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    Self-cleaning vacuum purge system
    1.
    发明授权
    Self-cleaning vacuum purge system 失效
    自清洁真空吹扫系统

    公开(公告)号：US06341615B1

    公开(公告)日：2002-01-29

    申请号：US09660633

    申请日：2000-09-13

    Applicant: Robert Sam Zorich ,  David James Silva

    Inventor： Robert Sam Zorich ,  David James Silva

    IPC: G05D1620

    CPC classification number: B01D45/00 ,  Y10T137/0396 ,  Y10T137/3084 ,  Y10T137/6606 ,  Y10T137/86083

    Abstract: A vacuum purge system is provided to protect the vacuum pump from becoming flooded with liquid that on occasion is purged with vapors from process equipment. The liquid is trapped in a vessel and then evaporated and exhausted through the vacuum pump as vapor. Evaporation of trapped liquid is effected by reducing or stopping the purge stream to the trapping vessel while continuing to operate the vacuum pump, thereby reducing the absolute pressure within the vessel. Evaporation of liquid can also be effected by supplying heat to the trapped vessel, either in cooperation with or instead of the pressure reduction. Use of a programmable logic controller enables a cyclic operation that traps liquid from entering the pump, removes the trapped liquid as vapor, and then resumes normal purge operation.

    Abstract translation: 提供真空吹扫系统以保护真空泵不被液体淹没，有时用过程设备的蒸气吹扫。 将液体捕获在容器中，然后蒸发并通过真空泵作为蒸气排出。 捕集的液体的蒸发通过在继续操作真空泵的同时将吹扫流还原或停止到捕集容器，从而降低容器内的绝对压力来实现。 液体的蒸发也可以通过与压缩还原反应或代替减压来向被捕集的容器提供热量来实现。 使用可编程逻辑控制器可以进行循环操作，以捕获液体进入泵，将捕集的液体作为蒸汽去除，然后恢复正常清洗操作。

    Adapter manifold with dual valve block
    2.
    发明授权
    Adapter manifold with dual valve block 失效
    带双阀块的适配器歧管

    公开(公告)号：US07114522B2

    公开(公告)日：2006-10-03

    申请号：US10944364

    申请日：2004-09-18

    Applicant: David James Silva

    Inventor： David James Silva

    IPC: F16K7/17

    CPC classification number: F16K11/22 ,  F16K11/022 ,  Y10T137/87249 ,  Y10T137/87893

    Abstract: An adapter manifold comprising a first dual valve block having a first diaphragm valve and a second diaphragm valve; a first, a second, and a third low dead space connector for connecting the adapter manifold with dual valve block to the remaining portions of the chemical delivery system; a first conduit for connecting both the diaphragm side of the first diaphragm valve and the seat side of the second diaphragm valves to the first low dead space connector; a second conduit for connecting the seat side of the first diaphragm valve to the second low dead space connector; and a third conduit for connecting the diaphragm side of the second diaphragm valve to the third low dead space connector.

    Abstract translation: 一种适配器歧管，包括具有第一隔膜阀和第二隔膜阀的第一双阀块; 第一，第二和第三低死空间连接器，用于将适配器歧管与双阀块连接到化学物质输送系统的其余部分; 第一管道，用于将第一隔膜阀的隔膜侧和第二隔膜阀的座侧连接到第一低死区连接器; 用于将第一隔膜阀的座侧连接到第二低死区连接器的第二导管; 以及用于将第二隔膜阀的隔膜侧连接到第三低死区连接器的第三导管。

    High purity chemical delivery system
    5.
    发明授权
    High purity chemical delivery system 失效
    高纯化学品输送系统

    公开(公告)号：US07198056B2

    公开(公告)日：2007-04-03

    申请号：US11055225

    申请日：2005-02-10

    Applicant: David James Silva

    Inventor： David James Silva

    IPC: B67D5/54

    CPC classification number: F04F1/06 ,  Y10T137/3127 ,  Y10T137/4259

    Abstract: A high purity chemical delivery system is provided that connects a high purity chemical container to a high purity chemical utilization point and that comprises three manifolds, each of the manifolds having a plurality of diaphragm valves. The inventive system enables rapid clean out and purge after the container is replaced by means of a plurality of vacuum and purge cycles, which remove residual chemical and entrapped impurities while reduced manufacturing downtimes compared with systems in the prior art.

