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1.发明申请公开(公告)号：US20060007045A1
公开(公告)日：2006-01-12
申请号：US11154577
申请日：2005-06-17
申请人： Danilo Fiasca , Giosue Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Massimo Pappalardo
发明人： Danilo Fiasca , Giosue Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Massimo Pappalardo
IPC分类号： H01Q1/26
CPC分类号： G01S15/8925 , G01S7/52047 , G01S15/8927
摘要： The invention relates to an ultrasonic transducer comprising a plurality of micro-cells, arranged in an array having M rows and N columns, and driving electronic means apt to connect in parallel to each other said micro-cells so as to form at least two sub-groups of said micro-cells, the micro-cells of each sub-group being connected in parallel to each other, at least one column of said array comprising micro-cells belonging to at least two different adjacent sub-groups, so that a radiation emitted in a direction perpendicular to the array columns by said at least one column has a phase that is intermediate between the phases of said at least two different adjacent sub-groups.
摘要翻译： 本发明涉及一种超声波换能器，包括多个微电池，其排列成具有M行和N列的阵列，以及驱动电子装置，以便彼此平行地连接所述微电池，从而形成至少两个子 - 所述微细胞的组，每个子组的微细胞彼此并联连接，所述阵列的至少一列包括属于至少两个不同相邻亚组的微细胞，使得a 由所述至少一个列在垂直于阵列的方向上发射的辐射具有位于所述至少两个不同相邻子组的相位之间的相位。
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2.发明授权公开(公告)号：US08033997B2
公开(公告)日：2011-10-11
申请号：US11154577
申请日：2005-06-17
申请人： Danilo Fiasca , Giosuè Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Massimo Pappalardo
发明人： Danilo Fiasca , Giosuè Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Massimo Pappalardo
IPC分类号： A61B8/14
CPC分类号： G01S15/8925 , G01S7/52047 , G01S15/8927
摘要： The invention relates to an ultrasonic transducer comprising a plurality of micro-cells, arranged in an array having M rows and N columns, and driving electronic means apt to connect in parallel to each other said micro-cells so as to form at least two sub-groups of said micro-cells, the micro-cells of each sub-group being connected in parallel to each other, at least one column of said array comprising micro-cells belonging to at least two different adjacent sub-groups, so that a radiation emitted in a direction perpendicular to the array columns by said at least one column has a phase that is intermediate between the phases of said at least two different adjacent sub-groups.
摘要翻译： 本发明涉及一种超声波换能器，包括多个微电池，其排列成具有M行和N列的阵列，以及驱动电子装置，以便彼此平行地连接所述微电池，从而形成至少两个子 - 所述微细胞的组，每个子组的微细胞彼此并联连接，所述阵列的至少一列包括属于至少两个不同相邻亚组的微细胞，使得a 由所述至少一个列在垂直于阵列的方向上发射的辐射具有位于所述至少两个不同相邻子组的相位之间的相位。
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3.发明申请Surface Micromechanical Process For Manufacturing Micromachined Capacitive Ultra-Acoustic Transducers and Relevant Micromachined Capacitive Ultra-Acoustic Transducer 有权用于制造微加工电容式超声波传感器的表面微机械工艺和相关微加工电容式超声换能器公开(公告)号：US20080212407A1
公开(公告)日：2008-09-04
申请号：US11817621
申请日：2006-03-02
申请人： Giosue Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Antonio Minotti , Alessandro Nencioni , Massimo Pappalardo
发明人： Giosue Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Antonio Minotti , Alessandro Nencioni , Massimo Pappalardo
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： The invention concerns a manufacturing process, and the related micromachined capacitive ultra-acoustic transducer, that uses commercial silicon wafer 8 already covered on at least one or, more preferably, on both faces by an upper layer 9 and by a lower layer 9′ of silicon nitride deposited with low pressure chemical vapour deposition technique, or deposition LPCVD deposition. One of the two layers 9 or 9′ of silicon nitride, of optimal quality, covering the wafer 8 is used as emitting membrane of the transducer. As a consequence, the micro-cell array 6 forming the CMUT transducer is grown onto one of the two layers of silicon nitride, i.e. it is grown at the back of the transducer with a sequence of steps that is reversed with respect to the classical technology.
