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1.发明授权公开(公告)号：US07453973B2
公开(公告)日：2008-11-18
申请号：US11533907
申请日：2006-09-21
申请人： Darren L. Anand , John R. Goss , Peter O. Jacobsen , Michael R. Ouellette , Thomas G. Sopchak , Donald L. Wheater
发明人： Darren L. Anand , John R. Goss , Peter O. Jacobsen , Michael R. Ouellette , Thomas G. Sopchak , Donald L. Wheater
IPC分类号： G11C19/00
CPC分类号： G11C19/00 , G11C29/003
摘要： The invention provides a circuit that can observe data within shift registers without altering the data. The circuit includes selectors connected to the inputs and outputs of the shift registers. The selectors selectively connect the input with the output of a selected shift register to form a wiring loop for the selected shift register. A control device connected to the wiring loop uses the wiring loop to cause the data to be continually transferred from the output of the selected shift register to the input of the selected shift register and back through the selected shift register in a circular manner. The control device includes a counter used for determining the length of a selected shift register and a set of registers to store, for future use when rotating data in the shift registers, the length of each shift register. The control device also includes a data output accessible from outside the circuit. An observation wire is connected to the wiring loop, and the data passes from the wiring loop to the control device through the observation wire. The control device outputs data appearing on the wiring loop as the data is circulated through the selected shift register to permit data within the selected shift register to be observed outside the circuit without altering the data within the selected shift register.
摘要翻译： 本发明提供一种可以观察移位寄存器内的数据而不改变数据的电路。 该电路包括连接到移位寄存器的输入和输出的选择器。 选择器选择性地将输入与所选移位寄存器的输出连接，以形成所选移位寄存器的布线回路。 连接到布线回路的控制装置使用布线回路使得数据从所选择的移位寄存器的输出连续地传送到所选择的移位寄存器的输入端并循环地返回所选择的移位寄存器。 控制装置包括用于确定所选择的移位寄存器的长度的计数器和一组寄存器，用于存储当在移位寄存器中旋转数据时将来使用的每个移位寄存器的长度。 控制装置还包括从电路外部可访问的数据输出。 观察线连接到布线回路，数据通过观察线从布线回路传递到控制装置。 当数据通过选定的移位寄存器循环时，控制装置输出出现在布线环路上的数据，以允许在电路外观察所选移位寄存器内的数据，而不改变所选移位寄存器内的数据。
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公开(公告)号：US07620931B2
公开(公告)日：2009-11-17
申请号：US11859890
申请日：2007-09-24
申请人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Thomas G. Sopchak , David P. Vallett
发明人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Thomas G. Sopchak , David P. Vallett
IPC分类号： G06F17/50
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： An integrated circuit, a method and a system for designing and a method fabricating the integrated circuit. The method including: (a) generating a photomask level design of an integrated circuit design of the integrated circuit, the photomask level design comprising a multiplicity of integrated circuit element shapes; (b) designating regions of the photomask level design between adjacent integrated circuit element shapes, the designated regions large enough to require placement of fill shapes between the adjacent integrated circuit elements based on fill shape rules, the fill shapes not required for the operation of the integrated circuit; and (c) placing one or more monitor structure shapes of a monitor structure in at least one of the designated regions, the monitor structure not required for the operation of the integrated circuit.
