公开(公告)号：US11785857B2

公开(公告)日：2023-10-10

申请号：US16937966

申请日：2020-07-24

Applicant: DENSO CORPORATION

Inventor： Akihiko Teshigahara ,  Kazuhiko Kano ,  Kenichi Sakai

IPC: H10N30/853 ,  H10N30/072

CPC classification number: H10N30/853 ,  H10N30/072

Abstract: Provided is a piezoelectric film including an AlN crystal, and a first element and a second element doped to the AlN crystal. The first element is an element having an ionic radius larger than an ionic radius of Al. The second element is an element having an ionic radius smaller than the ionic radius of Al. Also provided are piezoelectric film laminated body including an underlayer and a piezoelectric film including ScAlN, and a method of manufacturing the same. The underlayer has a crystal lattice having six-fold symmetry or three-fold symmetry. Also provided are a piezoelectric film including ScAlN having a laminated structure of a hexagonal crystal and a cubic crystal, and a method of manufacturing the same. The cubic crystal is doped with an element other than trivalent element.

公开(公告)号：US09658121B2

公开(公告)日：2017-05-23

申请号：US14913067

申请日：2014-07-30

Applicant: DENSO CORPORATION

Inventor： Takashi Inoue ,  Kensuke Hata ,  Tetsuya Katoh ,  Kenichi Sakai ,  Mayumi Uno ,  Junichi Takeya

IPC: G01L1/22 ,  G01L1/18 ,  H01L51/05

CPC classification number: G01L1/2293 ,  G01L1/18 ,  H01L29/22 ,  H01L29/84 ,  H01L51/057

Abstract: A load sensor is constituted by a rib and a vertical transistor including an organic semiconductor film, and a load measurement can be executed based on a change of a gap between a drain electrode and a source electrode which is a channel length of the vertical transistor. Therefore, a change of a current Ids is in a linear relationship to a load applied to the load sensor.

公开(公告)号：US10108005B2

公开(公告)日：2018-10-23

申请号：US14831996

申请日：2015-08-21

Applicant: DENSO CORPORATION

Inventor： Yusuke Kawai ,  Kenichi Sakai ,  Koichi Oyama ,  Hideaki Nishikawa

IPC: G02B26/08 ,  B81B3/00

Abstract: An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.

公开(公告)号：US10459217B2

公开(公告)日：2019-10-29

申请号：US15547218

申请日：2016-03-25

Applicant: DENSO CORPORATION

Inventor： Koichi Oyama ,  Hideaki Nishikawa ,  Yusuke Kawai ,  Kenichi Sakai

IPC: G02B5/08 ,  G02B7/182 ,  G02B26/08 ,  G02B26/10 ,  H01L41/047 ,  B81B3/00 ,  H01L41/09 ,  H02N2/10

Abstract: A reflector has a reflective surface on first and second directions. Each of torsion beams extends to each opposite side of the reflective surface in the first direction. Each of coupling portions is to each opposite side of the reflector in the first direction and includes a central portion with U-shape having two projection portions and a bottom portion joined to the torsion beam. The projection portions include first concave portions opposing across the torsion beam by being penetrated in thickness direction. Each first concave portion extends in the second direction from an opening to a side surface facing the torsion beam towards an opposite side surface up to a bottom. A distance between the bottoms of the first concave portions across the torsion beam is greater than a distance between the side surfaces each facing the torsion beam of the projection portions.