METHOD FOR MEASURING GAS TEMPERATURE IN PLASMA

    公开(公告)号:US20210072096A1

    公开(公告)日:2021-03-11

    申请号:US17001132

    申请日:2020-08-24

    Abstract: The present invention discloses a device for measuring gas temperature in plasma, including: a vacuum chamber, a fiber optic temperature sensor, a quartz tube, a circulator, a spectrometer, a broadband light source and a computer. One end of the quartz tube is inserted into the vacuum chamber. The fiber optic temperature sensor is located in the plasma in the vacuum chamber and fixed to the quartz tube. The fiber optic temperature sensor is connected to the circulator by means of an optical fiber passing through the quartz tube. The circulator is connected to the broadband light source and the spectrometer through optical fibers, respectively. The spectrometer is electrically connected to the computer which is configured to read and record spectra collected by the spectrometer.

    Miniature diaphragm-based fiber-optic tip FP pressure sensor, and fabrication method and application thereof

    公开(公告)号:US12044591B2

    公开(公告)日:2024-07-23

    申请号:US17259847

    申请日:2020-08-26

    CPC classification number: G01L9/0077 G02B6/2551 G02B6/2552

    Abstract: A miniature diaphragm-based fiber-optic tip FP pressure sensor, and fabrication method and application thereof. A miniature diaphragm-based fiber-optic tip FP pressure sensor includes an optical fiber, a hollow-core optical fiber, and a pressure sensing diaphragm, wherein the optical fiber and the hollow-core optical fiber have the same diameter, the two are spliced by arc welding; and the pressure sensing diaphragm is bonded to the endface of the hollow-core optical fiber by hydroxide catalysis bonding. The FP pressure sensor can not only realize the all-silica structure of a sensor, but also make the joint of each component free of organic polymer, and has extremely high long-term stability and thermal stability. Meanwhile, by a fabrication method of the miniature diaphragm-based fiber-optic tip FP pressure sensor, the application range and service life of the sensor are increased, and fabrication costs are reduced.

    Method for measuring gas temperature in plasma

    公开(公告)号:US11530955B2

    公开(公告)日:2022-12-20

    申请号:US17001132

    申请日:2020-08-24

    Abstract: The present invention discloses a device for measuring gas temperature in plasma, including: a vacuum chamber, a fiber optic temperature sensor, a quartz tube, a circulator, a spectrometer, a broadband light source and a computer. One end of the quartz tube is inserted into the vacuum chamber. The fiber optic temperature sensor is located in the plasma in the vacuum chamber and fixed to the quartz tube. The fiber optic temperature sensor is connected to the circulator by means of an optical fiber passing through the quartz tube. The circulator is connected to the broadband light source and the spectrometer through optical fibers, respectively. The spectrometer is electrically connected to the computer which is configured to read and record spectra collected by the spectrometer.

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