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公开(公告)号：US09188424B2
公开(公告)日：2015-11-17
申请号：US14135000
申请日：2013-12-19
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Erwin Spanner , Thomas Kaelberer
IPC分类号： G01B9/02
CPC分类号： G01B9/02059 , G01B9/02018
摘要： An interferometer includes a light source and a beam splitter, via which the beam of rays emitted by the light source is split into a measurement beam and a reference beam. The measurement beam propagates in a measuring arm extending in a first direction between the beam splitter and a measuring reflector. The measuring reflector brings about an offset perpendicular to the direction of incidence between the measurement beam falling on it and the measurement beam reflected back by it. In a reference arm extending in a second direction, the reference beam propagates between the beam splitter and a reference reflector. In addition, the interferometer has a detector system, to which the superposed and recombined measurement beam and reference beam are able to be supplied, and via which a distance-dependent interference signal with respect to the position of the measuring reflector is able to be generated. The measuring reflector in each case includes at least one transmission grating as well as a reflector element.
摘要翻译： 干涉仪包括光源和分束器，由光源发射的光束通过该分束器被分成测量光束和参考光束。 测量光束在分束器和测量反射器之间沿第一方向延伸的测量臂中传播。 测量反射器产生垂直于落在其上的测量光束与由其反射的测量光束之间的入射方向的偏移的偏移。 在沿第二方向延伸的参考臂中，参考光束在分束器和参考反射器之间传播。 此外，干涉仪具有检测器系统，叠加和重组的测量光束和参考光束能够被提供到该检测器系统，通过该检测器系统能够产生相对于测量反射器的位置的与距离相关的干扰信号 。 每种情况下的测量反射器包括至少一个透射光栅以及反射器元件。
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公开(公告)号：US20130335746A1
公开(公告)日：2013-12-19
申请号：US13916753
申请日：2013-06-13
发明人： Walter Huber , Ralph Joerger , Wolfgang Holzapfel
IPC分类号： G01B9/02
CPC分类号： G01B9/02049 , G01B9/02018 , G01B9/02022 , G01B9/02061 , G01B11/026 , G01B2290/30
摘要： A device for interferential distance measurement that includes a measurement reflector having a surface and a light source emitting a beam parallel to the surface. The device includes a splitter element including a splitter grating that is disposed perpendicular to the surface, wherein the splitter grating receives the beam and splits the beam into a measurement beam and a reference beam, wherein the measurement beam acts at least twice upon the measurement reflector along a path of the measurement beam. The device including a combining element, at which the measurement beam and the reference beam enter into interferential superposition to form interfering measurement and reference beams. The device further includes a detector arrangement, by way of which a scanning signal pertaining to a distance between the measurement reflector and a component of said device in a measuring direction can be generated from the interfering measurement and reference beams.
摘要翻译： 一种用于干涉距离测量的装置，其包括具有表面的测量反射器和发射平行于该表面的光束的光源。 该装置包括分离器元件，其包括垂直于该表面设置的分离器光栅，其中分离器光栅接收光束并将光束分解成测量光束和参考光束，其中测量光束在测量反射器上起作用至少两次 沿着测量光束的路径。 该装置包括组合元件，测量光束和参考光束在该组合元件处进入干涉测量和参考光束。 该装置还包括检测器装置，通过该装置可以从干涉测量和参考光束产生与测量反射器和测量方向上的部件之间的距离相关的扫描信号。
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公开(公告)号：US09739598B2
公开(公告)日：2017-08-22
申请号：US14784518
申请日：2014-03-11
发明人： Ralph Joerger , Walter Huber
CPC分类号： G01B11/14 , G01B9/02018 , G01B9/02035 , G01B9/02058 , G01B9/02061 , G01B9/02097 , G01B11/026 , G01B2290/30
摘要： A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.