摘要翻译： 本发明涉及一种制造工艺和相关的微加工电容式超声换能器，其使用已经在至少一个或更优选地在两个表面上由上层9和下层9'覆盖的商业硅晶片8 用低压化学气相沉积技术沉积的氮化硅或沉积LPCVD沉积。 覆盖晶片8的最佳质量的氮化硅的两层9或9'之一被用作换能器的发射膜。 因此，形成CMUT换能器的微单元阵列6生长在两层氮化硅之一上，即它在传感器的背面以相对于经典技术颠倒的一系列步骤生长 。
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4.发明授权公开(公告)号：US07790490B2
公开(公告)日：2010-09-07
申请号：US11817621
申请日：2006-03-02
申请人： Giosuè Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Antonio Minotti , Alessandro Nencioni , Massimo Pappalardo
发明人： Giosuè Caliano , Alessandro Caronti , Vittorio Foglietti , Elena Cianci , Antonio Minotti , Alessandro Nencioni , Massimo Pappalardo
IPC分类号： H01L21/00
CPC分类号： B06B1/0292 , Y10T29/49005
摘要： The invention concerns a manufacturing process, and the related micromachined capacitive ultra-acoustic transducer, that uses commercial silicon wafer 8 already covered on at least one or, more preferably, on both faces by an upper layer 9 and by a lower layer 9′ of silicon nitride deposited with low pressure chemical vapour deposition technique, or deposition LPCVD deposition. One of the two layers 9 or 9′ of silicon nitride, of optimal quality, covering the wafer 8 is used as emitting membrane of the transducer. As a consequence, the micro-cell array 6 forming the CMUT transducer is grown onto one of the two layers of silicon nitride, i.e. it is grown at the back of the transducer with a sequence of steps that is reversed with respect to the classical technology.
摘要翻译： 本发明涉及一种制造工艺和相关的微加工电容式超声换能器，其使用商业硅晶片8，其已经被上层9和下层9'覆盖在至少一个或更优选地在两个表面上的商业硅晶片8上 用低压化学气相沉积技术沉积的氮化硅或沉积LPCVD沉积。 覆盖晶片8的最佳质量的氮化硅的两层9或9'之一被用作换能器的发射膜。 因此，形成CMUT换能器的微单元阵列6生长在两层氮化硅之一上，即它在传感器的背面以相对于经典技术颠倒的一系列步骤生长 。
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公开(公告)号：US20100137718A1
公开(公告)日：2010-06-03
申请号：US12522734
申请日：2007-11-23
申请人： Massimo Pappalardo , Giosue Caliano , Alessandro Caronti , Alessandro Stuart Savoia , Philipp Gatta , Cristina Longo , Vito Bavaro
发明人： Massimo Pappalardo , Giosue Caliano , Alessandro Caronti , Alessandro Stuart Savoia , Philipp Gatta , Cristina Longo , Vito Bavaro
IPC分类号： A61B8/14
CPC分类号： B06B1/0292
摘要： Ultrasound transducer comprising an array of electro-acoustic micro-cells, a first and a second group of transducer elements arranged substantially along two directions (x, y), each element being defined by a group of micro-cells of the array, at least part of the micro-cells of each group being electrically interconnected by a first connection pattern having shape with main orientation along one of the two directions (x, y), characterized in that each group of micro-cells defining each element comprises micro-cells interconnected by further connection pattern or patterns having shape with main orientation along the other of the two directions (y, x).
