公开(公告)号：US5605612A

公开(公告)日：1997-02-25

申请号：US337065

申请日：1994-11-10

申请人： Hyeon S. Park ,  Kyu C. Lee ,  Chul H. Kwon ,  Dong H. Yun ,  Hyun W. Shin ,  Hyung K. Hong

发明人： Hyeon S. Park ,  Kyu C. Lee ,  Chul H. Kwon ,  Dong H. Yun ,  Hyun W. Shin ,  Hyung K. Hong

IPC分类号： G01N27/12 ,  G01N33/00 ,  G01N27/26

CPC分类号： G01N27/12 ,  G01N33/0031

摘要： A thin-film gas sensor and manufacturing method of the same is disclosed which includes a silicon substrate; an insulating layer formed on the surface of the silicon substrate; a heater formed in zigzag on the surface of said insulating layer; a temperature sensor formed in zigzag on the surface of the insulating layer in parallel with the heater; an interlayer insulating layer for electrically insulating the heater and temperature sensor formed on the insulating layer; a plurality of electrodes formed on the interlayer insulating layer placed between the heater and temperature sensor; a plurality of pairs of gas sensing layers disposed in an array on the electrodes and for reacting on detected gas; and a plurality of gas shielding layers formed on one gas sensing layer out of the pair of gas sensing layers and for shielding the detected gas so that the gas sensing layers do not react on the detected gas.

摘要翻译： 公开了一种薄膜气体传感器及其制造方法，其包括硅衬底; 形成在所述硅衬底的表面上的绝缘层; 在所述绝缘层的表面上以锯齿形形成的加热器; 绝缘层的表面上与加热器平行地以锯齿形形成的温度传感器; 用于使形成在绝缘层上的加热器和温度传感器电绝缘的层间绝缘层; 多个电极，形成在位于加热器和温度传感器之间的层间绝缘层上; 多个成对的气体感测层，阵列设置在电极上并用于对检测到的气体进行反应; 以及多个气体屏蔽层，形成在一对气体感测层之间的一个气体感测层上，并用于屏蔽检测到的气体，使得气体感测层不对检测到的气体起反应。

公开(公告)号：US5545300A

公开(公告)日：1996-08-13

申请号：US297606

申请日：1994-08-29

申请人： Dong H. Yun ,  Kyu C. Lee ,  Hyung K. Hong ,  Hyeon S. Park ,  Chul H. Kwon ,  Hyun W. Shin

发明人： Dong H. Yun ,  Kyu C. Lee ,  Hyung K. Hong ,  Hyeon S. Park ,  Chul H. Kwon ,  Hyun W. Shin

IPC分类号： G01N27/12 ,  G01N27/407

CPC分类号： G01N27/12

摘要： This invention relates to a low power consumption type thin film gas sensor and method for fabricating the same. The gas sensor includes a silicon substrate having a window in the central part of one side thereof, masking material formed on the one side thereof except the window, a supporting film formed of an etch stop layer and a glass film on the other side of the substrate, heaters and temperature sensors arranged in parallel on the supporting film facing the window, an interlayer insulation film formed on the supporting film to cover the heaters and the temperature sensors, sensing film electrodes formed on the interlayer insulation film, and a sensing film formed on the interlayer insulation film so as to cover the sensing film electrodes for sensing a particular gas.

摘要翻译： 本发明涉及一种低功耗型薄膜气体传感器及其制造方法。 气体传感器包括在其一侧的中心部分具有窗口的硅衬底，除了窗口之外的形成在其一侧的掩模材料，由蚀刻停止层形成的支撑膜和位于其另一侧的玻璃膜 基板，加热器和温度传感器平行设置在面向窗口的支撑膜上，形成在支撑膜上以覆盖加热器和温度传感器的层间绝缘膜，形成在层间绝缘膜上的感测膜电极和形成的感测膜 在层间绝缘膜上覆盖用于感测特定气体的感测膜电极。

公开(公告)号：US5621162A

公开(公告)日：1997-04-15

申请号：US590299

申请日：1996-01-23

申请人： Dong H. Yun ,  Chul H. Kwon ,  Kyuchung Lee ,  Hyeon S. Park ,  Hyung K. Hong ,  Hyun W. Shin ,  Sung T. Kim

发明人： Dong H. Yun ,  Chul H. Kwon ,  Kyuchung Lee ,  Hyeon S. Park ,  Hyung K. Hong ,  Hyun W. Shin ,  Sung T. Kim

IPC分类号： G01N27/12 ,  G01N33/02 ,  G01N31/00

CPC分类号： G01N27/125 ,  G01N33/025

摘要： A gas sensor for detecting a gas component from a food item includes a sensing layer having an electrical resistance value that varies in accordance with the concentration and type of the gas component generated from the food item to thereby sense the gas component, first and second electrodes coupled across the sensing layer and connected to a power supply, a heater for heating the gas sensor to a temperature of sensing operation, and a switch connected to an adjustable voltage supply for controlling whether the heater is operated in a first temperature range or in a second temperature range. The sensing layer includes a mixture of SnO.sub.2 and WO.sub.3 in a predetermined ratio.

