公开(公告)号：US07343054B1

公开(公告)日：2008-03-11

申请号：US11619868

申请日：2007-01-04

申请人： Michael G. Lee ,  Alexei L. Glebov ,  Dashun Steve Zhou

发明人： Michael G. Lee ,  Alexei L. Glebov ,  Dashun Steve Zhou

IPC分类号： G02F1/035 ,  G02B6/10

CPC分类号： G02B6/138 ,  G02B6/136 ,  G02B2006/12123 ,  G02B2006/12142 ,  G02F1/035 ,  G02F1/3136 ,  G02F2202/02

摘要： An integrated electro-optic module may contain a continuous layer of electro-optic polymer through both a splitter portion and a modulator portion in order to facilitate high speed data transmission. The integrated electro-optic module may be fabricated by depositing a bottom cladding layer on a wafer, creating side cladding features, depositing the electro-optic polymer, and coating with a top cladding layer. The electro-optic polymer in both the splitter portion and modulator portion of the integrated electro-optic module may create inverted-ridge waveguide structures. The waveguide in the splitter portion may have a first ridge depth, and the waveguide in the modulator portion may have a second ridge depth, the first ridge depth greater than the second ridge depth.

摘要翻译： 集成电光模块可以通过分离器部分和调制器部分包含连续的电光聚合物层，以便于高速数据传输。 集成电光模块可以通过在晶片上沉积底部包层，产生侧包层特征，沉积电光聚合物和用顶部覆层进行涂覆来制造。 集成电光模块的分离器部分和调制器部分中的电光聚合物可以产生倒脊波导结构。 分路器部分中的波导可以具有第一脊深度，并且调制器部分中的波导可以具有第二脊深度，第一脊深度大于第二脊深度。

公开(公告)号：US20100046890A1

公开(公告)日：2010-02-25

申请号：US12197689

申请日：2008-08-25

申请人： Michael G. Lee ,  Alexei L. Glebov ,  Dashun Steve Zhou

发明人： Michael G. Lee ,  Alexei L. Glebov ,  Dashun Steve Zhou

IPC分类号： G02B6/26

CPC分类号： G02B6/125

摘要： An optical beam splitter includes an input waveguide, two or more branching arms, two or more fan-out arms, and two or more output waveguides. The input waveguide receives an input light beam. The two or more branching arms are coupled to the input waveguide at a separation point and split the input light beam at the separation point into two or more light beams. Each fan-out arm is coupled to one of the branching arms and fans-out one of the two or more light beams to a predetermined output pitch. Each output waveguide is coupled to one of the fan-out arms and transmits one of the two or more light beams out of the optical beam splitter.

摘要翻译： 光束分离器包括输入波导，两个或多个分支臂，两个或多个扇出臂以及两个或更多个输出波导。 输入波导接收输入光束。 两个或更多个分支臂在分离点处耦合到输入波导，并将分离点处的输入光束分成两个或更多个光束。 每个扇出臂耦合到分支臂中的一个并将两个或更多个光束中的一个扇出，以预定的输出间距。 每个输出波导耦合到扇出臂中的一个，并将两个或更多个光束中的一个发射出光束分离器。

公开(公告)号：US07403672B2

公开(公告)日：2008-07-22

申请号：US11611255

申请日：2006-12-15

申请人： Dashun Steve Zhou ,  Michael G. Lee ,  Alexei L. Glebov

发明人： Dashun Steve Zhou ,  Michael G. Lee ,  Alexei L. Glebov

IPC分类号： G02B6/00 ,  G02B6/02

CPC分类号： G02B27/283 ,  B29D11/00663 ,  G02F1/0136 ,  G02F1/065

摘要： A method for creating an integrated linear polarizer is provided. An electro-optical component is fabricated and may include a bottom electrode, a bottom cladding layer, side cladding features, an electro-optic polymer layer, a top cladding layer, and a top electrode. After fabrication, the electro-optical component is poled to create or enhance polarization properties of the electro-optic polymer layer. The electro-optical component may be heated to at least a first threshold temperature. An electric field may then be applied to the electro-optical component. In the presence of the electric field, the electro-optical component may be cooled to at or below a second threshold temperature that is less than the first threshold temperature. Once the electro-optical component has cooled to the second threshold temperature, the electric field may be removed.

