公开(公告)号：US10108005B2

公开(公告)日：2018-10-23

申请号：US14831996

申请日：2015-08-21

Applicant: DENSO CORPORATION

Inventor： Yusuke Kawai ,  Kenichi Sakai ,  Koichi Oyama ,  Hideaki Nishikawa

IPC: G02B26/08 ,  B81B3/00

Abstract: An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.

公开(公告)号：US12287203B2

公开(公告)日：2025-04-29

申请号：US18169438

申请日：2023-02-15

Applicant: DENSO CORPORATION ,  TOYOTA JIDOSHA KABUSHIKI KAISHA ,  MIRISE Technologies Corporation

Inventor： Shota Harada ,  Keitaro Ito ,  Hideaki Nishikawa ,  Yuuki Inagaki ,  Katsuaki Goto ,  Takahiko Yoshida ,  Yusuke Kawai

IPC: G01C19/5712

Abstract: In a mounting structure, a micro vibrator has: a curved surface portion having a hemispherical curved surface; a connecting portion extending from the curved surface portion toward a center of a hemispherical shape of the curved surface portion; and a surface electrode covering at least a part of the connecting portion and at least a part of the curved surface portion. A mounting substrate has two or more wirings and a part of the micro vibrator is connected to the mounting substrate. The wirings each have an electrode connection portion connected to a portion of the surface electrode covering the connecting portion at an end. The two or more wirings include a voltage application wiring and a voltage detection wiring. The voltage application wiring is spaced away from the voltage detection wiring on the mounting substrate.

公开(公告)号：US10459217B2

公开(公告)日：2019-10-29

申请号：US15547218

申请日：2016-03-25

Applicant: DENSO CORPORATION

Inventor： Koichi Oyama ,  Hideaki Nishikawa ,  Yusuke Kawai ,  Kenichi Sakai

IPC: G02B5/08 ,  G02B7/182 ,  G02B26/08 ,  G02B26/10 ,  H01L41/047 ,  B81B3/00 ,  H01L41/09 ,  H02N2/10

Abstract: A reflector has a reflective surface on first and second directions. Each of torsion beams extends to each opposite side of the reflective surface in the first direction. Each of coupling portions is to each opposite side of the reflector in the first direction and includes a central portion with U-shape having two projection portions and a bottom portion joined to the torsion beam. The projection portions include first concave portions opposing across the torsion beam by being penetrated in thickness direction. Each first concave portion extends in the second direction from an opening to a side surface facing the torsion beam towards an opposite side surface up to a bottom. A distance between the bottoms of the first concave portions across the torsion beam is greater than a distance between the side surfaces each facing the torsion beam of the projection portions.