公开(公告)号：US20180333672A1

公开(公告)日：2018-11-22

申请号：US15980176

申请日：2018-05-15

Applicant: Entegris, Inc.

Inventor： Tyler Moulton ,  James Britto

IPC: B01D53/12

CPC classification number: B01D53/12 ,  B01D2253/102 ,  B01D2257/708

Abstract: Described are filter products and methods of using filter products, wherein the filter products include multiple cells, each cell containing an individual circulating fluidized beds during use.

公开(公告)号：US11260336B2

公开(公告)日：2022-03-01

申请号：US16694238

申请日：2019-11-25

Applicant: ENTEGRIS, INC.

Inventor： Tyler Moulton ,  James Britto ,  Thomas Leblanc ,  John C. Gaudreau

IPC: B01D47/00 ,  B01D47/06 ,  B01D47/10 ,  B01D47/14 ,  B01D53/18 ,  B01D53/75 ,  B01D53/78

Abstract: An active wet scrubbing filtration system for decontamination of a gas stream comprises components including one or more of: a) a vortexing apparatus which induces a contaminant-bearing gas into a helical flow; b) an initial scrubbing fluid spray section configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; c) an absorption structure; d) a condenser; and e) first and second scrubbing fluid decontamination systems that may be engaged or disengaged independently of each other. In some embodiments, the worksite comprises a clean room or one or more a semiconductor processing tools, which may include photolithography tools or photolithography tool clusters. In some embodiments, the active wet scrubbing filtration system may be useful in cleaning and recycling air or other process gasses for use in clean rooms or semiconductor processing tools.

公开(公告)号：US11123681B2

公开(公告)日：2021-09-21

申请号：US15980176

申请日：2018-05-15

Applicant: Entegris, Inc.

Inventor： Tyler Moulton ,  James Britto

IPC: B01D53/02 ,  B01D53/12

Abstract: Described are filter products and methods of using filter products, wherein the filter products include multiple cells, each cell containing an individual circulating fluidized beds during use.