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公开(公告)号：US09389100B2
公开(公告)日：2016-07-12
申请号：US14075088
申请日：2013-11-08
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
CPC分类号： G01D5/26 , G01B11/24 , G01D5/3473
摘要： An optical position measuring instrument including a first scale having a first graduation, wherein the first scale is disposed movable in a first measuring direction, and at a first defined position in the first measuring direction, the first scale includes a spatially limited first marking that differs from the first graduation. The optical position measuring instrument further including a second scale having a second graduation, wherein the second scale is disposed movable in a second measuring direction, and at a second defined position, the second scale includes a second reference marking that is usable for generating at least one reference signal at a reference position of the second scale only if the first scale is located in the first defined position.
摘要翻译： 一种光学位置测量仪器，包括具有第一刻度的第一刻度，其中所述第一刻度尺可在第一测量方向上移动，并且在所述第一测量方向上的第一限定位置处，所述第一刻度尺包括不同的空间有限的第一标记 从第一毕业。 所述光学位置测量仪器还包括具有第二刻度的第二刻度，其中所述第二刻度尺可在第二测量方向上移动，并且在第二限定位置，所述第二刻度尺包括可用于至少产生的第二参考标记 仅在第一标尺位于第一限定位置时在第二刻度的参考位置处的一个参考信号。
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公开(公告)号：US20160061587A1
公开(公告)日：2016-03-03
申请号：US14784518
申请日：2014-03-11
发明人： Ralph Joerger , Walter Huber
CPC分类号： G01B11/14 , G01B9/02018 , G01B9/02035 , G01B9/02058 , G01B9/02061 , G01B9/02097 , G01B11/026 , G01B2290/30
摘要： A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams.
摘要翻译： 一种用于沿着至少一个移动方向相对于彼此以可移动方式设置的两个物体之间的干涉距离测量的装置包括至少一个光源以及至少一个分离元件，其将由 将光源分离成至少两个以不同角度向前传播的部分光束。 该装置还包括至少一个偏转元件，该偏转元件在合并位置的方向上影响入射的部分光束的偏转，其中分裂的部分光束以干涉的方式叠加，并且部分光束的光路在分离之间 位置和合并位置被布置为使得在分离位置和合并位置之间的部分光束的经过光程长度在两个对象之间的距离变化的情况下是相同的。 此外，提供至少一个检测器系统用于检测来自叠加的一对干扰部分光束的距离相关信号。
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6.发明授权System and method for positioning a processing tool in relation to a workpiece 有权用于将加工工具相对于工件定位的系统和方法公开(公告)号：US09151593B2
公开(公告)日：2015-10-06
申请号：US13770413
申请日：2013-02-19
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
CPC分类号： G01B11/002 , G01B11/14 , H01L21/67138 , H01L21/67144 , H01L21/6715 , H01L21/68 , H01L21/681 , Y10T29/49778 , Y10T29/54
摘要： In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.
摘要翻译： 在相对于工件定位加工工具的系统和方法中，物体对准标记和工件位于第一物体上。 此外，工件对准标记位于工件上。 可以检测物体对准标记的处理工具位于第二物体上，第二物体被布置成能够相对于第一物体沿着至少一个移动方向移位。 此外，在其上设置对准传感器，借助于该对准传感器可以检测物体对准标记和工件对准标记。 此外，沿着至少一个运动方向延伸的可扫描测量标准被布置在第二物体上。 用于扫描测量标准的至少两个扫描单元位于第一物体上，从而确定沿移动方向的第一和第二物体之间的相对位置，两个扫描单元具有限定的偏移。
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7.发明申请Position-Measuring Device and System Having a Plurality of Position-Measuring Devices 有权具有多个位置测量装置的位置测量装置和系统公开(公告)号：US20130194584A1
公开(公告)日：2013-08-01
申请号：US13757533
申请日：2013-02-01
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
IPC分类号： G01B11/14
摘要： In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion.
