公开(公告)号：US20240196506A1

公开(公告)日：2024-06-13

申请号：US18077443

申请日：2022-12-08

Applicant: Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

Inventor： Frederick Marvin Niell, III ,  Donald K. Smith ,  Matthew M. Besen ,  Stephen F. Horne ,  David B. Reisman ,  Daniel J. Arcaro ,  Michael J. Roderick

IPC: H05H1/10

CPC classification number: H05H1/10

Abstract: A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.

公开(公告)号：US11164713B2

公开(公告)日：2021-11-02

申请号：US16836187

申请日：2020-03-31

Applicant: ENERGETIQ TECHNOLOGY, INC. ,  HAMAMATSU PHOTONICS K.K.

Inventor： Matthew M. Besen ,  Ryosuke Yabushita

IPC: H01J35/10 ,  H01J35/12 ,  G21K5/02 ,  H01J29/48 ,  H01J35/14

Abstract: An X-ray generation apparatus includes an electron gun configured to emit an electron beam, a rotary anode unit having a target generating an X-ray by receiving the electron beam and configured to rotate the target, a magnetic lens having a coil configured to generate a magnetic force acting on the electron beam between the electron gun and the target, and a wall portion disposed between the target and the coil so as to face the target. The wall portion is formed with an electron passage hole through which the electron beam passes and a flow path configured to allow a coolant to flow.

公开(公告)号：US12156322B2

公开(公告)日：2024-11-26

申请号：US18077443

申请日：2022-12-08

Applicant: Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

Inventor： Frederick Marvin Niell, III ,  Donald K. Smith ,  Matthew M. Besen ,  Stephen F. Horne ,  David B. Reisman ,  Daniel J. Arcaro ,  Michael J. Roderick

IPC: H05H1/00 ,  H01J37/32 ,  H05H1/10

Abstract: A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.

公开(公告)号：US11183356B2

公开(公告)日：2021-11-23

申请号：US16836137

申请日：2020-03-31

Applicant: ENERGETIQ TECHNOLOGY, INC. ,  HAMAMATSU PHOTONICS K.K.

Inventor： Matthew M. Besen ,  Ryosuke Yabushita

IPC: H01J35/10

Abstract: A rotary anode unit includes a target formed of a first metal material and a target support body formed of a second metal material, formed in a flat plate shape, and having first and second surfaces. A thermal conductivity of the second metal material is higher than a thermal conductivity of the first metal material. A first recessed portion is formed in the first surface at the outer part of the target support body. The target is disposed in the first recessed portion. A second recessed portion configured to define a flow path for allowing a coolant to flow is formed in the second surface at the inner part of the target support body. A thickness of a first region where the first recessed portion is formed is larger than a thickness of a second region where the second recessed portion is formed.

公开(公告)号：US20250056705A1

公开(公告)日：2025-02-13

申请号：US18928527

申请日：2024-10-28

Applicant: Hamamatsu Photonics K.K. ,  Energetiq Technology, Inc.

Inventor： Frederick Marvin Niell, III ,  Donald K. Smith ,  Matthew M. Besen ,  Stephen F. Horne ,  David B. Reisman ,  Daniel J. Arcaro ,  Michael J. Roderick

IPC: H05H1/10

Abstract: A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.