Miniature diaphragm-based fiber-optic tip FP pressure sensor, and fabrication method and application thereof

    公开(公告)号:US12044591B2

    公开(公告)日:2024-07-23

    申请号:US17259847

    申请日:2020-08-26

    CPC classification number: G01L9/0077 G02B6/2551 G02B6/2552

    Abstract: A miniature diaphragm-based fiber-optic tip FP pressure sensor, and fabrication method and application thereof. A miniature diaphragm-based fiber-optic tip FP pressure sensor includes an optical fiber, a hollow-core optical fiber, and a pressure sensing diaphragm, wherein the optical fiber and the hollow-core optical fiber have the same diameter, the two are spliced by arc welding; and the pressure sensing diaphragm is bonded to the endface of the hollow-core optical fiber by hydroxide catalysis bonding. The FP pressure sensor can not only realize the all-silica structure of a sensor, but also make the joint of each component free of organic polymer, and has extremely high long-term stability and thermal stability. Meanwhile, by a fabrication method of the miniature diaphragm-based fiber-optic tip FP pressure sensor, the application range and service life of the sensor are increased, and fabrication costs are reduced.

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