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1.发明申请公开(公告)号：US20130208287A1
公开(公告)日：2013-08-15
申请号：US13760409
申请日：2013-02-06
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
IPC分类号： G01B11/00
CPC分类号： G01B11/002 , G01D5/34746 , G03F7/70775 , H01L21/67259 , H01L21/681
摘要： In a system for detecting the position of an object in relation to a reference system, the object is arranged so as to be movable in relation to the reference system along at least two orthogonal first and second main movement axes. To record the position of the object in relation to the reference system, a position measuring device includes at least two two-dimensional measuring standards situated along the first main movement axis, and four scanning units for an optical scanning of these measuring standards. In addition, at least four additional supplementary scanning units are provided, which are situated between the four scanning units along the first main movement axis.
摘要翻译： 在用于检测物体相对于基准系统的位置的系统中，所述物体被布置成沿着至少两个正交的第一和第二主移动轴线可相对于所述基准系统移动。 为了记录物体相对于基准系统的位置，位置测量装置包括沿着第一主移动轴定位的至少两个二维测量标准，以及用于这些测量标准的光学扫描的四个扫描单元。 此外，提供至少四个附加的补充扫描单元，其位于沿着第一主移动轴线的四个扫描单元之间。
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公开(公告)号：US09188424B2
公开(公告)日：2015-11-17
申请号：US14135000
申请日：2013-12-19
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Erwin Spanner , Thomas Kaelberer
IPC分类号： G01B9/02
CPC分类号： G01B9/02059 , G01B9/02018
摘要： An interferometer includes a light source and a beam splitter, via which the beam of rays emitted by the light source is split into a measurement beam and a reference beam. The measurement beam propagates in a measuring arm extending in a first direction between the beam splitter and a measuring reflector. The measuring reflector brings about an offset perpendicular to the direction of incidence between the measurement beam falling on it and the measurement beam reflected back by it. In a reference arm extending in a second direction, the reference beam propagates between the beam splitter and a reference reflector. In addition, the interferometer has a detector system, to which the superposed and recombined measurement beam and reference beam are able to be supplied, and via which a distance-dependent interference signal with respect to the position of the measuring reflector is able to be generated. The measuring reflector in each case includes at least one transmission grating as well as a reflector element.
摘要翻译： 干涉仪包括光源和分束器，由光源发射的光束通过该分束器被分成测量光束和参考光束。 测量光束在分束器和测量反射器之间沿第一方向延伸的测量臂中传播。 测量反射器产生垂直于落在其上的测量光束与由其反射的测量光束之间的入射方向的偏移的偏移。 在沿第二方向延伸的参考臂中，参考光束在分束器和参考反射器之间传播。 此外，干涉仪具有检测器系统，叠加和重组的测量光束和参考光束能够被提供到该检测器系统，通过该检测器系统能够产生相对于测量反射器的位置的与距离相关的干扰信号 。 每种情况下的测量反射器包括至少一个透射光栅以及反射器元件。
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公开(公告)号：US20150098091A1
公开(公告)日：2015-04-09
申请号：US14508553
申请日：2014-10-07
CPC分类号： G01B11/14 , B23Q3/18 , G03F7/70775
摘要： A system for positioning a tool relative to a workpiece includes a movable table for accommodating a workpiece, the table executing movements in two main moving directions during the processing of the workpiece, one or more planar measuring standards provided in stationary fashion about the tool and extend in the plane of the main moving directions, and scanning heads, mounted in at least three corners of the table, for detecting the position of the table relative to the measuring standards. The position of the table is determinable by the scanning heads in six degrees of freedom. In at least one of the corners, one or more scanning heads having a total of at least three measuring axes is/are provided for 3-D position detection in three independent spatial directions. The sensitivity vectors of the measuring axes for the 3-D position detection are neither parallel to the X-Z plane nor parallel to the Y-Z plane. In this manner, all measuring axes supply periodic signals when the table is moved in a main moving direction.