摘要翻译： 提供一种用于产生集成线性偏振器的方法。 制造电光部件，并且可以包括底电极，底包层，侧包层特征，电光聚合物层，顶包层和顶电极。 在制造之后，电光学部件被极化以产生或增强电光聚合物层的偏振特性。 可以将电光部件加热至至少第一阈值温度。 然后可以将电场施加到电光部件。 在存在电场的情况下，电光部件可以被冷却到等于或低于小于第一阈值温度的第二阈值温度。 一旦电光部件已经冷却到第二阈值温度，则可以去除电场。

公开(公告)号：US20080144161A1

公开(公告)日：2008-06-19

申请号：US11611255

申请日：2006-12-15

申请人： Dashun Steve Zhou ,  Michael G. Lee ,  Alexei L. Glebov

发明人： Dashun Steve Zhou ,  Michael G. Lee ,  Alexei L. Glebov

IPC分类号： G02B27/28 ,  G02F1/061 ,  B29D11/00

CPC分类号： G02B27/283 ,  B29D11/00663 ,  G02F1/0136 ,  G02F1/065

摘要： A method for creating an integrated linear polarizer is provided. An electro-optical component is fabricated and may include a bottom electrode, a bottom cladding layer, side cladding features, an electro-optic polymer layer, a top cladding layer, and a top electrode. After fabrication, the electro-optical component is poled to create or enhance polarization properties of the electro-optic polymer layer. The electro-optical component may be heated to at least a first threshold temperature. An electric field may then be applied to the electro-optical component. In the presence of the electric field, the electro-optical component may be cooled to at or below a second threshold temperature that is less than the first threshold temperature. Once the electro-optical component has cooled to the second threshold temperature, the electric field may be removed.

摘要翻译： 提供一种用于产生集成线性偏振器的方法。 制造电光部件，并且可以包括底电极，底包层，侧包层特征，电光聚合物层，顶包层和顶电极。 在制造之后，电光学部件被极化以产生或增强电光聚合物层的偏振特性。 可以将电光部件加热至至少第一阈值温度。 然后可以将电场施加到电光部件。 在存在电场的情况下，电光部件可以被冷却到等于或低于小于第一阈值温度的第二阈值温度。 一旦电光部件已经冷却到第二阈值温度，则可以去除电场。

公开(公告)号：US20100046879A1

公开(公告)日：2010-02-25

申请号：US12197658

申请日：2008-08-25

申请人： Michael G. Lee ,  Alexei L. Glebov ,  Dashun Steve Zhou

发明人： Michael G. Lee ,  Alexei L. Glebov ,  Dashun Steve Zhou

IPC分类号： G02F1/225

CPC分类号： G02F1/2255 ,  G02F2001/212

摘要： An optical modulator includes an input waveguide, a splitting point, a first interaction arm of length L1, a second interaction arm of length L2 that is unequal in length to the first interaction arm, a recombination point, and an output waveguide. The splitting point receives an incoming continuous wave light beam comprising two or more wavelengths of light from the input waveguide and splits it into a first light beam and a second light beam. The first interaction arm is coupled to the input waveguide and transports the first light beam. The second interaction arm is coupled to the input waveguide and transports the second light beam. The output waveguide is coupled to the first interaction arm and second interaction arm at the recombination point and combines the first light beam and second light beam into an output modulated light beam. The first interaction arm and the second interaction arm comprise an electro-optic material with a refractive index that changes according to a modulation stimulus. The electro-optic material has a first refractive index n1 before the modulation stimulus is applied, and a second refractive index n2 after the modulation stimulus is applied.

摘要翻译： 光调制器包括输入波导，分裂点，长度为L1的第一相互作用臂，长度为L2的与第一相互作用臂不相等的第二相互作用臂，复合点和输出波导。 分离点接收包括来自输入波导的两个或更多个波长的光的入射连续波束，并将其分裂成第一光束和第二光束。 第一相互作用臂耦合到输入波导并传输第一光束。 第二相互作用臂耦合到输入波导并传输第二光束。 输出波导在复合点处耦合到第一相互作用臂和第二相互作用臂，并将第一光束和第二光束组合成输出调制光束。 第一相互作用臂和第二相互作用臂包括具有根据调制刺激而改变的折射率的电光材料。 电光材料在施加调制激励之前具有第一折射率n1，并且在施加调制刺激之后具有第二折射率n2。

