公开(公告)号：US20180106723A1

公开(公告)日：2018-04-19

申请号：US15841219

申请日：2017-12-13

Applicant: KLA-Tencor Corporation

Inventor： Amnon Manassen ,  Andrew Hill ,  Daniel Kandel ,  Ilan Sela ,  Ohad Bachar ,  Barak Bringoltz

IPC: G01N21/55 ,  G01B11/00 ,  G01N21/956 ,  G01N21/95

CPC classification number: G01N21/55 ,  G01B11/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/104

Abstract: Angle-resolved reflectometers and reflectometry methods are provided, which comprise a coherent light source, an optical system arranged to scan a test pattern using a spot of coherent light from the light source to yield realizations of the light distribution in the collected pupil, wherein the spot covers a part of the test pattern and the scanning is carried out optically or mechanically according to a scanning pattern, and a processing unit arranged to generate a composite image of the collected pupil distribution by combining the pupil images. Metrology systems and methods are provided, which reduce diffraction errors by estimating, quantitatively, a functional dependency of measurement parameters on aperture sizes and deriving, from identified diffraction components of the functional dependency which relate to the aperture sizes, correction terms for the measurement parameters with respect to the measurement conditions.

公开(公告)号：US07359045B2

公开(公告)日：2008-04-15

申请号：US10386973

申请日：2003-03-11

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

公开(公告)号：US20070153286A1

公开(公告)日：2007-07-05

申请号：US11323715

申请日：2005-12-30

Applicant: Michael Hughes ,  Sebastien Tixier

Inventor： Michael Hughes ,  Sebastien Tixier

IPC: G01J3/45 ,  G01B9/02

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01N21/86 ,  G01N21/8901 ,  G01N33/34 ,  G01N2021/3595 ,  G01N2021/8917 ,  G01N2201/104

Abstract: An optical scanner for use in conjunction with an infrared spectrometer is disclosed. The optical scanner translates a beam of radiation to a stationary spot on a traveling sheet of material so that ample integration time within the spectrometer is achieved. The beam path impinges on the traveling web and the radiation is reflected off the traveling web back through the optical scanner and recombined at an interferometer. The beam of radiation is kept stationary with respect to both the traveling sheet and the carriage which houses the spectrometer.

Abstract translation: 公开了一种与红外光谱仪一起使用的光学扫描仪。 光学扫描器将辐射束转换成行进的材料片上的固定点，从而实现光谱仪内的充足的积分时间。 光束路径撞击行进网，并且辐射通过光学扫描器反射回行进网，并在干涉仪上重新组合。 辐射束相对于移动片和容纳光谱仪的托架保持静止。

公开(公告)号：US20060152716A1

公开(公告)日：2006-07-13

申请号：US11372556

申请日：2006-03-11

Applicant: Steven Meeks

Inventor： Steven Meeks

IPC: G01N21/88

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US07027142B2

公开(公告)日：2006-04-11

申请号：US10423354

申请日：2003-04-25

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/956 ,  G01N21/171 ,  G01N21/636 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

公开(公告)号：US20040169850A1

公开(公告)日：2004-09-02

申请号：US10754275

申请日：2004-01-08

Inventor： Steven W. Meeks

IPC: G01N021/88

CPC classification number: G01N21/9506 ,  G01B11/0616 ,  G01B11/0641 ,  G01B11/065 ,  G01B11/303 ,  G01B11/306 ,  G01N21/21 ,  G01N21/47 ,  G01N21/9501 ,  G01N21/958 ,  G01N2021/8427 ,  G01N2021/8841 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/1045 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A double-sided optical inspection system is presented which may detect and classify particles, pits and scratches on thin film disks or wafers in a single scan of the surface. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction on both surfaces of the wafer or thin film disk. The scattered light from radial and circumferential beams is separated via their polarization or by the use of a dichroic mirror together with two different laser wavelengths.

Abstract translation: 提出了一种双面光学检测系统，其可以在表面的单次扫描中检测和分类薄膜盘或晶片上的颗粒，凹坑和划痕。 在一个实施例中，本发明使用一对正交取向的激光束，一个在径向上，一个在圆周方向上在晶片或薄膜盘的两个表面上。 来自径向和周向光束的散射光通过其偏振分离，或者通过使用二向色镜与两种不同的激光波长分离。

公开(公告)号：US06735372B2

公开(公告)日：2004-05-11

申请号：US10163153

申请日：2002-06-04

Applicant: Dennis Chi Zhou ,  Kai Zhang ,  Shou-Jong Sheih

Inventor： Dennis Chi Zhou ,  Kai Zhang ,  Shou-Jong Sheih

IPC: G02B600

CPC classification number: G01J1/4257 ,  G01J1/04 ,  G01J1/0418 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104 ,  G02B6/266 ,  G02B6/4215 ,  G02B6/4286 ,  H04B10/077 ,  H04B10/07955