摘要翻译： 在位置测量装置和具有多个位置测量装置的系统中，用于以几个空间自由度确定物体的位置，多个光学位置测量装置从单个探测方向扫描物体，探测 方向与两个主轴运动方向一致。
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公开(公告)号：US20150116731A1
公开(公告)日：2015-04-30
申请号：US14524035
申请日：2014-10-27
发明人： Walter HUBER , Wolfgang Holzapfel , Ralph Joerger
IPC分类号： G01B11/00
CPC分类号： G01B11/002 , G01B11/14 , G01D5/38
摘要： A device for position determination includes a light source and a planar measurement reflector movable along a measurement direction oriented perpendicular to the measurement reflector. A detector device is disposed such that a beam emitted by the light source strikes the detector device after impinging on the measurement reflector so that, in an event of a movement of the measurement reflector along the measurement direction, a signal results which is dependent on a position of the measurement reflector and from which a reference signal is generatable at a defined reference position. A deflection unit is disposed so as to deflect the beam such that the beam strikes the measurement reflector twice and therebetween passes through the deflection unit. The deflection unit is arranged so that a deviation in beam direction, resulting after the first reflection from a tilt of the measurement reflector, is compensated after the second reflection.
摘要翻译： 用于位置确定的装置包括可沿着垂直于测量反射器定向的测量方向移动的光源和平面测量反射器。 检测器装置被布置成使得由光源发射的光束在撞击测量反射器之后撞击检测器装置，使得在测量反射器沿着测量方向运动的情况下，取决于测量反射器的信号结果 测量反射器的位置，并且参考信号可以在其定义的参考位置产生。 设置偏转单元以使梁偏转，使得光束撞击测量反射器两次，并且其间通过偏转单元。 偏转单元被布置成使得在第二次反射之后补偿来自测量反射器的倾斜的第一次反射之后的光束方向的偏差。
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9.发明申请公开(公告)号：US20130208287A1
公开(公告)日：2013-08-15
申请号：US13760409
申请日：2013-02-06
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
IPC分类号： G01B11/00
CPC分类号： G01B11/002 , G01D5/34746 , G03F7/70775 , H01L21/67259 , H01L21/681
摘要： In a system for detecting the position of an object in relation to a reference system, the object is arranged so as to be movable in relation to the reference system along at least two orthogonal first and second main movement axes. To record the position of the object in relation to the reference system, a position measuring device includes at least two two-dimensional measuring standards situated along the first main movement axis, and four scanning units for an optical scanning of these measuring standards. In addition, at least four additional supplementary scanning units are provided, which are situated between the four scanning units along the first main movement axis.
摘要翻译： 在用于检测物体相对于基准系统的位置的系统中，所述物体被布置成沿着至少两个正交的第一和第二主移动轴线可相对于所述基准系统移动。 为了记录物体相对于基准系统的位置，位置测量装置包括沿着第一主移动轴定位的至少两个二维测量标准，以及用于这些测量标准的光学扫描的四个扫描单元。 此外，提供至少四个附加的补充扫描单元，其位于沿着第一主移动轴线的四个扫描单元之间。
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公开(公告)号：US09921468B2
公开(公告)日：2018-03-20
申请号：US15291088
申请日：2016-10-12
发明人： Wolfgang Holzapfel , Joerg Drescher , Markus Meissner , Ralph Joerger , Bernhard Musch , Thomas Kaelberer
CPC分类号： G03F7/00 , G01D5/266 , G01D5/30 , G03F7/70775
摘要： An X-Y table with a position-measuring device includes a table which is disposed on a support and is movable on the support so that altogether the table is positionable in a plane parallel to an underlying stationary base. Two groups of scanning heads are disposed on the support. For position measurement in two directions, a respective one of the scanning heads directs light through a respective transmissive scale attached along an edge of the table such that a respective reflective scale, which is stationary relative to a processing tool disposed above the table, reflects the light through the respective transmissive scale back to the respective scanning head. In a central position of the table, the two groups are in positional correspondence with the transmissive scales, and, in either of two edge positions of the table, only one of the two groups is in positional correspondence with the transmissive scales.
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