公开(公告)号：US20230094492A1

公开(公告)日：2023-03-30

申请号：US17952996

申请日：2022-09-26

Applicant: ENTEGRIS, INC.

Inventor： Oleg Byl ,  Joe R. Despres ,  Ed A. Sturm

IPC: F17C11/00 ,  B01D53/04 ,  B01J20/20 ,  F17C7/00

Abstract: Described are storage and dispensing systems, and related methods, for storing and selectively dispensing high purity reagent gas from a storage vessel in which the reagent gas is held in sorptive relationship to pyrolyzed carbon adsorption particles.

公开(公告)号：US20230079446A1

公开(公告)日：2023-03-16

申请号：US17945594

申请日：2022-09-15

Applicant: ENTEGRIS, INC.

Inventor： Rocky Dean Gipson ,  Ed A. Sturm ,  Subhash Guddati ,  Thines Kumar Perumal ,  Montray Leavy

IPC: B01J20/28 ,  B01D53/04 ,  B01J20/22 ,  B01J20/20 ,  B01J20/26 ,  B01J20/18

Abstract: Described are composite adsorption media that contain two or more different types of adsorbent material in binder, that may preferably be prepared by additive manufacturing techniques, as well as methods of preparing the structures by additive manufacturing methods.

公开(公告)号：US20230080027A1

公开(公告)日：2023-03-16

申请号：US17945849

申请日：2022-09-15

Applicant: ENTEGRIS, INC.

Inventor： Ed A. Sturm ,  Joe R. Despres

IPC: B01D53/22 ,  B01D71/26 ,  B01D71/12 ,  C23C16/04 ,  C23C16/18 ,  C23C16/455

Abstract: Described are methods, systems, and apparatus for processing a gas mixture that contains at least two gases by contacting the gas mixture with a membrane that allows for preferential flow of one of the gases through the membrane, to separate one constituent gas from the mixture.