    Abstract translation: 提供了一种高纯度化学物质输送系统，其将高纯度化学容器连接到高纯度化学品利用点，并且包括三个歧管，每个歧管具有多个隔膜阀。 在通过多个真空和吹扫循环替换容器之后，本发明的系统能够快速清洁和清除，这与现有技术中的系统相比减少了制造停机时间，从而消除了残留的化学和捕获的杂质。

    System and method for purging high purity interfaces
    6.
    发明授权
    System and method for purging high purity interfaces 失效

    公开(公告)号：US07114531B2

    公开(公告)日：2006-10-03

    申请号：US10909854

    申请日：2004-08-02

    Applicant: David James Silva

    Inventor： David James Silva

    IPC: B65B31/00

    CPC classification number: C23C16/4402 ,  B01J4/02 ,  B01J2219/00162 ,  B08B9/00 ,  B08B9/032 ,  B08B9/0323 ,  Y10T137/87684

    Abstract: A system for purging high purity interfaces connecting a high purity chemical container to process lines comprises a first purging manifold, connected at one end to a first adapter manifold extending from the high purity chemical container, and connected at the other end either to a process tool, to a second high purity container, to a source of gas, or to a source of vacuum on one side, or to a source of vent or to a source of vacuum on the other side; and a second purging manifold connecting the second adapter manifold either to a source of push gas, a source of purge gas, or a source of vacuum; or to a source of vent. A related method comprises blowing purge gas through both the first and the second purging manifolds, and, optionally, applying vacuum to both purging manifolds.

    Method for purging a high purity manifold
    7.
    发明授权
    Method for purging a high purity manifold 失效
    吹扫高纯度歧管的方法

    公开(公告)号：US07290572B2

    公开(公告)日：2007-11-06

    申请号：US11160801

    申请日：2005-07-10

    Applicant: David James Silva

    Inventor： David James Silva

    IPC: B65B1/04

    CPC classification number: F17C13/04 ,  F17C2205/0146 ,  F17C2205/0323 ,  F17C2221/05 ,  F17C2227/0302 ,  F17C2227/044 ,  F17C2227/045 ,  F17C2250/0631 ,  F17C2250/0636 ,  F17C2250/0673 ,  F17C2260/048 ,  F17C2270/0518

    Abstract: A method for purging a manifold for the delivery of a high purity chemical by injecting of a purge gas into the manifold under vacuum conditions. In one embodiment, the method comprises a first step of injecting a purge gas into the manifold at a first end while applying vacuum at a second end; a second step of closing the first end and evacuating the manifold by applying vacuum at the second end; and a third step of opening the first end and injecting purge gas into the manifold at the first end while applying vacuum at the second end, causing a turbulent flow of the purge gas along the internal walls of the manifold due to the pressure differential between the purge gas and the evacuated manifold. An effective removal of residuals of the high purity chemical within the manifold is thereby achieved.

    Abstract translation: 一种用于通过在真空条件下将吹扫气体注入到歧管中来吹扫用于输送高纯度化学品的歧管的方法。 在一个实施例中，该方法包括第一步骤，其在第一端处将净化气体注入到歧管中，同时在第二端施加真空; 第二步骤，通过在第二端施加真空来关闭第一端并排出歧管; 以及第三步骤，在第一端处打开第一端并将吹扫气体注入到歧管中，同时在第二端处施加真空，由于第二端部之间的压力差导致吹扫气体沿着歧管内壁的紊流 吹扫气体和抽真空歧管。 从而实现了在歧管内高效清除高纯度化学物质的有效去除。

    Purgeable manifold system
    8.
    发明授权
    Purgeable manifold system 失效
    可清洗歧管系统

    公开(公告)号：US07198072B2

    公开(公告)日：2007-04-03

    申请号：US10890550

    申请日：2004-07-13

    Applicant: David James Silva

    Inventor： David James Silva

    IPC: B65B31/00

    CPC classification number: B01J4/02 ,  B01J2219/00162 ,  B08B9/00 ,  B08B9/0323 ,  Y10T137/87684

    Abstract: A purgeable manifold system for the movement of low vapor pressure chemicals that may be embodied in a variety of forms. In one embodiment, a container for storing the low vapor pressure chemical has a plurality of ports; a first manifold detachably connects a first port to a source of gas, vent, or vacuum by flow communication through a first diaphragm valve; a second manifold detachably connects a second port to a source of gas, vent, vacuum, or low vapor pressure chemical, or to a process tool by flow communication through a second and a third diaphragm valve, or alternatively detachably connects a third port to the same source by flow communication through a fourth and the third diaphragm valve; and a third manifold, detachably connects a fourth port to a source of gas, vent, or vacuum by flow communication through a fifth diaphragm valve.