公开(公告)号：US07522783B2

公开(公告)日：2009-04-21

申请号：US11447525

申请日：2006-06-05

申请人： Alexei Glebov ,  Michael G. Lee ,  Dashun Steve Zhou

发明人： Alexei Glebov ,  Michael G. Lee ,  Dashun Steve Zhou

IPC分类号： G02F1/35

CPC分类号： G02F1/0356 ,  G02F2001/212

摘要： Disclosed are optical modulators that provide high-speed modulation capability and compact size. In exemplary modulator embodiments, the branch waveguide cores are formed in different processing layers than the input waveguide core, and light is coupled from an input waveguide core to two branch waveguide cores along diagonal directions. The construction enables the input waveguide core to be made of low-loss material compared to the electro-optic material of the branch waveguide cores. Also disclosed are interconnect apparatuses that can be used in processing systems. Exemplary interconnect apparatuses provide various configurations of components that enable high-speed modulation and compact size. The exemplary interconnect apparatuses may use the exemplary optical modulators disclosed herein.

摘要翻译： 公开了提供高速调制能力和紧凑尺寸的光学调制器。 在示例性调制器实施例中，分支波导芯形成在与输入波导芯不同的处理层中，并且光沿着对角线方向从输入波导芯耦合到两个分支波导芯。 与分支波导芯的电光材料相比，该结构能够使输入波导芯由低损耗材料制成。 还公开了可以在处理系统中使用的互连装置。 示例性互连装置提供能够进行高速调制和紧凑尺寸的各种组件配置。 示例性互连装置可以使用本文公开的示例性光学调制器。

公开(公告)号：US20070280578A1

公开(公告)日：2007-12-06

申请号：US11447525

申请日：2006-06-05

申请人： Alexei Glebov ,  Michael G. Lee ,  Dashun Steve Zhou

发明人： Alexei Glebov ,  Michael G. Lee ,  Dashun Steve Zhou

IPC分类号： G02F1/035

CPC分类号： G02F1/0356 ,  G02F2001/212

摘要： Disclosed are optical modulators that provide high-speed modulation capability and compact size. In exemplary modulator embodiments, the branch waveguide cores are formed in different processing layers than the input waveguide core, and light is coupled from an input waveguide core to two branch waveguide cores along diagonal directions. The construction enables the input waveguide core to be made of low-loss material compared to the electro-optic material of the branch waveguide cores. Also disclosed are interconnect apparatuses that can be used in processing systems. Exemplary interconnect apparatuses provide various configurations of components that enable high-speed modulation and compact size. The exemplary interconnect apparatuses may use the exemplary optical modulators disclosed herein.

摘要翻译： 公开了提供高速调制能力和紧凑尺寸的光学调制器。 在示例性调制器实施例中，分支波导芯形成在与输入波导芯不同的处理层中，并且光沿着对角线方向从输入波导芯耦合到两个分支波导芯。 与分支波导芯的电光材料相比，该结构能够使输入波导芯由低损耗材料制成。 还公开了可以在处理系统中使用的互连装置。 示例性互连装置提供能够进行高速调制和紧凑尺寸的各种组件配置。 示例性互连装置可以使用本文公开的示例性光学调制器。

公开(公告)号：US6090214A

公开(公告)日：2000-07-18

申请号：US102970

申请日：1998-06-22

申请人： Dashun Steve Zhou ,  Solomon I. Beilin ,  James J. Roman

发明人： Dashun Steve Zhou ,  Solomon I. Beilin ,  James J. Roman

IPC分类号： B08B1/04 ,  B08B6/00 ,  C11D3/39 ,  C11D11/00 ,  B08B7/00

CPC分类号： B08B6/00 ,  B08B1/04 ,  C11D11/0029 ,  C11D3/3942

摘要： A chemical mechanical cleaning method utilizes an ammonium persulphate solution with simultaneous mechanical brushing to remove residual slurry particles from copper surfaces. The pH of the solution is selected to electrostatically repel charged slurry particles from the copper surface.

