公开(公告)号：US20160365415A1

公开(公告)日：2016-12-15

申请号：US15176127

申请日：2016-06-07

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Se Rin PARK ,  Choon Gi CHOI

IPC: H01L29/16 ,  H01L21/02 ,  H01L29/66 ,  H01L29/786 ,  H01L29/417

CPC classification number: H01L29/1606 ,  H01L21/02444 ,  H01L21/02491 ,  H01L21/02502 ,  H01L21/02527 ,  H01L21/0262 ,  H01L29/41733 ,  H01L29/66045 ,  H01L29/78684 ,  H01L29/78696

Abstract: A graphene device is manufactured by forming on a substrate a pattern with a material that contains carbon, and growing graphene on the substrate where the pattern is formed.

Abstract translation: 通过在衬底上形成含有碳的材料的图案和在其上形成图案的衬底上生长石墨烯来制造石墨烯器件。