公开(公告)号：US06134012A

公开(公告)日：2000-10-17

申请号：US345560

申请日：1999-06-30

申请人： David E. Aspnes ,  Jon Opsal

发明人： David E. Aspnes ,  Jon Opsal

IPC分类号： G01N21/21 ,  G01B11/06 ,  G01J3/02 ,  G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G02F1/01

CPC分类号： G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

摘要： An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

摘要翻译： 用于使用宽波长范围分析样品的椭偏仪的椭偏仪和椭偏仪的方法包括用于产生具有用于与样品相互作用的光波长范围的多色光束的光源。 在光束与样品相互作用之前，偏振器使光束偏振。 旋转补偿器引起光束的偏振状态的相位延迟，其中波长范围和补偿器被选择为使得至少第一相位延迟值被诱导为在大约135°至225°的有效延迟的主要范围内 DEG，并且诱导超出初级范围的至少第二相延迟值。 在光束与样品相互作用后，分析仪与光束相互作用。 检测器测量与分析仪相互作用后的光强度，作为补偿器角度和波长的函数，优选同时在所有波长处。 处理器确定当光束从由检测器测量的光强度撞击分析仪时的偏振状态。

公开(公告)号：US06650415B2

公开(公告)日：2003-11-18

申请号：US10206428

申请日：2002-07-26

申请人： David E. Aspnes ,  Jon Opsal

发明人： David E. Aspnes ,  Jon Opsal

IPC分类号： G01J400

CPC分类号： G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

摘要： An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

公开(公告)号：US06320657B1

公开(公告)日：2001-11-20

申请号：US09619456

申请日：2000-07-19

申请人： David E. Aspnes ,  Jon Opsal

发明人： David E. Aspnes ,  Jon Opsal

IPC分类号： G91J400

CPC分类号： G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

摘要： An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

摘要翻译： 用于使用宽波长范围分析样品的椭偏仪的椭偏仪和椭偏仪的方法包括用于产生具有用于与样品相互作用的光波长范围的多色光束的光源。 在光束与样品相互作用之前，偏振器使光束偏振。 旋转补偿器引起光束的偏振状态的相位延迟，其中选择波长范围和补偿器，使得至少引入第一相位延迟值，该第一相位延迟值在大致135°至225°的有效延迟的主要范围内 °，并且引起超出初级范围的至少第二相位延迟值。 在光束与样品相互作用后，分析仪与光束相互作用。 检测器测量与分析仪相互作用后的光强度，作为补偿器角度和波长的函数，优选同时在所有波长处。 处理器确定当光束从由检测器测量的光强度撞击分析仪时的偏振状态。

公开(公告)号：US5900939A

公开(公告)日：1999-05-04

申请号：US98880

申请日：1998-06-17

申请人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

发明人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

IPC分类号： G01B11/06 ,  G01J4/00 ,  G01N21/21

CPC分类号： G01B11/0641 ,  G01J4/00 ,  G01N21/211

摘要： An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasimonochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer. A processor determines the polarization state of the light beam entering the analyzer from the intensity measured by the detector, and determines an optical property of the reference sample based upon the determined polarization state, the known wavelength of light from the light generator and the composition of the reference sample. The processor also operates the optical measurement device to measure an optical parameter of the reference sample. The processor calibrates the optical measurement device by comparing the measured optical parameter from the optical measurement device to the determined optical property from the reference ellipsometer.

摘要翻译： 一种用于评估至少具有部分已知组成的参考样品的光学测量系统。 光学测量系统包括参考椭偏仪和至少一个非接触式光学测量装置。 参考椭偏仪包括光发生器，分析器和检测器。 光发生器产生具有已知波长和已知极化的准共振色光束，用于与参考样品相互作用。 光束相对于参考样品被引导到非正常入射角，以与参考样品相互作用。 在光束与参考样本相互作用后，分析仪在光束中产生S和P偏振分量之间的干扰。 检测器测量光束通过分析仪后的强度。 处理器根据由检测器测量的强度确定进入分析器的光束的偏振状态，并且基于所确定的偏振状态，来自光发生器的已知的光的波长以及来自光发生器的光的组成，确定参考样品的光学特性 参考样品。 处理器还操作光学测量装置以测量参考样品的光学参数。 处理器通过将来自光学测量装置的测量光学参数与来自参考椭偏仪的所确定的光学特性进行比较来校准光学测量装置。

