公开(公告)号：US11295935B2

公开(公告)日：2022-04-05

申请号：US15572319

申请日：2016-05-09

Applicant: EBARA CORPORATION

Inventor： Tomonori Ohashi ,  Toshimitsu Barada ,  Hironobu Yamasaki ,  Misako Kudo ,  Ichiju Sato

IPC: H01H47/00 ,  H01J37/32 ,  C23C14/35 ,  H01L21/3065 ,  C23C14/34 ,  G01R19/165 ,  H01F7/06 ,  H01F7/20 ,  H01F13/00 ,  H01F27/22

Abstract: The electromagnet device of the present invention comprises: a yoke having an annular groove in a front surface thereof; an annular coil provided in the groove; and an epoxy resin provided on an outer surface of the coil configured to secure the coil to the yoke, wherein there is a clearance between an outer circumferential surface of the groove in the yoke and the epoxy resin provided on an radially outer side of the coil.