公开(公告)号：US07253905B2

公开(公告)日：2007-08-07

申请号：US10718484

申请日：2003-11-20

申请人： Dirk L. Basting ,  Kai Schmidt ,  Holger Bald ,  Christian Schramm

发明人： Dirk L. Basting ,  Kai Schmidt ,  Holger Bald ,  Christian Schramm

IPC分类号： G01B9/02

CPC分类号： H04N17/002 ,  G03F7/70425 ,  G03F7/70483 ,  H04N1/401 ,  H04N5/3653

摘要： A process for the determination and correction of laser induced damages of the optical and electronic components within the beam path of a monitor module of a 193 nm excimer lasers is provided herein. Especially state of the art detectors like CCD cameras degrade under UV radiation. With a special correction of the sensitivity of each camera pixel this problem can be solved.

摘要翻译： 本文提供了用于确定和校正193nm准分子激光器的监视器模块的光束和电子部件的光学和电子部件的损伤的过程。 特别是像CCD照相机这样的先进的检测器在UV辐射下降解。 通过对每个摄像机像素的灵敏度进行特殊校正，可以解决这个问题。

公开(公告)号：US06515741B1

公开(公告)日：2003-02-04

申请号：US09454803

申请日：1999-12-03

申请人： Dirk L. Basting ,  Sergei V. Govorkov

发明人： Dirk L. Basting ,  Sergei V. Govorkov

IPC分类号： G01N2100

CPC分类号： G03F7/70025 ,  G01J9/02 ,  G01M11/00 ,  G03F7/70575 ,  G03F7/706 ,  H01S3/08009 ,  H01S3/225

摘要： An apparatus and method for testing the quality of a line narrowing and/or selection module that has been particularly assembled for use with a line-narrowed excimer or molecular fluorine laser is described. The method includes providing a test beam which has been previously line-narrowed using an installed line-narrowing and/or selection module. Then, the test beam is directed into the test module. Next, the one or more properties of the retroreflected beam are measured, i.e., after the beam has traversed the test module. The quality of the test module and one or more of its components may be determined based on the measurements. Such properties as wavefront distortions, excessive scattering, total reflectivity, total dispersion and aging of components of the test module may be measured for making this quality determination.

摘要翻译： 描述了一种用于测试特别组装用于线狭窄的准分子或分子氟激光的线狭窄和/或选择模块的质量的装置和方法。 该方法包括提供已经使用安装的线狭窄和/或选择模块预先线狭窄的测试梁。 然后，测试光束被引导到测试模块中。 接下来，测量回射光束的一个或多个属性，即在光束穿过测试模块之后。 可以基于测量来确定测试模块及其一个或多个组件的质量。 可以测量波长失真，过度散射，总反射率，测试模块的组件的总体色散和老化等特性以进行该质量测定。