Optical scanning apparatus having pivoting reflector and piezoelectric element

    公开(公告)号:US10459217B2

    公开(公告)日:2019-10-29

    申请号:US15547218

    申请日:2016-03-25

    Abstract: A reflector has a reflective surface on first and second directions. Each of torsion beams extends to each opposite side of the reflective surface in the first direction. Each of coupling portions is to each opposite side of the reflector in the first direction and includes a central portion with U-shape having two projection portions and a bottom portion joined to the torsion beam. The projection portions include first concave portions opposing across the torsion beam by being penetrated in thickness direction. Each first concave portion extends in the second direction from an opening to a side surface facing the torsion beam towards an opposite side surface up to a bottom. A distance between the bottoms of the first concave portions across the torsion beam is greater than a distance between the side surfaces each facing the torsion beam of the projection portions.

    Semiconductor light emitting element

    公开(公告)号:US11955772B2

    公开(公告)日:2024-04-09

    申请号:US17210939

    申请日:2021-03-24

    CPC classification number: H01S5/1003 H01S5/026 H01S5/04256

    Abstract: A semiconductor light emitting element includes an optical waveguide having a first and second waveguide provided with a width that allows propagation of light in a second-order mode or higher and a multimode optical interference waveguide provided with a wider width than the first and second waveguide and arranged at a position therebetween. The semiconductor light emitting element further includes a first optical loss layer facing the first waveguide in an active-layer crossing direction for causing a loss of light that is propagating in the first waveguide in the second-order mode or higher and a second optical loss layer facing the second waveguide in an active-layer crossing direction for causing a loss of light that is propagating in the second waveguide in the second-order mode or higher, the active-layer crossing direction being orthogonal to a surface of an active layer.

    Distance measurement sensor
    4.
    发明授权

    公开(公告)号:US11480679B2

    公开(公告)日:2022-10-25

    申请号:US16690370

    申请日:2019-11-21

    Abstract: A distance measurement sensor that detects a distance to an object based on heterodyne detection using light generated from a light source and another light received by a light receiver, includes: a scanning unit which scans the light in a first direction; a diffusing lens which diffuses the light in a second direction; multiplexers which multiplex the light and the another light to provide optical signals, respectively; and a processor which detects the distance to the object based on the optical signals. The light receiver has light receiving antennas in the second direction. The multiplexers are connected to the light receiving antennas, respectively. The processor performs a parallel processing for detecting the distance to the object based on the optical signals with respect to the light receiving antennas individually.

    Optical scanner having a variable focus mirror

    公开(公告)号:US10108005B2

    公开(公告)日:2018-10-23

    申请号:US14831996

    申请日:2015-08-21

    Abstract: An optical scanner includes a substrate having a rigid body and a beam, and a layered body having multiple layers, including a lower conductive layer, a interlayer insulation film and an upper conductive layer, the layered body layered on and protruding outward from the rigid body and the beam. The layered body is patterned to form a resonance scanner portion and a vari-focal mirror, the resonance scanner portion (i) made as a part of the layered body and (ii) having an actuator part, and the vari-focal mirror made as a part of the layered body. The layered body including the resonance scanner portion and the vari-focal mirror is patterned to form a mirror driving wire. In such structure, the size of the optical scanner is reduced, and a frequency change of the resonance scanner portion due to the voltage application to the mirror driving wire is suppressed.

    Distance measuring sensor
    6.
    发明授权

    公开(公告)号:US11353561B2

    公开(公告)日:2022-06-07

    申请号:US16175901

    申请日:2018-10-31

    Abstract: A distance measuring sensor includes: a light source having a semiconductor optical amplifier and a resonator with a silicon photonic circuit, which are at a semiconductor substrate; a plurality of emitters, each emitter configured to emit a light beam generated by the light source to outside of the light source; a scanner configured to perform scanning with the light beam by enabling the light beam emitted from the light source to be reflected at a mirror and vibrating the mirror; an optical receiver configured to receive a reflected light beam, which is generated by the light beam reflected at the object; and a processor configured to measure the distance to the object based on the reflected light beam received at the optical receiver. Light beams respectively emitted from the emitters are incident on the mirror in different directions. The scanner performs scanning different regions with the respective light beams.

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