公开(公告)号：US06411385B1

公开(公告)日：2002-06-25

申请号：US09886514

申请日：2001-06-21

申请人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

发明人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

IPC分类号： G01J400

摘要： An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasi-monochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer. A processor determines the polarization state of the light beam entering the analyzer from the intensity measured by the detector, and determines an optical property of the reference sample based upon the determined polarization state, the known wavelength of light from the light generator and the composition of the reference sample. The processor also operates the optical measurement device to measure an optical parameter of the reference sample. The processor calibrates the optical measurement device by comparing the measured optical parameter from the optical measurement device to the determined optical property from the reference ellipsometer.

公开(公告)号：US06304326B1

公开(公告)日：2001-10-16

申请号：US09247121

申请日：1999-02-08

申请人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

发明人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

IPC分类号： G01J400

CPC分类号： G01B11/0641 ,  G01J4/00 ,  G01N21/211

摘要： An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasi-monochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer. A processor determines the polarization state of the light beam entering the analyzer from the intensity measured by the detector, and determines an optical property of the reference sample based upon the determined polarization state, the known wavelength of light from the light generator and the composition of the reference sample. The processor also operates the optical measurement device to measure an optical parameter of the reference sample. The processor calibrates the optical measurement device by comparing the measured optical parameter from the optical measurement device to the determined optical property from the reference ellipsometer.

公开(公告)号：US06831743B2

公开(公告)日：2004-12-14

申请号：US10653306

申请日：2003-09-02

申请人： David E. Aspnes ,  Jon Opsal

发明人： David E. Aspnes ,  Jon Opsal

IPC分类号： G01J400

CPC分类号： G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

摘要： An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

公开(公告)号：US5973787A

公开(公告)日：1999-10-26

申请号：US76673

申请日：1998-05-12

申请人： David E. Aspnes ,  Jon Opsal

发明人： David E. Aspnes ,  Jon Opsal

IPC分类号： G01N21/21 ,  G01B11/06 ,  G01J3/02 ,  G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G02F1/01

CPC分类号： G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

摘要： An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

公开(公告)号：US5798837A

公开(公告)日：1998-08-25

申请号：US890697

申请日：1997-07-11

申请人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

发明人： David E. Aspnes ,  Jon Opsal ,  Jeffrey T. Fanton

IPC分类号： G01B11/06 ,  G01J4/00 ,  G01N21/21

CPC分类号： G01B11/0641 ,  G01J4/00 ,  G01N21/211

摘要： An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasi-monochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer. A processor determines the polarization state of the light beam entering the analyzer from the intensity measured by the detector, and determines an optical property of the reference sample based upon the determined polarization state, the known wavelength of light from the light generator and the composition of the reference sample. The processor also operates the optical measurement device to measure an optical parameter of the reference sample. The processor calibrates the optical measurement device by comparing the measured optical parameter from the optical measurement device to the determined optical property from the reference ellipsometer.

公开(公告)号：US06449043B2

公开(公告)日：2002-09-10

申请号：US09944831

申请日：2001-08-31

申请人： David E. Aspnes ,  Jon Opsal

发明人： David E. Aspnes ,  Jon Opsal

IPC分类号： G01J400

CPC分类号： G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

摘要： An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

摘要翻译： 用于使用宽波长范围分析样品的椭偏仪的椭偏仪和椭偏仪的方法包括用于产生具有用于与样品相互作用的光波长范围的多色光束的光源。 在光束与样品相互作用之前，偏振器使光束偏振。 旋转补偿器引起光束的偏振状态的相位延迟，其中选择波长范围和补偿器，使得至少引入第一相位延迟值，该第一相位延迟值在大致135°至225°的有效延迟的主要范围内 °，并且引起超出初级范围的至少第二相位延迟值。 在光束与样品相互作用后，分析仪与光束相互作用。 检测器测量与分析仪相互作用后的光强度，作为补偿器角度和波长的函数，优选同时在所有波长处。 处理器确定当光束从由检测器测量的光强度撞击分析仪时的偏振状态。