Abstract: The present invention is directed towards a channel power monitor for monitoring channel power levels for each of N signal channels. The value of each channel power level is designated as p(&lgr;i), where &lgr;i is a channel parameter that characterizes each channel. An embodiment of the invention includes a variable channel attenuator having M attenuation profiles where M≧N, and where a k-th attenuation profile is characterized as a function of the channel parameter &lgr;i by Ak(&lgr;i). This embodiment also includes a detector for measuring a k-th integrated attenuated power level, the value of which is represented by Pk. An analysis unit receives all of the values Pk of the integrated attenuated power levels and thereupon derives the values p(&lgr;i) of the channel power levels by solving a set of linear equations.

Abstract translation: 本发明涉及用于监视N个信号信道中的每一个的信道功率电平的信道功率监视器。 每个通道功率电平的值被指定为p（lambdai），其中lambdai是表示每个通道的通道参数。 本发明的实施例包括具有M衰减分布的可变信道衰减器，其中M> = N，并且其中第k个衰减分布被表征为Ak（lambdai）的信道参数lambdai的函数。 该实施例还包括用于测量第k个积分衰减功率电平的检测器，其值由Pk表示。 分析单元接收积分衰减功率电平的所有值Pk，并且通过求解一组线性方程式导出信道功率电平的值p（lambdai）。

公开(公告)号：US20240201074A1

公开(公告)日：2024-06-20

申请号：US18286101

申请日：2022-04-08

Applicant: THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE

Inventor： Caroline B. Alden ,  Sean C Coburn ,  Robert J. Wright ,  Gregory B. Rieker

IPC: G01N21/31 ,  G01N33/00 ,  G02B26/10

CPC classification number: G01N21/31 ,  G01N33/0027 ,  G02B26/10 ,  G01N2201/104

Abstract: A dual-beam optomechanical steerer includes first and second rotators mounted to a two-axis gimbal system. Each rotator is adjustable to control the azimuthal and elevation angles at which an optical transmitter affixed to the rotator transmits a beam of light. Thus, the two-axis gimbal system orients two optical transmitters identically while the first and second rotators orient the two optical transmitters independently with respect to the two-axis gimbal system. Examples of each rotator include a tip-tilt stage, goniometer, and rotation stage. Alternatively, a deflector may be used instead of each rotator. Examples of the deflector include an acousto-optic deflector, translatable lens, and Risley prism. The dual-beam steerer may be used to perform remote gas detection with two separate optical beams.

公开(公告)号：US20170234806A1

公开(公告)日：2017-08-17

申请号：US15584628

申请日：2017-05-02

Applicant: General Electric Company

Inventor： Manuel Kenneth Bueno ,  Robert Martin Roney, JR.

IPC: G01N21/88 ,  G01N21/954 ,  G01S17/89 ,  G01S7/481

CPC classification number: G01N21/8851 ,  G01N21/88 ,  G01N21/954 ,  G01N2021/9544 ,  G01N2021/9546 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1045 ,  G01S7/4815 ,  G01S7/4817 ,  G01S7/4818 ,  G01S17/88 ,  G01S17/89

Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.

公开(公告)号：US20150153281A1

公开(公告)日：2015-06-04

申请号：US14405491

申请日：2013-06-11

Applicant: Sharp Kabushiki Kaisha

Inventor： Ryohhei Kawamuki

IPC: G01N21/64

CPC classification number: G01N21/6456 ,  G01N21/6486 ,  G01N27/44721 ,  G01N27/44778 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/101 ,  G01N2201/104

Abstract: A scanning module (9) is disposed over a first plate (32). A first motor (39) of moving the scanning module (9) in a second scanning direction and a second motor (49) of moving the scanning module (9) in a first scanning direction are disposed under the first plate (32). In this manner, the first motor (39) and the second motor (49) being a heat source are disposed on a side opposite to a scanning module (9) side using the first plate (32) as a boundary, and thus a transferred amount of heat from the first motor (39) and the second motor (49) to the scanning module (9) decreases. As a result, accuracy of fluorescence detection is prevented from degrading due to thermal distortion of a detection optical system in the scanning module (9).

Abstract translation: 扫描模块（9）设置在第一板（32）上。 在第一扫描方向上移动扫描模块（9）的第一马达（39）和沿第一扫描方向移动扫描模块（9）的第二马达（49）设置在第一板（32）的下方。 以这种方式，作为热源的第一马达39和第二马达49利用第一板32作为边界设置在与扫描模块9相反的一侧，由此转移 从第一马达39和第二马达49到扫描模块9的热量减少。 结果，由于扫描模块（9）中的检测光学系统的热失真，防止荧光检测的精度降低。