公开(公告)号：US20070114883A1

公开(公告)日：2007-05-24

申请号：US11556155

申请日：2006-11-02

申请人： Dongmin Chen ,  Fulin Xiong ,  William Worley

发明人： Dongmin Chen ,  Fulin Xiong ,  William Worley

IPC分类号： H01L41/00

CPC分类号： B81C1/0096 ,  B81B3/0005 ,  B81B2201/042 ,  B81C2201/112 ,  B82Y30/00

摘要： Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments of the present invention also generally include a device, and a method of forming a device, that has one or more surfaces or regions that have a volume of lubricant disposed thereon that acts as a ready supply of “fresh” lubricant to prevent stiction occurring between interacting components found within the device. In one aspect, components within the volume of lubricant form a gas or vapor phase that reduces the chances of stiction-related failure in the formed device. In one example, aspects of this invention may be especially useful for fabricating and using micromechanical devices, such as MEMS devices, NEMS devices, or other similar thermal or fluidic devices.

公开(公告)号：US20070117244A1

公开(公告)日：2007-05-24

申请号：US11556145

申请日：2006-11-02

申请人： Dongmin Chen ,  Fulin Xiong ,  William Worley

发明人： Dongmin Chen ,  Fulin Xiong ,  William Worley

IPC分类号： H01L21/00 ,  H01L29/82

CPC分类号： B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00

摘要： Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments of the present invention also generally include a device, and a method of forming a device, that has one or more surfaces or regions that have a volume of lubricant disposed thereon that acts as a ready supply of “fresh” lubricant to prevent stiction occurring between interacting components found within the device. In one aspect, components within the volume of lubricant form a gas or vapor phase that reduces the chances of stiction-related failure in the formed device. In one example, aspects of this invention may be especially useful for fabricating and using micromechanical devices, such as MEMS devices, NEMS devices, or other similar thermal or fluidic devices.

摘要翻译： 本发明的实施例总体上涉及一种由于存在降低在机电装置中的各种运动部件之间出现静电的可能性的润滑剂而具有改善的使用寿命的装置。 本发明的实施例还通常包括一种装置和一种形成装置的方法，其具有一个或多个表面或区域，其具有设置在其上的润滑剂体积，其用作即将供应的“新鲜”润滑剂以防止发生粘连 在设备内发现的互动组件之间。 在一个方面，润滑剂体积内的组分形成气体或气相，其降低了所形成的装置中与静电相关的故障的机会。 在一个示例中，本发明的方面对于制造和使用诸如MEMS器件，NEMS器件或其它类似的热或流体器件的微机械器件可能特别有用。

公开(公告)号：US20070115530A1

公开(公告)日：2007-05-24

申请号：US11315920

申请日：2005-12-22

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/00

CPC分类号： G02B1/14 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B21/32 ,  G02B27/0006

摘要： Embodiments of the present invention generally relate to a process of forming a device that has an improved usable lifetime due to the addition of a gas-phase lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

摘要翻译： 本发明的实施方案一般涉及一种形成装置的方法，该装置由于添加气相润滑剂而具有改善的使用寿命，所述气相润滑剂降低了在机电装置中各种运动部件之间出现静电的可能性。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，气相润滑剂比传统的固体或液体润滑剂在防止与静脉相关的装置故障方面更可靠。

公开(公告)号：US20070114882A1

公开(公告)日：2007-05-24

申请号：US11315607

申请日：2005-12-22

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/08 ,  G02B26/00 ,  H02N1/00

CPC分类号： G02B26/0833 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B82Y30/00 ,  H02N1/006

摘要： One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

摘要翻译： 微机械装置的一个实施例包括第一接触表面，具有第二接触表面的可移动部件，其中第二接触表面在器件操作期间与第一接触表面相互作用，以及气相润滑剂，其设置在第一接触表面和 第二接触表面，其中气相润滑剂适于减小第一接触表面和第二接触表面之间的静摩擦力。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，气相润滑剂比传统的固体或液体润滑剂在防止与静脉相关的装置故障方面更可靠。

公开(公告)号：US07471439B2

公开(公告)日：2008-12-30

申请号：US11315920

申请日：2005-12-22

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/00 ,  G02B26/08 ,  G02B26/02 ,  G02F1/29 ,  G02F1/00

CPC分类号： G02B1/14 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B21/32 ,  G02B27/0006

摘要： Embodiments of the present invention generally relate to a process of forming a device that has an improved usable lifetime due to the addition of a gas-phase lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

摘要翻译： 本发明的实施方案一般涉及一种形成装置的方法，该装置由于添加气相润滑剂而具有改善的使用寿命，所述气相润滑剂降低了在机电装置中各种运动部件之间出现静电的可能性。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，气相润滑剂比传统的固体或液体润滑剂在防止与静脉相关的装置故障方面更可靠。

公开(公告)号：US20070115532A1

公开(公告)日：2007-05-24

申请号：US11556154

申请日：2006-11-02

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0005 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00

摘要： Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments of the present invention also generally include a device, and a method of forming a device, that has one or more surfaces or regions that have a volume of lubricant disposed thereon that acts as a ready supply of “fresh” lubricant to prevent stiction occurring between interacting components found within the device. In one aspect, components within the volume of lubricant form a gas or vapor phase that reduces the chances of stiction-related failure in the formed device. In one example, aspects of this invention may be especially useful for fabricating and using micromechanical devices, such as MEMS devices, NEMS devices, or other similar thermal or fluidic devices.

