公开(公告)号：US20230079446A1

公开(公告)日：2023-03-16

申请号：US17945594

申请日：2022-09-15

Applicant: ENTEGRIS, INC.

Inventor： Rocky Dean Gipson ,  Ed A. Sturm ,  Subhash Guddati ,  Thines Kumar Perumal ,  Montray Leavy

IPC: B01J20/28 ,  B01D53/04 ,  B01J20/22 ,  B01J20/20 ,  B01J20/26 ,  B01J20/18

Abstract: Described are composite adsorption media that contain two or more different types of adsorbent material in binder, that may preferably be prepared by additive manufacturing techniques, as well as methods of preparing the structures by additive manufacturing methods.

公开(公告)号：US20230416154A1

公开(公告)日：2023-12-28

申请号：US18215097

申请日：2023-06-27

Applicant: ENTEGRIS, INC.

Inventor： Thines Kumar Perumal ,  Subhash Guddati ,  Aravind Vasanthakumar ,  Montray Leavy ,  Rocky Dean Gipson ,  Edward A. Sturm

IPC: C04B35/18 ,  C04B35/626 ,  C04B35/64 ,  B33Y40/20

CPC classification number: C04B35/18 ,  C04B35/62645 ,  C04B35/64 ,  B33Y40/20 ,  C04B2235/6021 ,  C04B2235/349 ,  C04B2235/5436 ,  C04B2235/6026 ,  C04B2235/6022 ,  C04B2235/3463

Abstract: A method for producing an article and a system associated with the method are provided. The method includes providing a green part, cooling the green part to a temperature below the freezing point of the ink to form a hardened mass and loosely-attached powder particles, and removing the loosely-attached powder particles. The green part includes powder particles, an ink, and optionally a binder. The loosely-attached powder particles removed from the green part may be recycled and reused.

公开(公告)号：US20250149363A1

公开(公告)日：2025-05-08

申请号：US18935313

申请日：2024-11-01

Applicant: ENTEGRIS, INC.

Inventor： Matthew A. Fuller ,  Colton J. Harr ,  Paul J. Magoon ,  Rocky Dean Gipson ,  Gary Gallagher

IPC: H01L21/673 ,  H01L21/67

Abstract: Described are methods and apparatus that are useful to for purifying a substrate container that is used to hold, store, or transport semiconductor substrates.