摘要翻译： 一种用于设计的集成电路，方法和系统以及制造集成电路的方法。 该方法包括：（a）生成集成电路的集成电路设计的光掩模级设计，光掩模级设计包括多个集成电路元件形状; （b）指定相邻集成电路元件形状之间的光掩模级设计的区域，指定区域足够大以至于基于填充形状规则需要在相邻集成电路元件之间放置填充形状， 集成电路; 以及（c）将监视器结构的一个或多个监视器结构形状放置在指定区域中的至少一个中，该集成电路的操作不需要监视器结构。
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公开(公告)号：US07323278B2
公开(公告)日：2008-01-29
申请号：US11687731
申请日：2007-03-19
申请人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Thomas G. Sopchak , David P. Vallett
发明人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Thomas G. Sopchak , David P. Vallett
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： An integrated circuit, a method and a system for designing and a method fabricating the integrated circuit. The method including: (a) generating a photomask level design of an integrated circuit design of the integrated circuit, the photomask level design comprising a multiplicity of integrated circuit element shapes; (b) designating regions of the photomask level design between adjacent integrated circuit element shapes, the designated regions large enough to require placement of fill shapes between the adjacent integrated circuit elements based on fill shape rules, the fill shapes not required for the operation of the integrated circuit; and (c) placing one or more monitor structure shapes of a monitor structure in at least one of the designated regions, the monitor structure not required for the operation of the integrated circuit.
摘要翻译： 一种用于设计的集成电路，方法和系统以及制造集成电路的方法。 该方法包括：（a）生成集成电路的集成电路设计的光掩模级设计，光掩模级设计包括多个集成电路元件形状; （b）指定相邻集成电路元件形状之间的光掩模级设计的区域，指定区域足够大以至于基于填充形状规则需要在相邻集成电路元件之间放置填充形状， 集成电路; 以及（c）将监视器结构的一个或多个监视器结构形状放置在指定区域中的至少一个中，该集成电路的操作不需要监视器结构。
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4.发明授权Designing scan chains with specific parameter sensitivities to identify process defects 失效设计具有特定参数灵敏度的扫描链，以识别过程缺陷公开(公告)号：US07194706B2
公开(公告)日：2007-03-20
申请号：US10710642
申请日：2004-07-27
申请人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Leendert M. Huisman , Mark D. Jaffe , Phillip J. Nigh , Leah M. P. Pastel , Thomas G. Sopchak , David E. Sweenor , David P. Vallett
发明人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Leendert M. Huisman , Mark D. Jaffe , Phillip J. Nigh , Leah M. P. Pastel , Thomas G. Sopchak , David E. Sweenor , David P. Vallett
IPC分类号： G06F17/50
CPC分类号： G06F17/5045 , G01R31/31855 , G01R31/318586 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A method is disclosed for designing scan chains in an integrated circuit chip with specific parameter sensitivities to identify fabrication process defects causing test fails and chip yield loss. The composition of scan paths in the integrated circuit chip is biased to allow them to also function as on-product process monitors. The method adds grouping constraints that bias scan chains to have common latch cell usage where possible, and also biases cell routing to constrain scan chain routing to given restricted metal layers for interconnects. The method assembles a list of latch design parameters which are sensitive to process variation or integrity, and formulates a plan for scan chain design which determines the number and the length of scan chains. A model is formulated of scan chain design based upon current state of yield and process integrity, wherein certain latch designs having dominant sensitivities are chosen for specific ones of the scan chains on the chip. The model is provided as input parameters to a global placement and wiring program used to lay out the scan chains. Test data on the chip is then analyzed to determine and isolate systematic yield problems denoted by attributes of a statistically significant failing population of a specific type of scan chain.