摘要翻译： 本发明的实施例总体上涉及一种由于存在降低在机电装置中的各种运动部件之间出现静电的可能性的润滑剂而具有改善的使用寿命的装置。 本发明的实施例还通常包括一种装置和一种形成装置的方法，其具有一个或多个表面或区域，其具有设置在其上的润滑剂体积，其用作即将供应的“新鲜”润滑剂以防止发生粘连 在设备内发现的互动组件之间。 在一个方面，润滑剂体积内的组分形成气体或气相，其降低了所形成的装置中与静电相关的故障的机会。 在一个示例中，本发明的方面对于制造和使用诸如MEMS器件，NEMS器件或其它类似的热或流体器件的微机械器件可能特别有用。

公开(公告)号：US20090284823A1

公开(公告)日：2009-11-19

申请号：US12108030

申请日：2008-04-23

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/00 ,  H02N2/00

CPC分类号： G02B1/14 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B21/32 ,  G02B27/0006

摘要： One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, and a coating of liquid or solid lubricant on at least one of the contact surfaces, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant is disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to increase the usable lifetime of the liquid or solid lubricant coating on the contact surfaces. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant used with conventional solid or liquid lubricants is more reliable than solid or liquid lubricants used alone in preventing stiction-related device failures.

摘要翻译： 微机械装置的一个实施例包括第一接触表面，具有第二接触表面的可移动部件和在至少一个接触表面上的液体或固体润滑剂涂层，其中第二接触表面在第一接触表面与第一接触表面相互作用 装置操作，并且气相润滑剂设置在第一接触表面和第二接触表面之间，其中气相润滑剂适于增加接触表面上的液体或固体润滑剂涂层的使用寿命。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，与常规固体或液体润滑剂一起使用的气相润滑剂比单独使用的固体或液体润滑剂更可靠，以防止与静脉相关的装置故障。

公开(公告)号：US07463404B2

公开(公告)日：2008-12-09

申请号：US11556154

申请日：2006-11-02

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/00

CPC分类号： G02B26/0841 ,  B81B3/0005 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00

摘要： Embodiments of the present invention generally relate to a device that has an improved usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction occurring between the various moving parts in an electromechanical device. Embodiments of the present invention also generally include a device, and a method of forming a device, that has one or more surfaces or regions that have a volume of lubricant disposed thereon that acts as a ready supply of “fresh” lubricant to prevent stiction occurring between interacting components found within the device. In one aspect, components within the volume of lubricant form a gas or vapor phase that reduces the chances of stiction-related failure in the formed device. In one example, aspects of this invention may be especially useful for fabricating and using micromechanical devices, such as MEMS devices, NEMS devices, or other similar thermal or fluidic devices.

摘要翻译： 本发明的实施例总体上涉及一种由于存在降低在机电装置中的各种运动部件之间出现静电的可能性的润滑剂而具有改善的使用寿命的装置。 本发明的实施例还通常包括一种装置和一种形成装置的方法，其具有一个或多个表面或区域，其具有设置在其上的润滑剂体积，其用作即将供应的“新鲜”润滑剂以防止发生粘连 在设备内发现的互动组件之间。 在一个方面，润滑剂体积内的组分形成气体或气相，其降低了所形成的装置中与静电相关的故障的机会。 在一个示例中，本发明的方面对于制造和使用诸如MEMS器件，NEMS器件或其它类似的热或流体器件的微机械器件可能特别有用。

公开(公告)号：US07372615B2

公开(公告)日：2008-05-13

申请号：US11389423

申请日：2006-03-24

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/00 ,  G22B26/08 ,  G02F1/29

CPC分类号： G02B1/14 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B21/32 ,  G02B27/0006

摘要： One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

摘要翻译： 微机械装置的一个实施例包括第一接触表面，具有第二接触表面的可移动部件，其中第二接触表面在器件操作期间与第一接触表面相互作用，以及设置在第一接触表面和第二接触表面之间的气相润滑剂 第二接触表面，其中气相润滑剂适于减小第一接触表面和第二接触表面之间的静摩擦力。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，气相润滑剂比传统的固体或液体润滑剂在防止与静脉相关的装置故障方面更可靠。

公开(公告)号：US20070115531A1

公开(公告)日：2007-05-24

申请号：US11389423

申请日：2006-03-24

申请人： Dongmin Chen ,  Fulin Xiong

发明人： Dongmin Chen ,  Fulin Xiong

IPC分类号： G02B26/00

CPC分类号： G02B1/14 ,  B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B21/32 ,  G02B27/0006

摘要： One embodiment of an micromechanical device includes a first contact surface, a moveable component having a second contact surface, where the second contact surface interacts with the first contact surface during device operation, and a gas-phase lubricant disposed between the first contact surface and the second contact surface, where the gas-phase lubricant is adapted to reduce stiction-related forces between the first contact surface and the second contact surface. One advantage of the disclosed device is that a gas-phase lubricant has a high diffusion rate and, therefore, is self-replenishing, meaning that it can quickly move back into a contact region after being physically displaced from the region by the contacting surfaces of the device during operation. Consequently, the gas-phase lubricant is more reliable than conventional solid or liquid lubricants in preventing stiction-related device failures.

摘要翻译： 微机械装置的一个实施例包括第一接触表面，具有第二接触表面的可移动部件，其中第二接触表面在器件操作期间与第一接触表面相互作用，以及气相润滑剂，其设置在第一接触表面和 第二接触表面，其中气相润滑剂适于减小第一接触表面和第二接触表面之间的静摩擦力。 所公开的装置的一个优点是气相润滑剂具有高扩散速率，因此是自补充的，这意味着它可以在通过接触区域的接触表面物理移位之后迅速地移回接触区域 该设备在运行期间。 因此，气相润滑剂比传统的固体或液体润滑剂在防止与静脉相关的装置故障方面更可靠。