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公开(公告)号:US20030172975A1
公开(公告)日:2003-09-18
申请号:US10179537
申请日:2002-06-24
申请人: Coventor, Inc.
IPC分类号: F17D001/00
CPC分类号: F16K99/0001 , F15C5/00 , F16K99/0005 , F16K99/0007 , F16K99/0009 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K2099/0069 , F16K2099/0071 , F16K2099/0074 , F16K2099/0076 , F16K2099/008 , F16K2099/0084 , G05D7/0694 , Y10T29/49412 , Y10T137/87314
摘要: A latching microregulator for regulating liquid flow on micro-scale levels comprises a substrate having an inlet port and an outlet port, a valve element defining a valve chamber for opening and closing the inlet port, and an actuator assembly for actuating the valve element. The valve chamber is configured to contain a volume of fluid, and the inlet port and the outlet port are in fluid communication with the valve chamber to provide a liquid flow path through the chamber. The actuator assembly comprises a cantilever beam for moving the valve element between an open position and a closed position, an actuator, such as a piezoelectric element, for moving the cantilever beam, and a latch, such as a permanent magnet, for securing the cantilever beam in the closed position. A flow regulation system comprises a plurality of fluid channels of varied flow conductance and a plurality of latching microregulators for selectively blocking or allowing flow through each of the fluid channels.
摘要翻译: 用于调节微量级液体流动的闭锁微调节器包括具有入口端口和出口端口的基板,限定用于打开和关闭入口端口的阀室的阀元件以及用于致动阀元件的致动器组件。 阀室被构造成容纳一定体积的流体,并且入口端口和出口端口与阀室流体连通以提供通过该腔室的液体流动路径。 致动器组件包括用于在打开位置和关闭位置之间移动阀元件的悬臂梁,用于移动悬臂梁的致动器(例如压电元件)以及用于固定悬臂的闩锁(例如永磁体) 梁处于关闭位置。 流量调节系统包括多个不同流量的流体通道和多个用于选择性地阻塞或允许流过每个流体通道的闭锁微调节器。