    Abstract translation: 用于移动可以以各种形式体现的低蒸汽压力化学品的可清洗歧管系统。 在一个实施例中，用于储存低蒸气压化学品的容器具有多个端口; 第一歧管通过第一隔膜阀通过流动连通将第一端口可拆卸地连接到气体，通气口或真空源; 第二歧管将第二端口可拆卸地连接到气体源，排气口，真空或低蒸气压化学物质，或者通过通过第二和第三隔膜阀的流动连通而连接到处理工具，或者可替换地将第三端口连接到 通过第四和第三隔膜阀的流动连通相同的源; 和第三歧管，通过通过第五隔膜阀的流动连通将第四端口可拆卸地连接到气体，通风口或真空源。

    Purgeable manifold for low vapor pressure chemicals containers
    9.
    发明授权
    Purgeable manifold for low vapor pressure chemicals containers 有权
    用于低蒸气压化学容器的可吹扫歧管

    公开(公告)号：US06648034B1

    公开(公告)日：2003-11-18

    申请号：US10155726

    申请日：2002-05-23

    Applicant: Charles Michael Birtcher ,  Martin Castaneda Martinez ,  Thomas Andrew Steidl ,  Gil Vivanco ,  David James Silva

    Inventor： Charles Michael Birtcher ,  Martin Castaneda Martinez ,  Thomas Andrew Steidl ,  Gil Vivanco ,  David James Silva

    IPC: F17C1300

    CPC classification number: C23C16/4402 ,  B08B9/00 ,  Y10T137/3127 ,  Y10T137/87684

    Abstract: A manifold comprising a container having two ports; a conduit connecting the container to a source/dispense of chemical having a first end and a second end and a connector for the ends; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of the conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent; a second block valve having two diaphragm valves, having a valve seat side and a diaphragm side, wherein each valve seat side faces the other valve seat side, and each valve seat side connected to the second end of the conduit, the diaphragm side of one valve connected to purge, and the diaphragm side of another valve connected to push gas or chemical outlet.

    Abstract translation: 一种歧管，包括具有两个端口的容器; 将容器连接到具有第一端和第二端的化学品的源/分配的导管和用于端部的连接器; 第一截止阀具有两个隔膜阀，每个阀具有阀座侧和隔膜侧，每个阀座侧面对另一个阀座侧，并连接到导管的第一端，一个隔膜侧连接到第一端口， 另一个隔膜侧连接到排气口; 具有两个隔膜阀的第二截止阀，其具有阀座侧和隔膜侧，其中每个阀座侧面向另一个阀座侧，并且每个阀座侧连接到导管的第二端，隔膜侧为一个 阀门连接吹扫，另一个阀门的隔膜侧连接以推动气体或化学品出口。

    Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals
    10.
    发明授权
    Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals 有权
    无溶剂可清洗隔膜阀门用于低蒸气压化学品

    公开(公告)号：US06431229B1

    公开(公告)日：2002-08-13

    申请号：US09938883

    申请日：2001-08-24

    Applicant: Charles Michael Birtcher ,  Robert Sam Zorich ,  Thomas Andrew Steidl ,  Gil Vivanco ,  Cynthia Lee Trent ,  David James Silva

    Inventor： Charles Michael Birtcher ,  Robert Sam Zorich ,  Thomas Andrew Steidl ,  Gil Vivanco ,  Cynthia Lee Trent ,  David James Silva

    IPC: B65B104

    CPC classification number: F17C13/04 ,  F17C2205/0323 ,  F17C2205/0385 ,  F17C2221/05 ,  F17C2227/044 ,  F17C2270/0518 ,  Y10T137/87684

    Abstract: A manifold for transfer of chemical, comprising; a heated first conduit for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly having first and second diaphragm valves, each valve having a diaphragm and a valve seat side and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit; a first connector in the first conduit for detaching the conduit from the vessel; a second conduit, for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve; and a third conduit, for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve.

    Abstract translation: 用于转移化学品的歧管，包括： 用于将用于容纳化学品的容器连接到另一容器的加热的第一管道，加压气体源和真空源; 具有第一和第二隔膜阀的加热的第一截止阀组件，每个阀具有隔膜和阀座侧和隔膜侧，其中每个阀的阀座侧与另一个阀的阀座侧并置，并且每个 每个阀的阀座侧与第一导管连通; 第一连接器，用于将导管从容器中分离出来; 用于将化学品输送到容器的第二导管，连接到第一阀的隔膜侧的第二导管; 以及第三导管，用于将加压气体和真空传送到连接到第二阀的隔膜侧的第一导管。

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