公开(公告)号：US11731241B2

公开(公告)日：2023-08-22

申请号：US16535325

申请日：2019-08-08

Applicant: Ebara Corporation

Inventor： Ichiju Satoh ,  Toshimitsu Barada

IPC: B24B53/017 ,  F16C32/04 ,  B24B37/10 ,  B24B37/005

CPC classification number: B24B53/017 ,  B24B37/005 ,  B24B37/10 ,  F16C32/044

Abstract: An advanced substrate rotation device is provided. A substrate rotation device is disclosed. The substrate rotation device includes an outer cylinder, an inner cylinder positioned inside the outer cylinder, a motor for rotating the inner cylinder, a magnetic bearing for magnetically levitating the inner cylinder, and a substrate holder disposed on the inner cylinder. The motor is a radial motor including a motor stator mounted on the outer cylinder, and a motor rotor mounted on the inner cylinder. The magnetic bearing is a radial magnetic bearing including a magnetic bearing stator mounted on the outer cylinder, and a magnetic bearing rotor mounted on the inner cylinder. The magnetic bearing is configured to magnetically levitate the inner cylinder with an attractive force between the magnetic bearing stator and the magnetic bearing rotor.

公开(公告)号：US09388854B2

公开(公告)日：2016-07-12

申请号：US14101248

申请日：2013-12-09

Applicant: EBARA CORPORATION

Inventor： Toshimitsu Barada

IPC: F16C32/04

CPC classification number: F16C32/0451 ,  F16C32/0442 ,  F16C32/0446 ,  F16C2233/00 ,  F16C2360/45

Abstract: A magnetic bearing apparatus for supporting a rotational shaft includes a magnetic bearing, a rotation sensor, a controller which controls an electric current flown to an electromagnet, and at least one vibration sensor. The controller controls the electric current flown to the electromagnet as follows: in a first control mode, a first electric current is flown to the electromagnet for levitating and supporting the rotational shaft; and in a second control mode, a second electric current is flown to the electromagnet in place of the first electric current at a first periodic timing which is detected by the rotation sensor so that vibration is reduced to a lower level than a first vibration value detected in the first control mode in at least one of setting location of the at least one vibration sensor.

Abstract translation: 用于支撑旋转轴的磁性轴承装置包括磁轴承，旋转传感器，控制流向电磁体的电流的控制器和至少一个振动传感器。 控制器控制流向电磁铁的电流如下：在第一控制模式中，第一电流流到电磁体，用于悬浮和支撑旋转轴; 并且在第二控制模式中，代替第一电流在第一周期性定时将第二电流传送到电磁体，该第一电流由旋转传感器检测，使得振动降低到比检测到的第一振动值更低的水平 在所述第一控制模式中，在所述至少一个振动传感器的设置位置中的至少一个中。

公开(公告)号：US20220186686A1

公开(公告)日：2022-06-16

申请号：US17443000

申请日：2020-03-10

Applicant: EBARA CORPORATION

Inventor： Shuichiro Honda ,  Kozo Matake ,  Hiroyoshi Watanabe ,  Toshimitsu Barada ,  Hayato Ikeda

IPC: F02K9/46 ,  F04D13/06 ,  F04D29/58

Abstract: Provided is a canned motor in which vaporization of the handling liquid is reduced in a case where a rotor rotates at high speed. A canned motor 10 includes a stator 18 disposed in a stator chamber 26, a rotor 14 disposed in a rotor chamber 12, and a stator can 7 enclosing the rotor 14. Furthermore, the canned motor 10 includes a stator chamber inlet portion 43 configured such that a cooling liquid for cooling the stator 18 flows into the stator chamber 26, and a stator chamber outlet portion 44 configured such that the cooling liquid flows out from the stator chamber 26.

公开(公告)号：US10995765B2

公开(公告)日：2021-05-04

申请号：US14928846

申请日：2015-10-30

Applicant: EBARA CORPORATION

Inventor： Ichiju Sato ,  Hiroshi Sobukawa ,  Toshimitsu Barada ,  Tomonori Ohashi ,  Satoshi Mori

IPC: F04D29/22 ,  F04D13/06 ,  F04D29/048

Abstract: A magnetic levitated pump that does not cause pulsation of a pumped liquid and can suppress the generation of particles, which are liable to be produced by contact of a sliding part, is disclosed. The magnetic levitated pump for magnetically levitating an impeller housed in a pump casing includes a motor configured to rotate the impeller, and an electromagnet configured to magnetically support the impeller. The motor and the electromagnet are arranged so as to face each other across the impeller, and the motor is arranged on the opposite side of a suction port of the pump casing.

公开(公告)号：US11295935B2

公开(公告)日：2022-04-05

申请号：US15572319

申请日：2016-05-09

Applicant: EBARA CORPORATION

Inventor： Tomonori Ohashi ,  Toshimitsu Barada ,  Hironobu Yamasaki ,  Misako Kudo ,  Ichiju Sato

IPC: H01H47/00 ,  H01J37/32 ,  C23C14/35 ,  H01L21/3065 ,  C23C14/34 ,  G01R19/165 ,  H01F7/06 ,  H01F7/20 ,  H01F13/00 ,  H01F27/22

Abstract: The electromagnet device of the present invention comprises: a yoke having an annular groove in a front surface thereof; an annular coil provided in the groove; and an epoxy resin provided on an outer surface of the coil configured to secure the coil to the yoke, wherein there is a clearance between an outer circumferential surface of the groove in the yoke and the epoxy resin provided on an radially outer side of the coil.

公开(公告)号：US20200047310A1

公开(公告)日：2020-02-13

申请号：US16535325

申请日：2019-08-08

Applicant: Ebara Corporation

Inventor： Ichiju Satoh ,  Toshimitsu Barada

IPC: B24B53/017 ,  B24B37/005 ,  B24B37/10 ,  F16C32/04

Abstract: An advanced substrate rotation device is provided. A substrate rotation device is disclosed. The substrate rotation device includes an outer cylinder, an inner cylinder positioned inside the outer cylinder, a motor for rotating the inner cylinder, a magnetic bearing for magnetically levitating the inner cylinder, and a substrate holder disposed on the inner cylinder. The motor is a radial motor including a motor stator mounted on the outer cylinder, and a motor rotor mounted on the inner cylinder. The magnetic bearing is a radial magnetic bearing including a magnetic bearing stator mounted on the outer cylinder, and a magnetic bearing rotor mounted on the inner cylinder. The magnetic bearing is configured to magnetically levitate the inner cylinder with an attractive force between the magnetic bearing stator and the magnetic bearing rotor.