公开(公告)号：US20230182082A1

公开(公告)日：2023-06-15

申请号：US18079745

申请日：2022-12-12

Applicant: ENTEGRIS, INC.

Inventor： Barry Lee Gregerson ,  Adam Lane Baker

IPC: B01D63/06

CPC classification number: B01D63/06 ,  B01D2313/16 ,  B01D2313/19 ,  B01D2313/21 ,  B01D2313/086 ,  B01D2313/201 ,  B01D2315/08

Abstract: A filter includes a housing having an interior space, in which the housing has at least one opening end. The filter further includes a membrane disposed within the housing that has a length that extends along a length direction of the housing, and a baffle provided at least in the interior space of the housing. The baffle includes at least two baffle partitions that extend along at least a portion of the length of the membrane to divide the interior space of the housing into at least a first portion and a second portion so that when a fluid is supplied to the filter, the fluid is directed to first flow in the first portion and then to the second portion.