摘要翻译： 超声换能器包括一组电声微电池，基本上沿着两个方向（x，y）布置的第一和第二组换能器元件，每个元件由阵列的一组微电池单元限定，至少 每个组的微电池的一部分通过具有沿着两个方向（x，y）之一的主取向的形状的第一连接图案电互连，其特征在于，限定每个元件的每组微电池包括微电池 通过具有沿着两个方向（y，x）上的另一个的主取向的形状的另外的连接图案或图案互连。
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6.发明申请Microfabricated capacitive ultrasonic transducer and related surface micromechanical process of fabrication 有权微型电容式超声波换能器及相关表面微机械制造工艺公开(公告)号：US20050018536A1
公开(公告)日：2005-01-27
申请号：US10877128
申请日：2004-06-25
CPC分类号： B06B1/0292
摘要： The invention relates to a microfabricated capacitive ultrasonic transducer (20) comprising at least one thin plate (21), provided with a metallization (24), suspended over a conductive substrate (23) through supporting elements integrally coupled to the conductive substrate (23), the conductive substrate (23) forming one or more electrodes corresponding to said at least one thin plate (21), characterised in that said supporting elements comprise an ordered arrangement of columns or “pillars” (22) to which the thin plate (21) is integrally coupled, whereby the pillars (22) operate as substantially punctiform constraints. The invention further relates to a surface micro-mechanical process for fabricating such microfabricated capacitive ultrasonic transducers (20).
摘要翻译： 本发明涉及一种微制造的电容式超声波换能器（20），其包括设置有金属化（24）的至少一个薄板（21），该薄板通过与导电基板（23）整体连接的支撑元件悬挂在导电基板（23）上， ，所述导电基板（23）形成对应于所述至少一个薄板（21）的一个或多个电极，其特征在于，所述支撑元件包括柱或“柱”（22）的有序排列，薄板（21） ）一体地联接，由此柱（22）作为基本上点状的约束而起作用。 本发明还涉及一种用于制造这种微制电容式超声换能器（20）的表面微机械工艺。
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7.发明申请Microfabricated capacitive ultrasonic transducer for high frequency applications 有权用于高频应用的微型电容式超声波换能器公开(公告)号：US20070059858A1
公开(公告)日：2007-03-15
申请号：US11520145
申请日：2006-09-13
IPC分类号： H01L21/00
CPC分类号： B06B1/0292
摘要： The invention relates to an electro-acoustic transducer, particularly an ultrasonic transducer, comprising a plurality of electrostatic micro-cells of the cMUT type. The electrostatic micro-cells are arranged in homogeneous groups of micro-cells having the same geometrical characteristics. The micro-cells of each group have geometries different from the geometry of the micro-cells of the other group or groups.
摘要翻译： 本发明涉及一种电声换能器，特别是一种包括cMUT型多个静电微电池的超声换能器。 静电微电池被布置成具有相同几何特征的均匀的微电池组。 每个组的微细胞具有与其他组或组的微细胞的几何形状不同的几何形状。
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8.发明授权Surface micromachining process for manufacturing electro-acoustic transducers, particularly ultrasonic transducers, obtained transducers and intermediate products 失效用于制造电声换能器，特别是超声换能器，获得的换能器和中间产品的表面微加工工艺公开(公告)号：US07074634B2
公开(公告)日：2006-07-11
申请号：US10476254
申请日：2002-05-09
IPC分类号： H01L21/00
CPC分类号： H04R19/00
摘要： A surface micromachining process for manufacturing Electro-acoustic transducers, particularly ultrasonic transducers, the transducers comprising a silicon semiconductor substrate (1), on an upper surface of which one or more membranes (18) of resilient materials are supported by a structural layer (11) of insulating material, rigidly connected to the semiconductor substrate (1), the resilient material having a Young's modulus not lower than 50 GPa, the membranes (18) being metallised, the transducers including one or more lower electrodes (23, 25), rigidly connected to the semiconductor substrate. The process is characterised in that the structural layer (11) includes silicon monoxide. The invention further relates to an Electro-acoustic transducer, particularly an ultrasonic transducer, characterised in that the insulating material of the structural layer (11) is silicon monoxide. The invention also relates to an intermediate product for utilisation in the process for realising Electro-acoustic transducers, particularly ultrasonic transducers.
