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    Liquid-free sample traps and analytical method for measuring trace level acidic and basic AMC
    1.
    发明授权
    Liquid-free sample traps and analytical method for measuring trace level acidic and basic AMC 有权

    公开(公告)号：US10031114B2

    公开(公告)日：2018-07-24

    申请号：US14916845

    申请日：2014-09-05

    Applicant: Entegris, Inc.

    Inventor： Tyler Moulton ,  Jürgen M. Lobert ,  John C. Gaudreau ,  Thomas Leblanc

    IPC: G01N7/00 ,  G01N30/96 ,  G01N1/22 ,  G01N1/40 ,  G01N30/02

    CPC classification number: G01N30/96 ,  G01N1/2205 ,  G01N1/2214 ,  G01N1/405 ,  G01N2030/025

    Abstract: Described herein are liquid-free traps for trace levels of an acidic or basic airborne molecular contaminant in a gas. In one version of the invention described herein, the liquid-free trap comprises a housing, comprising an inlet and an outlet; a flow path between the inlet and the outlet; and a rigid sintered hydrophilic material situated in the flow path between the inlet and the outlet and sealed in the housing. The rigid sintered hydrophilic material is functionalized with from about 0.05 molar milliequivalents to about 10 molar milliequivalents of a basic species for trapping an acidic airborne molecular contaminant in the gas or from about 0.05 molar milliequivalents to about 10 molar milliequivalents of an acidic species for trapping a basic airborne molecular contaminant in the gas. Methods of using the liquid-free traps to detect or measure trace levels of an acidic or basic airborne molecular contaminant are also described.

    Filter life indicator media and holder
    3.
    发明授权
    Filter life indicator media and holder 有权

    公开(公告)号：US11679385B2

    公开(公告)日：2023-06-20

    申请号：US17124375

    申请日：2020-12-16

    Applicant: ENTEGRIS, INC.

    Inventor： John C. Gaudreau ,  Evan Warniers ,  Edward J. Washington

    IPC: B01D46/00 ,  G01N15/08 ,  B01L3/00

    CPC classification number: B01L3/50 ,  B01D46/0086 ,  G01N15/08 ,  B01D2273/18 ,  B01L2300/043 ,  G01N2015/084

    Abstract: A media sample holder includes a base and a plurality of retention assemblies including retaining tabs and opposing flexible release lever arms, configured to allow attachment of the base to an attachment adapter. The media sample holder can attach a media sample on or near a filter. The media sample holder held in the media sample holder can have a different removal efficiency curve than a removal efficiency curve of the filter. The media sample can be placed at or near the filter for a period of time, then tested to determine the status and/or life of the filter based on the relationship between the remaining life, exposure, or removal efficiency of the filter and the exposure or removal efficiency of the tested media sample.

    Active wet scrubbing filtration system
    4.
    发明授权
    Active wet scrubbing filtration system 有权

    公开(公告)号：US11260336B2

    公开(公告)日：2022-03-01

    申请号：US16694238

    申请日：2019-11-25

    Applicant: ENTEGRIS, INC.

    Inventor： Tyler Moulton ,  James Britto ,  Thomas Leblanc ,  John C. Gaudreau

    IPC: B01D47/00 ,  B01D47/06 ,  B01D47/10 ,  B01D47/14 ,  B01D53/18 ,  B01D53/75 ,  B01D53/78

    Abstract: An active wet scrubbing filtration system for decontamination of a gas stream comprises components including one or more of: a) a vortexing apparatus which induces a contaminant-bearing gas into a helical flow; b) an initial scrubbing fluid spray section configured so as to project a spray of scrubbing fluid into the contaminant-bearing gas stream; c) an absorption structure; d) a condenser; and e) first and second scrubbing fluid decontamination systems that may be engaged or disengaged independently of each other. In some embodiments, the worksite comprises a clean room or one or more a semiconductor processing tools, which may include photolithography tools or photolithography tool clusters. In some embodiments, the active wet scrubbing filtration system may be useful in cleaning and recycling air or other process gasses for use in clean rooms or semiconductor processing tools.

