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公开(公告)号：US11260336B2
公开(公告)日：2022-03-01
申请号：US16694238
申请日：2019-11-25
Applicant: ENTEGRIS, INC.
Inventor： Tyler Moulton , James Britto , Thomas Leblanc , John C. Gaudreau
Abstract: An active wet scrubbing filtration system for decontamination of a gas stream comprises components including one or more of: a) a vortexing apparatus which induces a contaminant-bearing gas into a helical flow; b) an initial scrubbing fluid spray section configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; c) an absorption structure; d) a condenser; and e) first and second scrubbing fluid decontamination systems that may be engaged or disengaged independently of each other. In some embodiments, the worksite comprises a clean room or one or more a semiconductor processing tools, which may include photolithography tools or photolithography tool clusters. In some embodiments, the active wet scrubbing filtration system may be useful in cleaning and recycling air or other process gasses for use in clean rooms or semiconductor processing tools.
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2.发明申请Liquid-Free Sample Traps And Analytical Method For Measuring Trace Level Acidic And Basic AMC 审中-公开无液样品捕集阱和测量痕量酸性和碱性AMC的分析方法公开(公告)号：US20160216241A1
公开(公告)日：2016-07-28
申请号：US14916845
申请日：2014-09-05
Applicant: ENTEGRIS, INC.
Inventor： Tyler Moulton , Jürgen M. Lobert , John C. Gaudreau , Thomas Leblanc
IPC: G01N30/96
CPC classification number: G01N30/96 , G01N1/2205 , G01N1/2214 , G01N1/405 , G01N2030/025
Abstract: Described herein are liquid-free traps for trace levels of an acidic or basic airborne molecular contaminant in a gas. In one version of the invention described herein, the liquid-free trap comprises a housing, comprising an inlet and an outlet; a flow path between the inlet and the outlet; and a rigid sintered hydrophilic material situated in the flow path between the inlet and the outlet and sealed in the housing. The rigid sintered hydrophilic material is functionalized with from about 0.05 molar milliequivalents to about 10 molar milliequivalents of a basic species for trapping an acidic airborne molecular contaminant in the gas or from about 0.05 molar milliequivalents to about 10 molar milliequivalents of an acidic species for trapping a basic airborne molecular contaminant in the gas. Methods of using the liquid-free traps to detect or measure trace levels of an acidic or basic airborne molecular contaminant are also described.
Abstract translation: 本文描述的是用于气体中痕量水平的酸性或碱性空气传播的分子污染物的无液阱。 在这里描述的本发明的一个版本中，无液体陷阱包括壳体，包括入口和出口; 入口和出口之间的流动路径; 以及位于入口和出口之间的流动路径中并密封在壳体中的刚性烧结亲水材料。 刚性烧结的亲水材料用约0.05摩尔毫当量至约10摩尔毫当量的碱性物质进行功能化，用于捕获气体中酸性空气传播的分子污染物或约0.05摩尔毫当量至约10摩尔毫当量的酸性物质，用于捕获 气体中基本的空气传播分子污染物。 还描述了使用无液体捕集器来检测或测量痕量的酸性或碱性空气传播的分子污染物的方法。
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3.发明授权公开(公告)号：US10031114B2
公开(公告)日：2018-07-24
申请号：US14916845
申请日：2014-09-05
Applicant: Entegris, Inc.
Inventor： Tyler Moulton , Jürgen M. Lobert , John C. Gaudreau , Thomas Leblanc
CPC classification number: G01N30/96 , G01N1/2205 , G01N1/2214 , G01N1/405 , G01N2030/025
Abstract: Described herein are liquid-free traps for trace levels of an acidic or basic airborne molecular contaminant in a gas. In one version of the invention described herein, the liquid-free trap comprises a housing, comprising an inlet and an outlet; a flow path between the inlet and the outlet; and a rigid sintered hydrophilic material situated in the flow path between the inlet and the outlet and sealed in the housing. The rigid sintered hydrophilic material is functionalized with from about 0.05 molar milliequivalents to about 10 molar milliequivalents of a basic species for trapping an acidic airborne molecular contaminant in the gas or from about 0.05 molar milliequivalents to about 10 molar milliequivalents of an acidic species for trapping a basic airborne molecular contaminant in the gas. Methods of using the liquid-free traps to detect or measure trace levels of an acidic or basic airborne molecular contaminant are also described.
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