公开(公告)号：US20220298639A1

公开(公告)日：2022-09-22

申请号：US17696101

申请日：2022-03-16

Applicant: ENTEGRIS, INC.

Inventor： Nilesh Gunda ,  Jayasri Narayanamoorthy ,  Carlo Waldfried

IPC: C23C16/455 ,  C23C16/40 ,  C23C14/08 ,  H01L21/02 ,  C23C16/56

Abstract: Described are substrates that include high aspect ratio surfaces and non-high aspect ratio surfaces, at least two coatings, one coating at high aspect ratio surfaces and a second coating at non-high aspect ratio surfaces, and having fluorinated outer surfaces; methods of preparing these coatings; and substrates, surfaces, equipment, and components of equipment that include the coatings.

公开(公告)号：US12270104B2

公开(公告)日：2025-04-08

申请号：US17696101

申请日：2022-03-16

Applicant: ENTEGRIS, INC.

Inventor： Nilesh Gunda ,  Jayasri Narayanamoorthy ,  Carlo Waldfried

IPC: C23C16/56 ,  C23C14/08 ,  C23C16/40 ,  C23C16/455 ,  H01L21/02

Abstract: Described are substrates that include high aspect ratio surfaces and non-high aspect ratio surfaces, at least two coatings, one coating at high aspect ratio surfaces and a second coating at non-high aspect ratio surfaces, and having fluorinated outer surfaces; methods of preparing these coatings; and substrates, surfaces, equipment, and components of equipment that include the coatings.