告)号：US20190257765A1

公开(公告)日：2019-08-22

申请号：US16346704

申请日：2017-10-31

Applicant: Corning Incorporated

Inventor： Uta-Barbara Goers ,  En Hong ,  Sung-chan Hwang ,  Ji Hwa Jung ,  Tae-ho Keem ,  Philip Robert LeBlanc ,  Rajeshkannan Palanisamy ,  Sung-jong Pyo ,  Correy Robert Ustanik

IPC: G01N21/896 ,  G02B7/182

Abstract: A method of inspecting defects of a transparent substrate may include: illuminating a transparent substrate; calculating an incidence angle range of light so that a first region where the light meets a first surface of the transparent substrate and a second region where light meets a second surface being opposite the first surface of the transparent substrate do not overlap each other; adjusting an incidence angle according to the incidence angle range; adjusting a position of a first detector so that a first field-of-view of the first detector covers the first region and does not cover the second region; adjusting a position of a second detector so that a second field-of-view of the second detector covers the second region and does not cover the first region; and obtaining a first image of the first region and a second image of the second region from the first and second detector, respectively.

公开(公告)号：US20180073967A1

公开(公告)日：2018-03-15

申请号：US15557991

申请日：2016-03-10

Applicant: CORNING INCORPORATED

Inventor： Gabriel Pierce Agnello ,  Chong Pyung An ,  William Kenneth Denson ,  Peter Knowles ,  David Bruce Moorehouse ,  Denwood Falconer Ross ,  Correy Robert Ustanik ,  Siva Venkatachalam

IPC: G01N3/20

CPC classification number: G01N3/20 ,  G01N2203/0076 ,  G01N2203/0282

Abstract: Apparatus and method for testing a sheet of brittle material comprising the steps of measuring one or more edge features of a sheet of brittle material, imparting a bend to the sheet of brittle material and producing relative motion between the sheet and the bend such that the bend traverses the sheet. A stress can be induced in the sheet as a function of the relative motion and imparted bend, wherein the induced stress corresponds to a predetermined strength value, and the measured one or more edge features can be correlated with the strength value.