公开(公告)号：US5134339A

公开(公告)日：1992-07-28

申请号：US704175

申请日：1991-05-22

申请人： Dietrich Hoffmeister ,  Johannes Bihr ,  Harald Niebel

发明人： Dietrich Hoffmeister ,  Johannes Bihr ,  Harald Niebel

IPC分类号： H01J37/06 ,  H01J37/248

CPC分类号： H01J37/248

摘要： The invention is directed to a high-voltage lead-through arrangement for introducing a high voltage into an enclosure wherein a vacuum is maintained such as for particle-beam apparatus. The arrangement includes: a high-voltage electrode for carrying a high potential; an insulator enclosing the high-voltage electrode and having a surface defining a boundary with the vacuum; and, an outer low-voltage electrode surrounding the insulator for carrying a low potential. The electrodes are spaced from each other by an electrode spacing measured along the surface of the insulator. The high-voltage electrode and the insulator conjointly define a first region wherein the high potential is present to a good approximation; and the first region is bounded by the insulator surface for a first distance of up to approximately 1/10 of the electrode spacing. The low-voltage electrode and the insulator conjointly define a second region wherein the low potential is present to a good approximation and the second region is bounded by the insulator surface for a second distance of up to approximately 1/10 of the electrode spacing. With this arrangement, the high-voltage lead-through can be operated at a higher voltage than the known configurations without the occurrence of micro-discharges.

摘要翻译： 本发明涉及一种用于将高电压引入外壳中的高压导通装置，其中保持诸如用于粒子束装置的真空。 该装置包括：用于承载高电位的高压电极; 封闭高压电极并具有限定与真空边界的表面的绝缘体; 以及包围用于承载低电位的绝缘体的外部低压电极。 电极通过沿着绝缘体的表面测量的电极间隔彼此间隔开。 高压电极和绝缘体共同限定了第一区域，其中存在高电位以获得良好的近似值; 并且第一区域由绝缘体表面限定高达电极间距的大约1/10的第一距离。 低电压电极和绝缘体共同限定了第二区域，其中存在低电位以达到良好的近似值，而第二区域由绝缘体表面限定高达电极间距的大约1/10的第二距离。 通过这种布置，高电压导通可以以比已知构造更高的电压工作，而不会发生微放电。

公开(公告)号：US4396861A

公开(公告)日：1983-08-02

申请号：US184524

申请日：1980-09-05

申请人： Dietrich Hoffmeister ,  Wilhelm Egle

发明人： Dietrich Hoffmeister ,  Wilhelm Egle

IPC分类号： H01J37/06 ,  H01J37/248 ,  H01J5/50

CPC分类号： H01J37/248 ,  H01J37/06

摘要： The invention contemplates lead-through structure for the high-voltage electrode of an electron microscope or the like, in conjunction with shaping of the high-voltage electrode and of the body of insulating material via which the lead-through is supported, in reference to metal envelope structure. The high-voltage electrode has a step-wise enlargement, and the surface of the insulating material which is exposed to the vacuum commences at the start of the step-wise enlargement. As a result, the field strength along the vacuum-exposed insulator surface is so influenced that a minimum electric field strength is produced at the boundary line between the vacuum and the high-voltage electrode. The further result is to prevent occurrence of microdischarges.

摘要翻译： 本发明考虑到电子显微镜等的高电压电极的引线结构，结合高压电极和支撑导通的绝缘材料体的成形，参照 金属外壳结构。 高压电极具有逐步扩大，暴露于真空的绝缘材料的表面在逐步扩大开始时开始。 结果，沿着真空暴露的绝缘体表面的场强受到影响，使得在真空和高压电极之间的边界线处产生最小的电场强度。 进一步的结果是防止微放电的发生。

公开(公告)号：US4680945A

公开(公告)日：1987-07-21

申请号：US863194

申请日：1986-05-14

申请人： Dietrich Hoffmeister

发明人： Dietrich Hoffmeister

IPC分类号： B01L1/00 ,  B01L7/00 ,  F25D3/10 ,  G01N1/28 ,  G01N1/42 ,  F25B19/00

CPC分类号： F25D3/10 ,  G01N1/42

摘要： A cooling chamber has an interspace between the structure defining the work chamber and coolant vessel on the one hand, and the outer insulating vessel on the other hand to provide better thermal insulation. The work chamber is disposed above the coolant vessel and has apertures formed in the base wall thereof so that the vaporized coolant flows directly into the work chamber. The consumption of coolant is minimal and the cooling chamber is of simple configuration is that it can be manufactured economically.

摘要翻译： 冷却室在限定工作室的结构和一方面的冷却剂容器之间具有间隙，另一方面具有外绝缘容器，以提供更好的隔热性。 工作室设置在冷却剂容器的上方，并具有形成在其底壁中的孔，使得蒸发的冷却剂直接流入工作室。 冷却液的消耗量最小，冷却室的结构简单，可以经济地制造。