摘要翻译： 公开了一种用于设计具有特定参数灵敏度的集成电路芯片中的扫描链的方法，以识别导致测试失败和芯片产量损失的制造工艺缺陷。 集成电路芯片中的扫描路径的组成被偏置以允许它们也用作产品过程监视器。 该方法增加了分组约束，使得扫描链偏置以在可能的情况下具有共同的锁存单元使用，并且还偏置小区路由以将扫描链路由限制到用于互连的给定受限金属层。 该方法组合了对过程变化或完整性敏感的锁存器设计参数列表，并且制定了扫描链设计的计划，该计划确定了扫描链的数量和长度。 基于产量和过程完整性的当前状态来制定扫描链设计的模型，其中为芯片上的特定扫描链选择具有主要灵敏度的某些锁存器设计。 该模型作为输入参数提供给用于布置扫描链的全局放置和布线程序。 然后对芯片上的测试数据进行分析，以确定和分离由特定类型的扫描链的统计学显着失败群体的属性表示的系统产量问题。
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公开(公告)号：US07005874B2
公开(公告)日：2006-02-28
申请号：US10710222
申请日：2004-06-28
IPC分类号： G01R31/02
CPC分类号： G01R31/31727 , G01R31/025 , G01R31/30 , G01R31/31725
摘要： Disclosed is a shielded clock tree that has one or more clock signal buffers and clock signal splitters, with clock signal wiring connecting the clock signal buffers to the clock signal splitters. Shielding is adjacent the clock signal wiring, where ground wiring connects the shielding to ground. The shielding comprises shield wires positioned adjacent and parallel to the clock signal wiring. The invention provides switches in the ground wiring, and these switches are connected to, and controlled by, a test controller.
摘要翻译： 公开了具有一个或多个时钟信号缓冲器和时钟信号分离器的屏蔽时钟树，时钟信号将时钟信号缓冲器连接到时钟信号分离器。 屏蔽与时钟信号接线相邻，接地线将屏蔽接地。 屏蔽包括与时钟信号布线相邻并且平行的屏蔽线。 本发明提供接地布线中的开关，并且这些开关连接到测试控制器并由其控制。
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公开(公告)号：US07088124B2
公开(公告)日：2006-08-08
申请号：US11280008
申请日：2005-11-16
IPC分类号： G01R31/02
CPC分类号： G01R31/31727 , G01R31/025 , G01R31/30 , G01R31/31725
摘要： Disclosed is a shielded clock tree that has one or more clock signal buffers and clock signal splitters, with clock signal wiring connecting the clock signal buffers to the clock signal splitters. Shielding is adjacent the clock signal wiring, where ground wiring connects the shielding to ground. The shielding comprises shield wires positioned adjacent and parallel to the clock signal wiring. The invention provides switches in the ground wiring, and these switches are connected to, and controlled by, a test controller.
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7.发明授权Method and structure for defect monitoring of semiconductor devices using power bus wiring grids 失效使用电力总线布线网格的半导体器件缺陷监测的方法和结构公开(公告)号：US07078248B2
公开(公告)日：2006-07-18
申请号：US10710114
申请日：2004-06-18
IPC分类号： H01L21/66
CPC分类号： G01R31/2884 , G01R31/307 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A method for implementing defect inspection of an integrated circuit includes configuring a power bus grid structure on a first metal interconnect level, the power bus grid structure including a first plurality of wire pairs. The first plurality of wire pairs is arranged in a manner such that a first wire in each of the first plurality of wire pairs is electrically coupled to conductive structures beneath the first metal interconnect level, and a second wire in each of the first plurality of wire pairs is initially electrically isolated from the conductive structures beneath the first metal interconnect level. The first wire in each of the first plurality of wire pairs is biased to a known voltage, and a charge contrast inspection is performed between the first wire and the second wire of each of the first plurality of wire pairs.
摘要翻译： 用于实现集成电路的缺陷检查的方法包括在第一金属互连级上配置电力总线栅格结构，所述电力总线栅格结构包括第一多个线对。 第一组多个线对被布置成使得第一多个线对中的每一个中的第一线电耦合到第一金属互连水平面下方的导电结构，并且在第一多个线中的每一个中的第二线 对最初与第一金属互连级别下方的导电结构电隔离。 第一多个线对中的每一个中的第一线被偏置到已知电压，并且在第一多个线对中的每一个的第一线和第二线之间执行电荷对比度检查。
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公开(公告)号：US06998866B1
公开(公告)日：2006-02-14
申请号：US10710640
申请日：2004-07-27
申请人： Greg Bazan , John M. Cohn , Matthew S. Grady , Phillip J. Nigh , Leah M. P. Pastel , Thomas G. Sopchak
发明人： Greg Bazan , John M. Cohn , Matthew S. Grady , Phillip J. Nigh , Leah M. P. Pastel , Thomas G. Sopchak
IPC分类号： G01R31/26
CPC分类号： H01L22/34 , G01R31/31855 , H01L2924/0002 , H01L2924/00
摘要： A circuit and a method for monitoring defects in an integrated circuit chip. The circuit including a defect monitor portion and a sense element portion, the defect monitor portion either coupled to inputs of sense elements arranged in a chain or coupled between sense elements and forming portions of the chain.