摘要翻译： 一种用于制造电声换能器，特别是超声换能器的表面微加工方法，包括硅半导体衬底（1）的换能器在其上表面上，一个或多个弹性材料膜（18）由结构层（11 ）绝缘材料，刚性地连接到所述半导体衬底（1），所述弹性材料具有不低于50GPa的杨氏模量，所述膜（18）被金属化，所述换能器包括一个或多个下电极（23,25）， 刚性地连接到半导体衬底。 该方法的特征在于结构层（11）包括一氧化硅。 本发明还涉及一种电声换能器，特别是超音波换能器，其特征在于结构层（11）的绝缘材料是一氧化硅。 本发明还涉及用于实现电声换能器，特别是超声换能器的过程中的中间产品。
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公开(公告)号：US07359286B2
公开(公告)日：2008-04-15
申请号：US11743371
申请日：2007-05-02
申请人： Alessandro Stuart Savoia , Giosuè Caliano , Alessandro Caronti , Cristina Longo , Massimo Pappalardo
发明人： Alessandro Stuart Savoia , Giosuè Caliano , Alessandro Caronti , Cristina Longo , Massimo Pappalardo
IPC分类号： H04R19/00
CPC分类号： H04R19/00
摘要： The invention concerns a capacitive ultrasonic transducer, comprising an external layer operating as an external plate, provided with electrode means, capable to vibrate, and a stiff substrate, in turn provided with electrode means, wherein it further comprises n levels, with n≧2, interposed between the plate and the substrate, each level including a plurality of cavities, and m interface intermediate layers, capable to vibrate, among said n levels, with m=(n−1), the cavities of each one of said n levels being further defined by support means connected between faced surfaces of layers adjacent to said cavities, each one of said m intermediate layers being provided with electrode means, whereby the cavities of each level are interposed between a pair of electrode means belonging to either two adjacent intermediate layers or to an intermediate layer and to one out of the substrate and the plate.
摘要翻译： 本发明涉及一种电容式超声波换能器，其包括作为外部板操作的外部层，其具有能够振动的电极装置，并且刚性基板又具有电极装置，其中其还包括n个电平，n> 如图2所示，插入在板和基板之间，每个层包括多个空腔，并且能够在所述n个层中振动的m个界面中间层，m =（n-1），所述n 水平面通过连接在与所述空腔相邻的层的表面之间的支撑装置进一步限定，所述m个中间层中的每一个均设置有电极装置，由此每个级别的空腔插入属于两个相邻的一对电极装置 中间层或中间层，并且与基板和板之一接合。
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公开(公告)号：US07800189B2
公开(公告)日：2010-09-21
申请号：US10877128
申请日：2004-06-25
IPC分类号： H01L29/72
CPC分类号： B06B1/0292
摘要： The invention relates to a microfabricated capacitive ultrasonic transducer (20) comprising at least one thin plate (21), provided with a metallization (24), suspended over a conductive substrate (23) through supporting elements integrally coupled to the conductive substrate (23), the conductive substrate (23) forming one or more electrodes corresponding to said at least one thin plate (21), characterized in that said supporting elements comprise an ordered arrangement of columns or “pillars” (22) to which the thin plate (21) is integrally coupled, whereby the pillars (22) operate as substantially punctiform constraints. The invention further relates to a surface micro-mechanical process for fabricating such microfabricated capacitive ultrasonic transducers (20).
摘要翻译： 本发明涉及一种微制造的电容式超声波换能器（20），其包括设置有金属化（24）的至少一个薄板（21），该薄板通过与导电基板（23）整体连接的支撑元件悬挂在导电基板（23）上， ，所述导电基板（23）形成对应于所述至少一个薄板（21）的一个或多个电极，其特征在于，所述支撑元件包括柱或“柱”（22）的有序排列，薄板（21） ）一体地联接，由此柱（22）作为基本上点状的约束而起作用。 本发明还涉及一种用于制造这种微制电容式超声换能器（20）的表面微机械工艺。
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