公开(公告)号：US09648417B2

公开(公告)日：2017-05-09

申请号：US15072428

申请日：2016-03-17

Applicant: DSP Group LTD.

Inventor： Haim Kupershmidt ,  Moti Margalit

IPC: H04R3/00 ,  H04R19/02

CPC classification number: H04R3/00 ,  H01L41/042 ,  H04R3/005 ,  H04R19/02 ,  H04R2201/003

Abstract: A method of charge reuse, the method may include repeating the steps of: electrically coupling a first group of capacitive loads to a second group of capacitive loads; wherein the capacitive loads of the first group and of the second group are Microelectromechanical systems (MEMS) capacitive loads or Nanoelectromechanical systems (NEMS) capacitive loads; charging the second group with a first charge provided from the first group; electrically disconnecting the first group from the second group; operating the second group while using the first charge; electrically coupling the first group to the second group; charging the first group with a second charge provided from the second group; electrically disconnecting the first group from the second group; and operating the first group while using the second charge.

公开(公告)号：US20160277832A1

公开(公告)日：2016-09-22

申请号：US15072428

申请日：2016-03-17

Applicant: DSP Group LTD.

Inventor： Haim Kupershmidt ,  Moti Margalit

IPC: H04R3/00 ,  H04R19/02

CPC classification number: H04R3/00 ,  H01L41/042 ,  H04R3/005 ,  H04R19/02 ,  H04R2201/003

Abstract: A method of charge reuse, the method may include repeating the steps of: electrically coupling a first group of capacitive loads to a second group of capacitive loads; wherein the capacitive loads of the first group and of the second group are Microelectromechanical systems (MEMS) capacitive loads or Nanoelectromechanical systems (NEMS) capacitive loads; charging the second group with a first charge provided from the first group; electrically disconnecting the first group from the second group; operating the second group while using the first charge; electrically coupling the first group to the second group; charging the first group with a second charge provided from the second group; electrically disconnecting the first group from the second group; and operating the first group while using the second charge.

Abstract translation: 一种电荷重用的方法，所述方法可以包括重复以下步骤：将第一组电容性负载电耦合到第二组容性负载; 其中第一组和第二组的电容性负载是微机电系统（MEMS）电容性负载或纳米机电系统（NEMS）容性负载; 以第一组提供的第一电荷对第二组充电; 将第一组与第二组电气断开连接; 在使用第一次收费时操作第二组; 将第一组电耦合到第二组; 以第二组提供的第二电荷对第一组充电; 将第一组与第二组电气断开连接; 并在使用第二次充电时操作第一组。

公开(公告)号：US20160277845A1

公开(公告)日：2016-09-22

申请号：US15071230

申请日：2016-03-16

Applicant: DSP Group LTD.

Inventor： Haim Kupershmidt ,  Moti Margalit ,  Adi Baram

IPC: H04R19/02 ,  H04R19/00 ,  H04R31/00 ,  B81C1/00 ,  B81B3/00

CPC classification number: H04R19/02 ,  H04R19/005 ,  H04R31/00 ,  H04R2201/003 ,  H04R2217/03

Abstract: A micro-electromechanical system (MEMS) device that comprises a substrate, support structures, functional elements and conductive paths that comprise conductive elements; wherein the functional elements are included in a plurality of functional layers, the plurality of functional layers are spaced apart from each other; wherein the support structures are configured to provide structural support to the plurality of functional layers; wherein each functional layer is coupled to a conducting interface via a conductive path that is associated with the functional layer; and wherein the support structures comprise lateral etch stop elements.

Abstract translation: 一种微机电系统（MEMS）装置，其包括基板，支撑结构，功能元件和包括导电元件的导电路径; 其中所述功能元件包括在多个功能层中，所述多个功能层彼此间隔开; 其中所述支撑结构被配置为向所述多个功能层提供结构支撑; 其中每个功能层经由与所述功能层相关联的导电路径耦合到导电接口; 并且其中所述支撑结构包括横向蚀刻停止元件。

公开(公告)号：US20160277838A1

公开(公告)日：2016-09-22

申请号：US15072379

申请日：2016-03-17

Applicant: DSP Group LTD.

Inventor： Haim Kupershmidt ,  Moti Margalit ,  Adi Baram

IPC: H04R7/16

CPC classification number: H04R31/00 ,  H04R1/403 ,  H04R19/005 ,  H04R19/02

Abstract: A micro-electromechanical system (MEMS) device that may include a substrate, support structures and functional elements; wherein the functional elements are included in a plurality of functional layers, the plurality of functional layers are spaced apart from each other; wherein the support structures are conductive and are configured to provide structural support to the plurality of functional layers; wherein each functional element is electrically coupled to at least one of the support structures; and wherein the support structures are spaced apart from each other.

Abstract translation: 可以包括衬底，支撑结构和功能元件的微机电系统（MEMS）装置; 其中所述功能元件包括在多个功能层中，所述多个功能层彼此间隔开; 其中所述支撑结构是导电的并且被配置成向所述多个功能层提供结构支撑; 其中每个功能元件电耦合到所述支撑结构中的至少一个; 并且其中所述支撑结构彼此间隔开。