    System and method for removing airborne molecular contaminants from gas streams
    6.
    发明授权
    System and method for removing airborne molecular contaminants from gas streams 有权

    公开(公告)号：US11020704B2

    公开(公告)日：2021-06-01

    申请号：US15126909

    申请日：2015-03-19

    Applicant: Entegris, Inc.

    Inventor： Marc Venet ,  John C. Gaudreau ,  Jürgen M Lobert

    IPC: B01D53/34 ,  B01D53/72 ,  B01D53/82 ,  B01D53/04 ,  B01D53/75 ,  G03F7/20 ,  B01D46/00 ,  B01D46/44

    Abstract: System and method for removing molecular contaminants from an air stream are disclosed. The system includes first, second and third filter. The first filter removes organic contaminants from an air stream passing through the first filter. The second filter is downstream of the first filter, is physically and chemically exchangeable with the first filter and removes organic contaminants from the air stream output of the first filter. The third filter, downstream of the second filter, is not exchangeable with the first filter or the second filter. The first position filter can be replaced by the second filter in the second position when the first filter in the first position becomes depleted as detected. A new filter in the second filter position is inserted. Replacing the depleted first filter with the second downstream filter reduces costs and waste while inserting the new filter in the second position ensures removing organic contaminants.

    Liquid-Free Sample Traps And Analytical Method For Measuring Trace Level Acidic And Basic AMC
    8.
    发明申请
    Liquid-Free Sample Traps And Analytical Method For Measuring Trace Level Acidic And Basic AMC 审中-公开
    无液样品捕集阱和测量痕量酸性和碱性AMC的分析方法

    公开(公告)号：US20160216241A1

    公开(公告)日：2016-07-28

    申请号：US14916845

    申请日：2014-09-05

    Applicant: ENTEGRIS, INC.

    Inventor： Tyler Moulton ,  Jürgen M. Lobert ,  John C. Gaudreau ,  Thomas Leblanc

    IPC: G01N30/96

    CPC classification number: G01N30/96 ,  G01N1/2205 ,  G01N1/2214 ,  G01N1/405 ,  G01N2030/025

    Abstract: Described herein are liquid-free traps for trace levels of an acidic or basic airborne molecular contaminant in a gas. In one version of the invention described herein, the liquid-free trap comprises a housing, comprising an inlet and an outlet; a flow path between the inlet and the outlet; and a rigid sintered hydrophilic material situated in the flow path between the inlet and the outlet and sealed in the housing. The rigid sintered hydrophilic material is functionalized with from about 0.05 molar milliequivalents to about 10 molar milliequivalents of a basic species for trapping an acidic airborne molecular contaminant in the gas or from about 0.05 molar milliequivalents to about 10 molar milliequivalents of an acidic species for trapping a basic airborne molecular contaminant in the gas. Methods of using the liquid-free traps to detect or measure trace levels of an acidic or basic airborne molecular contaminant are also described.

    Abstract translation: 本文描述的是用于气体中痕量水平的酸性或碱性空气传播的分子污染物的无液阱。 在这里描述的本发明的一个版本中，无液体陷阱包括壳体，包括入口和出口; 入口和出口之间的流动路径; 以及位于入口和出口之间的流动路径中并密封在壳体中的刚性烧结亲水材料。 刚性烧结的亲水材料用约0.05摩尔毫当量至约10摩尔毫当量的碱性物质进行功能化，用于捕获气体中酸性空气传播的分子污染物或约0.05摩尔毫当量至约10摩尔毫当量的酸性物质，用于捕获 气体中基本的空气传播分子污染物。 还描述了使用无液体捕集器来检测或测量痕量的酸性或碱性空气传播的分子污染物的方法。

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