公开(公告)号：US08679966B2

公开(公告)日：2014-03-25

申请号：US13568695

申请日：2012-08-07

申请人： David Van Steenwinckel ,  Thomas Merelle ,  Franciscus Petrus Widdershoven ,  Viet Hoang Nguyen ,  Dimitri Soccoi ,  Jan Leo Dominique Fransaer

发明人： David Van Steenwinckel ,  Thomas Merelle ,  Franciscus Petrus Widdershoven ,  Viet Hoang Nguyen ,  Dimitri Soccoi ,  Jan Leo Dominique Fransaer

IPC分类号： H01L21/4763

CPC分类号： G01N27/4145 ,  G01N27/3275 ,  H01L29/66

摘要： A method of manufacturing a biosensor semiconductor device in which copper electrodes at a major surface of the device are modified to form Au—Cu alloy electrodes. Such modification is effected by depositing a gold layer over the device, and then thermally treating the device to promote interdiffusion between the gold and the electrode copper. Alloyed gold-copper is removed from the surface of the device, leaving the exposed electrodes. The electrodes are better compatible with further processing into a biosensor device than is the case with conventional copper electrodes, and the process windows are wider than for gold capped copper electrodes. A biosensor semiconductor device having Au—Cu alloy electrodes is also disclosed.

摘要翻译： 一种制造生物传感器半导体器件的方法，其中在器件的主表面上的铜电极被改性以形成Au-Cu合金电极。 通过在器件上沉积金层，然后对该器件进行热处理以促进金和电极铜之间的相互扩散来实现这种修改。 从器件的表面去除合金金铜，留下暴露的电极。 与常规铜电极的情况相比，电极与生物传感器装置的进一步处理更好地兼容，并且处理窗口比金盖铜电极宽。 还公开了具有Au-Cu合金电极的生物传感器半导体器件。

公开(公告)号：US08283231B2

公开(公告)日：2012-10-09

申请号：US12483133

申请日：2009-06-11

申请人： Thomas Merelle ,  Gerben Doornbos ,  Robert James Pascoe Lander

发明人： Thomas Merelle ,  Gerben Doornbos ,  Robert James Pascoe Lander

IPC分类号： H01L27/088 ,  H01L21/336

CPC分类号： H01L27/1104 ,  H01L21/823418 ,  H01L21/823431 ,  H01L21/823437 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/11 ,  H01L29/0847 ,  H01L29/6659 ,  H01L29/66681 ,  H01L29/66795 ,  H01L29/7817 ,  H01L29/7834 ,  H01L29/785

摘要： A method and circuit in which the drive strength of a FinFET transistor can be selectively modified, and in particular can be selectively reduced, by omitting the LDD extension formation in the source and/or in the drain of the FinFET.One application of this approach is to enable differentiation of the drive strengths of transistors in an integrated circuit by applying the technique to some, but not all, of the transistors in the integrated circuit. In particular in a SRAM cell formed from FinFET transistors the application of the technique to the pass-gate transistors, which leads to a reduction of the drive strength of the pass-gate transistors relative to the drive strength of the pull-up and pull-down transistors, results in improved SRAM cell performance.

摘要翻译： 通过省略FinFET的源极和/或漏极中的LDD延伸形成，可以选择性地修改FinFET晶体管的驱动强度，特别是可以选择性地降低其驱动强度的方法和电路。 该方法的一个应用是通过将该技术应用于集成电路中的一些但不是全部的晶体管来实现集成电路中的晶体管的驱动强度的区分。 特别是在由FinFET晶体管形成的SRAM单元中，将技术应用于栅极晶体管，这导致了通过栅极晶体管的驱动强度相对于上拉和下拉的驱动强度的降低， 降低晶体管，从而提高SRAM单元性能。

公开(公告)号：US20120088315A1

公开(公告)日：2012-04-12

申请号：US13378302

申请日：2010-06-17

申请人： Thomas Merelle ,  Magali Huguette Alice Lambert ,  Filip Frederix

发明人： Thomas Merelle ,  Magali Huguette Alice Lambert ,  Filip Frederix

IPC分类号： G01N33/566 ,  B05D5/12 ,  G01N30/00

CPC分类号： G01N33/553 ,  G01N33/5438 ,  G01N2610/00

摘要： A device for bio-sensing applications is disclosed, comprising a substrate such as a semiconductor chip having Cu electrodes thereon, and a self assembled monolayer bonded to at least one of the Cu electrodes, wherein molecules of the self-assembled monolayer comprise a head group which bonds to Cu, a carbon-comprising chain comprising a chain of at least 12 C atoms, and a terminal group which is hydrophilic and for binding a bio-receptor. The terminal group is hydrophilic to allow binding to the bio-receptor, and inclusion of the carbon-comprising chain, limits or avoids corrosion of the copper. Also disclosed is a method of providing such a device, activating the terminal group and coupling a bio-receptor to the activated terminal group. Disclosure further extends to use of such a device for bio-sensing applications.

摘要翻译： 公开了一种用于生物感测应用的装置，其包括诸如其上具有Cu电极的半导体芯片的衬底和与至少一个Cu电极结合的自组装单层，其中自组装单层的分子包括头组 其与Cu键合，包含至少12个C原子的链的含碳链，以及亲水性并用于结合生物受体的端基。 端基是亲水的，以允许与生物受体结合，并且包含含碳链，限制或避免铜的腐蚀。 还公开了提供这种装置的方法，激活终端组并将生物受​​体与活化的末端基团偶联。 公开进一步延伸到使用这种用于生物感测应用的装置。