摘要翻译： 用于相对于工件定位工具的系统包括用于容纳工件的可移动工作台，所述工作台在工件的加工期间执行在两个主移动方向上的运动，一个或多个平面测量标准以固定方式围绕所述工具提供并延伸 在主移动方向的平面中，以及安装在工作台的至少三个角的扫描头，用于检测工作台相对于测量标准的位置。 桌子的位置由六个自由度的扫描头决定。 在至少一个拐角中，提供了一个或多个具有至少三个测量轴的扫描头，用于在三个独立的空间方向上进行三维位置检测。 三维位置检测的测量轴的灵敏度向量既不平行于X-Z平面也不平行于Y-Z平面。 以这种方式，当桌子沿主移动方向移动时，所有测量轴都提供周期性信号。
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公开(公告)号：US09303980B2
公开(公告)日：2016-04-05
申请号：US14508553
申请日：2014-10-07
CPC分类号： G01B11/14 , B23Q3/18 , G03F7/70775
摘要： A system for positioning a tool relative to a workpiece includes a movable table for accommodating a workpiece, and executing movements in two main moving directions during processing of the workpiece, one or more planar measuring standards provided in stationary fashion about the tool and extend in the plane of the main moving directions, and scanning heads, mounted in at least three corners of the table, for detecting the position of the table relative to the measuring standards. The position of the table is determinable by the scanning heads in six degrees of freedom. In at least one of the corners, one or more scanning heads having a total of at least three measuring axes is/are provided for 3-D position detection in three independent spatial directions. Sensitivity vectors of the measuring axes for the 3-D position detection are neither parallel to the X-Z plane nor parallel to the Y-Z plane.
摘要翻译： 用于相对于工件定位工具的系统包括用于容纳工件的可移动工作台，以及在工件加工期间在两个主要移动方向上执行移动，一个或多个平面测量标准以关于工具的固定方式提供并在 主要移动方向的平面以及安装在工作台的至少三个角上的扫描头，用于检测工作台相对于测量标准的位置。 桌子的位置由六个自由度的扫描头决定。 在至少一个拐角中，提供一个或多个具有至少三个测量轴的扫描头，用于在三个独立的空间方向上进行三维位置检测。 3-D位置检测测量轴的灵敏度矢量既不平行于X-Z平面也不平行于Y-Z平面。
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5.发明授权Position-measuring device and system having a plurality of position-measuring devices 有权位置测量装置和系统具有多个位置测量装置公开(公告)号：US09200893B2
公开(公告)日：2015-12-01
申请号：US13757533
申请日：2013-02-01
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
摘要： In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion.
摘要翻译： 在位置测量装置和具有多个位置测量装置的系统中，用于以几个空间自由度确定物体的位置，多个光学位置测量装置从单个探测方向扫描物体，探测 方向与两个主轴运动方向一致。
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6.发明申请公开(公告)号：US20130212854A1
公开(公告)日：2013-08-22
申请号：US13770413
申请日：2013-02-19
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
IPC分类号： B23Q1/72
CPC分类号： G01B11/002 , G01B11/14 , H01L21/67138 , H01L21/67144 , H01L21/6715 , H01L21/68 , H01L21/681 , Y10T29/49778 , Y10T29/54
摘要： In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.
摘要翻译： 在相对于工件定位加工工具的系统和方法中，物体对准标记和工件位于第一物体上。 此外，工件对准标记位于工件上。 可以检测物体对准标记的处理工具位于第二物体上，第二物体被布置成能够相对于第一物体沿着至少一个移动方向移位。 此外，在其上设置对准传感器，借助于该对准传感器可以检测物体对准标记和工件对准标记。 此外，沿着至少一个运动方向延伸的可扫描测量标准被布置在第二物体上。 用于扫描测量标准的至少两个扫描单元位于第一物体上，从而确定沿移动方向的第一和第二物体之间的相对位置，两个扫描单元具有限定的偏移。
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公开(公告)号：US09389100B2
公开(公告)日：2016-07-12
申请号：US14075088
申请日：2013-11-08
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
CPC分类号： G01D5/26 , G01B11/24 , G01D5/3473
摘要： An optical position measuring instrument including a first scale having a first graduation, wherein the first scale is disposed movable in a first measuring direction, and at a first defined position in the first measuring direction, the first scale includes a spatially limited first marking that differs from the first graduation. The optical position measuring instrument further including a second scale having a second graduation, wherein the second scale is disposed movable in a second measuring direction, and at a second defined position, the second scale includes a second reference marking that is usable for generating at least one reference signal at a reference position of the second scale only if the first scale is located in the first defined position.