摘要翻译： 用于监测集成电路芯片中的缺陷的电路和方法。 所述电路包括缺陷监测部分和感测元件部分，所述缺陷监测部分耦合到布置在链中的感测元件的输入或耦合在感测元件和链的形成部分之间。
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9.发明授权Method and structure for defect monitoring of semiconductor devices using power bus wiring grids 失效使用电力总线布线网格的半导体器件缺陷监测的方法和结构公开(公告)号：US07285860B2
公开(公告)日：2007-10-23
申请号：US11277663
申请日：2006-03-28
IPC分类号： H01L23/48
CPC分类号： G01R31/2884 , G01R31/307 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： A method for implementing defect inspection of an integrated circuit includes configuring a power bus grid structure on a first metal interconnect level, the power bus grid structure including a first plurality of wire pairs. The first plurality of wire pairs is arranged in a manner such that a first wire in each of the first plurality of wire pairs is electrically coupled to conductive structures beneath the first metal interconnect level, and a second wire in each of the first plurality of wire pairs is initially electrically isolated from the conductive structures beneath the first metal interconnect level. The first wire in each of the first plurality of wire pairs is biased to a known voltage, and a charge contrast inspection is performed between the first wire and the second wire of each of the first plurality of wire pairs.
摘要翻译： 用于实现集成电路的缺陷检查的方法包括在第一金属互连级上配置电力总线栅格结构，所述电力总线栅格结构包括第一多个线对。 第一组多个线对被布置成使得第一多个线对中的每一个中的第一线电耦合到第一金属互连水平面下方的导电结构，并且在第一多个线中的每一个中的第二线 对最初与第一金属互连层下面的导电结构电隔离。 第一多个线对中的每一个中的第一线被偏置到已知电压，并且在第一多个线对中的每一个的第一线和第二线之间执行电荷对比度检查。
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公开(公告)号：US07240322B2
公开(公告)日：2007-07-03
申请号：US10907494
申请日：2005-04-04
申请人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Thomas G. Sopchak , David P. Vallett
发明人： James W. Adkisson , Greg Bazan , John M. Cohn , Matthew S. Grady , Thomas G. Sopchak , David P. Vallett
IPC分类号： G06F17/50
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： An integrated circuit, a method and a system for designing and a method fabricating the integrated circuit. The method including: (a) generating a photomask level design of an integrated circuit design of the integrated circuit, the photomask level design comprising a multiplicity of integrated circuit element shapes; (b) designating regions of the photomask level design between adjacent integrated circuit element shapes, the designated regions large enough to require placement of fill shapes between the adjacent integrated circuit elements based on fill shape rules, the fill shapes not required for the operation of the integrated circuit; and (c) placing one or more monitor structure shapes of a monitor structure in at least one of the designated regions, the monitor structure not required for the operation of the integrated circuit.
摘要翻译： 一种用于设计的集成电路，方法和系统以及制造集成电路的方法。 该方法包括：（a）生成集成电路的集成电路设计的光掩模级设计，光掩模级设计包括多个集成电路元件形状; （b）指定相邻集成电路元件形状之间的光掩模级设计的区域，指定区域足够大以至于基于填充形状规则需要在相邻集成电路元件之间放置填充形状， 集成电路; 以及（c）将监视器结构的一个或多个监视器结构形状放置在指定区域中的至少一个中，该集成电路的操作不需要监视器结构。
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