摘要翻译： 一种用于从食品检测气体成分的气体传感器包括：感测层，其具有根据从食品产生的气体成分的浓度和类型而变化的电阻值，从而感测气体成分，第一和第二电极 耦合在感测层上并连接到电源，用于将气体传感器加热到感测操作的温度的加热器以及连接到可调电压源的开关，用于控制加热器是否在第一温度范围内操作 第二温度范围。 感测层包含预定比例的SnO 2和WO 3的混合物。

公开(公告)号：US5627305A

公开(公告)日：1997-05-06

申请号：US605889

申请日：1996-02-23

申请人： Dong H. Yun ,  Chul H. Kwon ,  Kyuchung Lee ,  Hyung K. Hong ,  Hyeon S. Park ,  Hyun W. Shin ,  Sung T. Kim

发明人： Dong H. Yun ,  Chul H. Kwon ,  Kyuchung Lee ,  Hyung K. Hong ,  Hyeon S. Park ,  Hyun W. Shin ,  Sung T. Kim

IPC分类号： G01N27/00 ,  G01N27/12 ,  G01N33/00 ,  G01N27/04 ,  G01N31/12 ,  G01R3/00

CPC分类号： G01N27/122 ,  G01N27/125

摘要： A gas sensing apparatus is disclosed including a gas sensing device that is self-heated due to an applied voltage, whose resistance variation amount is varied to thereby sense gas; a voltage supply for variably supplying a voltage to the gas sensing device; a current detector for detecting the current flowing through the gas sensing device thereby generating a current-voltage characteristic for the gas sensing apparatus under the effect of a given gas exposure; and a control and judgement portion for controlling the voltage supply to control a variation value of a voltage supplied to the gas sensing device and to determine the kind and density of a gas in an ambient atmosphere, using current-voltage characteristic reference data.

摘要翻译： 公开了一种气体感测装置，其包括由于施加的电压而自加热的气体感测装置，其电阻变化量被改变从而感测气体; 用于向气体感测装置可变地供应电压的电压源; 用于检测流过气体感测装置的电流的电流检测器，从而在给定的气体暴露的作用下产生用于气体检测装置的电流 - 电压特性; 以及控制和判断部分，用于控制电压供应以控制提供给气体感测装置的电压的变化值，并使用电流 - 电压特性参考数据确定环境大气中的气体的种类和密度。

公开(公告)号：US5609096A

公开(公告)日：1997-03-11

申请号：US356546

申请日：1994-12-15

申请人： Chul H. Kwon ,  Hyung-Ki Hong ,  Sung T. Kim ,  Kyu C. Lee ,  Dong H. Yun ,  Hyun W. Shin ,  Hyeon S. Park

发明人： Chul H. Kwon ,  Hyung-Ki Hong ,  Sung T. Kim ,  Kyu C. Lee ,  Dong H. Yun ,  Hyun W. Shin ,  Hyeon S. Park

IPC分类号： G01N27/12 ,  A01F25/00 ,  A23B7/148 ,  A23B7/152 ,  A23L3/3418 ,  G01N33/02 ,  F25B41/00

CPC分类号： A23B7/148 ,  A23B7/152 ,  A23L3/3418

摘要： A vegetable freshness sensor production method and a freshness keeping device using the sensor are disclosed. The sensor senses gases generated by vegetables, thus to not only sense freshness of the vegetables but also sense decayed state of the vegetables. The vegetable freshness keeping device appropriately controls temperature, pressure, humidity, O.sub.2 /CO.sub.2 and quantity of anion in the vegetable store room in accordance with sensing result of the sensor, thus to keep freshness of the vegetables for a long time. In order to produce the gas sensor, a mixture of a metal catalyst and a sensing material is calcinated and mixed with an organic vehicle, thus to form a paste. The paste is coated on an electrode surface of an alumina substrate, thus to form a sensing layer on the substrate. The substrate, after being sintered, is subjected to a wire bonding and to a packaging, thus to form the gas sensor.

摘要翻译： 公开了一种蔬菜新鲜度传感器生产方法和使用传感器的保鲜装置。 传感器感测蔬菜产生的气体，因此不仅能感觉蔬菜的新鲜度，还能感知蔬菜的腐烂状态。 蔬菜保鲜装置根据传感器的检测结果适当地控制蔬菜储藏室的温度，压力，湿度，O2 / CO2和阴离子量，从而长时间保持蔬菜的新鲜度。 为了生产气体传感器，将金属催化剂和感测材料的混合物煅烧并与有机载体混合，从而形成糊状物。 将该糊剂涂覆在氧化铝基板的电极表面上，从而在基板上形成感测层。 将烧结后的基板进行引线接合和封装，从而形成气体传感器。