公开(公告)号：US20110141462A1

公开(公告)日：2011-06-16

申请号：US13034565

申请日：2011-02-24

Applicant: Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

Inventor： Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/1717

Abstract: Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.

Abstract translation: 用于检查表面的装置，包括具有相应的泵浦光学输出端的多个泵浦源，并且通过泵浦光学输出端提供相应的泵浦光束，以及具有相应的探测光学输出端的多个探测源，并且通过探针提供相应的探测光束 光输出端。 存在对准安装，其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件，其将相应的泵浦光束和探测光束传送到表面，以便产生来自多个 各自的位置，并且从各个位置传送返回的辐射。 该装置包括接收单元，该接收单元适于接收返回的辐射并适于响应于此确定相应位置的特性。

公开(公告)号：US20060012791A1

公开(公告)日：2006-01-19

申请号：US11158733

申请日：2005-06-21

Applicant: Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

Inventor： Silviu Reinhorn ,  Daniel Some ,  Gilad Almogy

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/1717

Abstract: Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.

Abstract translation: 用于检查表面的装置，包括具有相应的泵浦光学输出端的多个泵浦源，并且通过泵浦光学输出端提供相应的泵浦光束，以及具有相应的探测光学输出端的多个探测源，并且通过探针提供相应的探测光束 光输出端。 存在对准安装，其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件，其将相应的泵浦光束和探测光束传送到表面，以便产生来自多个 各自的位置，并且从各个位置传送返回的辐射。 该装置包括接收单元，该接收单元适于接收返回的辐射并适于响应于此确定相应位置的特性。

公开(公告)号：US07433053B2

公开(公告)日：2008-10-07

申请号：US10215943

申请日：2002-08-08

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01B9/02

CPC classification number: G01N21/9501 ,  G01N21/47

Abstract: Apparatus for optical inspection of a sample includes a radiation source, adapted to irradiate a spot on the sample with coherent radiation, and collection optics, adapted to collect the radiation scattered from the spot so as to form a beam of scattered radiation. A diffractive optical element (DOE) is positioned to intercept the beam of scattered radiation and is adapted to deflect a first portion of the beam by a predetermined offset relative to a second portion of the beam, and then to optically combine the first portion with the second portion to generate a product beam. A detector is positioned to receive the product beam and to generate a signal responsive thereto, which is processed by a signal processor so as to determine an autocorrelation value of the product beam.

Abstract translation: 用于光学检查样品的装置包括适于用相干辐射照射样品上的斑点的辐射源和收集光学元件，适于收集从光斑散射的辐射，以形成散射辐射束。 定位衍射光学元件（DOE）以拦截散射辐射束，并且适于使光束的第一部分相对于光束的第二部分偏移预定偏移，然后将第一部分与 第二部分以产生产品光束。 定位检测器以接收产品光束并产生响应于此的信号，由信号处理器处理信号，以便确定产品光束的自相关值。

公开(公告)号：US07365836B2

公开(公告)日：2008-04-29

申请号：US11317156

申请日：2005-12-22

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

公开(公告)号：US07693323B2

公开(公告)日：2010-04-06

申请号：US10097442

申请日：2002-03-12

Applicant: Evgeni Levin ,  Daniel Some ,  Mirta Perlman

Inventor： Evgeni Levin ,  Daniel Some ,  Mirta Perlman

IPC: G06K9/00

CPC classification number: G01N21/95607

Abstract: A method for inspecting a substrate for defects, including: A method for inspecting a substrate for defects, the method including the steps of: (i) obtaining at least two wafer element detection signal; each wafer element detection signal reflects light scattered to a distinct direction; each wafer element detection signal having a wafer element detection value; (ii) calculating at least one wafer element attribute value in response to the at least two wafer element detection signals; retrieving at least one reference wafer element attribute value, each wafer element attribute value corresponding to a reference wafer element attribute value; and (iii) determining a relationship between the at least one reference wafer element attribute value, wafer element attribute value and at least one threshold to indicate a presence of a defect.

Abstract translation: 一种用于检查基板的缺陷的方法，包括：用于检查基板的缺陷的方法，所述方法包括以下步骤：（i）获得至少两个晶片元件检测信号; 每个晶片元件检测信号反射散射到不同方向的光; 每个晶片元件检测信号具有晶片元件检测值; （ii）响应于所述至少两个晶片元件检测信号计算至少一个晶片元件属性值; 检索至少一个参考晶片元件属性值，每个晶片元件属性值对应于参考晶片元件属性值; 以及（iii）确定所述至少一个参考晶片元件属性值，晶片元件属性值和至少一个阈值之间的关系，以指示存在缺陷。

公开(公告)号：US07359045B2

公开(公告)日：2008-04-15

申请号：US10386973

申请日：2003-03-11

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

公开(公告)号：US07027142B2

公开(公告)日：2006-04-11

申请号：US10423354

申请日：2003-04-25

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/956 ,  G01N21/171 ,  G01N21/636 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

公开(公告)号：US07589835B2

公开(公告)日：2009-09-15

申请号：US12099705

申请日：2008-04-08

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

公开(公告)号：US20080212081A1

公开(公告)日：2008-09-04

申请号：US12099705

申请日：2008-04-08

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00 ,  G02B27/10 ,  G01N21/55 ,  G01J3/00 ,  G01N21/47 ,  G02B5/122

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

公开(公告)号：US20060132758A1

公开(公告)日：2006-06-22

申请号：US11317156

申请日：2005-12-22

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.