摘要翻译： 一种光学位置测量仪器，包括具有第一刻度的第一刻度，其中所述第一刻度尺可在第一测量方向上移动，并且在所述第一测量方向上的第一限定位置处，所述第一刻度尺包括不同的空间有限的第一标记 从第一毕业。 所述光学位置测量仪器还包括具有第二刻度的第二刻度，其中所述第二刻度尺可在第二测量方向上移动，并且在第二限定位置，所述第二刻度尺包括可用于至少产生的第二参考标记 仅在第一标尺位于第一限定位置时在第二刻度的参考位置处的一个参考信号。
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8.发明授权System and method for positioning a processing tool in relation to a workpiece 有权用于将加工工具相对于工件定位的系统和方法公开(公告)号：US09151593B2
公开(公告)日：2015-10-06
申请号：US13770413
申请日：2013-02-19
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
CPC分类号： G01B11/002 , G01B11/14 , H01L21/67138 , H01L21/67144 , H01L21/6715 , H01L21/68 , H01L21/681 , Y10T29/49778 , Y10T29/54
摘要： In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.
摘要翻译： 在相对于工件定位加工工具的系统和方法中，物体对准标记和工件位于第一物体上。 此外，工件对准标记位于工件上。 可以检测物体对准标记的处理工具位于第二物体上，第二物体被布置成能够相对于第一物体沿着至少一个移动方向移位。 此外，在其上设置对准传感器，借助于该对准传感器可以检测物体对准标记和工件对准标记。 此外，沿着至少一个运动方向延伸的可扫描测量标准被布置在第二物体上。 用于扫描测量标准的至少两个扫描单元位于第一物体上，从而确定沿移动方向的第一和第二物体之间的相对位置，两个扫描单元具有限定的偏移。
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公开(公告)号：US20130335750A1
公开(公告)日：2013-12-19
申请号：US13919780
申请日：2013-06-17
发明人： Ralf Bihr , Joerg Drescher , Wolfgang Holzapfel , Markus Meissner , Bernhard Musch , Bernhard Pletschacher
IPC分类号： G01B11/14
CPC分类号： G01B11/14 , G01D5/38 , G03F7/70775
摘要： A position-measuring device is used to detect the relative position of two machine components that are disposed in a manner allowing movement relative to each other at least along a first and a second main direction of motion in a displacement plane. The device includes at least one measuring standard, which is mounted on a first machine component. At least six scanning units are mounted on a second machine component, and are used for the optical scanning of the measuring standard in at least two measuring directions in the displacement plane. At least two scanning units are assigned to each measuring direction. The scanning units of each respective measuring direction in the displacement plane are disposed non-centrosymmetrically in relation to a center of the second machine component.
摘要翻译： 位置测量装置用于检测两个机器部件的相对位置，所述两个机器部件至少沿位移平面中的第一和第二主要运动方向相对于彼此移动。 该装置包括安装在第一机器部件上的至少一个测量标准。 至少六个扫描单元安装在第二机器部件上，并且用于在位移平面中的至少两个测量方向上的测量标准的光学扫描。 每个测量方向至少分配两个扫描单元。 位移面中的各测量方向的扫描单元相对于第二机器部件的中心非中心对称地设置。
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10.发明申请Position-Measuring Device and System Having a Plurality of Position-Measuring Devices 有权具有多个位置测量装置的位置测量装置和系统公开(公告)号：US20130194584A1
公开(公告)日：2013-08-01
申请号：US13757533
申请日：2013-02-01
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
IPC分类号： G01B11/14
摘要： In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion.
摘要翻译： 在位置测量装置和具有多个位置测量装置的系统中，用于以几个空间自由度确定物体的位置，多个光学位置测量装置从单个探测方向扫描物体，探测 方向与两个主轴运动方向一致。
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