摘要翻译： 化学机械清洁方法利用过硫酸铵溶液同时进行机械刷洗，以从铜表面除去残留的浆料颗粒。 选择溶液的pH以从铜表面静电排斥带电浆料颗粒。

公开(公告)号：US06954332B1

公开(公告)日：2005-10-11

申请号：US10242091

申请日：2002-09-11

申请人： Liubo Hong ,  Ronald A. Barr ,  Dashun Steve Zhou

发明人： Liubo Hong ,  Ronald A. Barr ,  Dashun Steve Zhou

IPC分类号： G11B5/17 ,  G11B5/31 ,  G11B5/147

CPC分类号： G11B5/313 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/3163

摘要： The present invention provides an improved thin film write head and method of fabrication capable of providing an ultra-short yoke and/or an ultra-low conductor winding stack. The present invention reduces yoke length and stack height by forming the conductor winding in a trench etched from an insulation layer, preferably formed of an inorganic insulation material. A thin resist mask is used to define the width of the trench while the etch process defines the depth. Preferably, the insulation layer is formed on a different inorganic insulation material to control the etch process, thus, the conductor winding may be formed on the underlying layer. The conductor winding preferably is formed by depositing conductor material so that it fills the trench and then planarizing, such as by chemical mechanical polish, to remove conductor material deposited outside the trench. An organic insulation layer, such as cured photoresist, may be deposited on the planarized surface of the conductor winding to insulate it from an overlying yoke. This overlying organic insulation layer may also define the apex angle of the head. The present invention may have multiple layers of conductor winding. The subsequent layers of conductor may be formed similar to the first layer, or may be formed with conventional photoresist processes and structures. The present invention may utilize any known pole structure or material.

摘要翻译： 本发明提供了一种改进的薄膜写入头和制造方法，其能够提供超短磁轭和/或超低导体绕组。 本发明通过在绝缘层中蚀刻的沟槽中形成导体绕组，优选地由无机绝缘材料形成，来减小磁轭长度和堆叠高度。 当蚀刻工艺限定深度时，使用薄的抗蚀剂掩模来限定沟槽的宽度。 优选地，绝缘层形成在不同的无机绝缘材料上以控制蚀刻工艺，因此，导体绕组可以形成在下层上。 导体绕组优选地通过沉积导体材料形成，使得其填充沟槽，然后通过化学机械抛光来平坦化，以去除沉积在沟槽外部的导体材料。 可以在导体绕组的平坦化表面上沉积有机绝缘层，例如固化的光致抗蚀剂，以使其与上覆的轭绝缘。 该上覆的有机绝缘层也可以限定头部的顶角。 本发明可以具有多层导体绕组。 导体的后续层可以类似于第一层形成，或者可以用常规光刻胶工艺和结构形成。 本发明可以利用任何已知的极结构或材料。

公开(公告)号：US06765756B1

公开(公告)日：2004-07-20

申请号：US09268088

申请日：1999-03-12

申请人： Liubo Hong ,  Ronald A. Barr ,  Dashun Steve Zhou

发明人： Liubo Hong ,  Ronald A. Barr ,  Dashun Steve Zhou

IPC分类号： G11B5127

CPC分类号： G11B5/313 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/3163

摘要： The present invention provides an improved thin film write head and method of fabrication capable of providing an ultra-short yoke and/or an ultra-low conductor winding stack. The present invention reduces yoke length and stack height by forming the conductor winding in a trench etched from an insulation layer, preferably formed of an inorganic insulation material. A thin resist mask is used to define the width of the trench while the etch process defines the depth. Preferably, the insulation layer is formed on a different inorganic insulation material to control the etch process, thus, the conductor winding may be formed on the underlying layer. The conductor winding preferably is formed by depositing conductor material so that it fills the trench and then planarizing, such as by chemical mechanical polish, to remove conductor material deposited outside the trench. An organic insulation layer, such as cured photoresist, may be deposited on the planarized surface of the conductor winding to insulate it from an overlying yoke. This overlying organic insulation layer may also define the apex angle of the head. The present invention may have multiple layers of conductor winding. The subsequent layers of conductor may be formed similar to the first layer, or may be formed with conventional photoresist processes and structures. The present invention may utilize any known pole structure or material.

摘要翻译： 本发明提供了一种改进的薄膜写入头和制造方法，其能够提供超短磁轭和/或超低导体绕组。 本发明通过在绝缘层中蚀刻的沟槽中形成导体绕组，优选地由无机绝缘材料形成，来减小磁轭长度和堆叠高度。 当蚀刻工艺限定深度时，使用薄的抗蚀剂掩模来限定沟槽的宽度。 优选地，绝缘层形成在不同的无机绝缘材料上以控制蚀刻工艺，因此，导体绕组可以形成在下层上。 导体绕组优选地通过沉积导体材料形成，使得其填充沟槽，然后通过化学机械抛光来平坦化，以去除沉积在沟槽外部的导体材料。 可以在导体绕组的平坦化表面上沉积有机绝缘层，例如固化的光致抗蚀剂，以使其与上覆的轭绝缘。 该上覆的有机绝缘层也可以限定头部的顶角。 本发明可以具有多层导体绕组。 导体的后续层可以类似于第一层形成，或者可以用常规光刻胶工艺和结构形成。 本发明可以利用任何已知的极结构或材料。