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公开(公告)号：US20240131455A1
公开(公告)日：2024-04-25
申请号：US18383445
申请日：2023-10-23
Applicant: ENTEGRIS, INC.
Inventor： Matthew Schnaare , Eric Grinde , Ashutosh Shrikant Bhabhe , Siddarth Sampath
CPC classification number: B01D29/15 , B01D29/23 , B01D61/145 , B01D2201/291
Abstract: A filter housing includes a sleeve, a first endcap coupled to a first open end of the sleeve, and a second endcap coupled to the second open end of the sleeve. The sleeve includes an interior volume with an outer radial portion and an inner radial portion. The first endcap includes first plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The second endcap includes a second plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The filter housing is configured to enclose a filter member in the sleeve between the first endcap and the second endcap. A method is for filtering liquid with a filter that includes a filter member and a filter housing.
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公开(公告)号：US20240226779A9
公开(公告)日：2024-07-11
申请号：US18383445
申请日：2023-10-24
Applicant: ENTEGRIS, INC.
Inventor： Matthew Schnaare , Eric Grinde , Ashutosh Shrikant Bhabhe , Siddarth Sampath
CPC classification number: B01D29/15 , B01D29/23 , B01D61/145 , B01D2201/291
Abstract: A filter housing includes a sleeve, a first endcap coupled to a first open end of the sleeve, and a second endcap coupled to the second open end of the sleeve. The sleeve includes an interior volume with an outer radial portion and an inner radial portion. The first endcap includes first plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The second endcap includes a second plurality of ports that connect to the outer radial portion and the inner radial portion of the interior volume of the sleeve. The filter housing is configured to enclose a filter member in the sleeve between the first endcap and the second endcap. A method is for filtering liquid with a filter that includes a filter member and a filter housing.
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公开(公告)号：US20240350984A1
公开(公告)日：2024-10-24
申请号：US18761281
申请日：2024-07-01
Applicant: ENTEGRIS, INC.
Inventor： James Hamzik , Justin Brewster , Siddarth Sampath , Jad Ali Jaber , Aabid A. Mir
CPC classification number: B01D71/261 , B01D67/0093 , B01D2257/60
Abstract: The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.
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公开(公告)号：US20230149916A1
公开(公告)日：2023-05-18
申请号：US17980985
申请日：2022-11-04
Applicant: ENTEGRIS, INC.
Inventor： Siddarth Sampath , Ashutosh Shrikant Bhabhe , James Hamzik , Justin Brewster
IPC: B01J47/12 , B01J41/14 , B01J41/04 , B01D71/78 , B01D71/82 , B01D71/26 , B01D69/12 , B01D71/60 , C02F1/44
CPC classification number: B01J47/12 , B01J41/14 , B01J41/04 , B01D71/78 , B01D71/82 , B01D71/261 , B01D69/1214 , B01D71/60 , C02F1/44 , C02F2101/105
Abstract: The disclosure provides a porous polymeric membrane having ionizable nitrogen functional groups at least at its surface, wherein such groups are associated with a hydroxide anion. The membranes are useful in the purification of polar solvents such as water and alcohols and are capable of removing trace amounts of anionic contaminants such as halides, phosphates, nitrates, nitrites, sulfites, and sulfates.
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Patent Agency Ranking
公开(公告)号：US20250144574A1
公开(公告)日：2025-05-08
申请号：US19017111
申请日：2025-01-10
Applicant: ENTEGRIS, INC.
Inventor： James Hamzik , Siddarth Sampath , Justin Brewster , Ashutosh Shrikant Bhabhe
IPC: B01D69/12 , B01D67/00 , B01D71/26 , C02F1/42 , C02F1/44 , C02F101/10 , C02F101/20 , C02F101/30 , C02F103/04
Abstract: Described are filter membranes, related systems, and related method useful for producing purified (e.g., ultrapure) water, including membranes, systems, and methods of preparing purified water that will be useable in processes of manufacturing electronic and semiconductor devices.
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公开(公告)号：US20250099918A1
公开(公告)日：2025-03-27
申请号：US18891895
申请日：2024-09-20
Applicant: ENTEGRIS, INC.
Inventor： Alketa Gjoka , Jad Ali Jaber , Clifton G. Ngan , James Hamzik , David Crespo , Saksatha Ly , Christopher W. Webb , Jikku Thomas , Satoshi Kamimoto , Gaurav M. Batra , Siddarth Sampath
Abstract: Described are coated porous polymeric filter membranes that include a filter membrane substrate and an ionic polymer coating applied to the surface of the substrate; methods of making the coated porous polymeric filter membranes and filters that include such a coated membrane; and method of using the coated membranes to remove metal ions from purified water.
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公开(公告)号：US12059656B2
公开(公告)日：2024-08-13
申请号：US17488897
申请日：2021-09-29
Applicant: Entegris, Inc.
Inventor： James Hamzik , Justin Brewster , Siddarth Sampath , Jad Ali Jaber , Aabid A. Mir
CPC classification number: B01D71/261 , B01D67/0093 , B01D2257/60
Abstract: The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.
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公开(公告)号：US20230182049A1
公开(公告)日：2023-06-15
申请号：US18077058
申请日：2022-12-07
Applicant: ENTEGRIS, INC.
IPC: B01D35/30
CPC classification number: B01D35/30 , B01D2201/325
Abstract: A filter unit includes a housing, a first filter and a second filter disposed in the housing, and a liquid flow path that extends through the first and second filters in series. The first filter includes a first axial end affixed to the housing and a first filter media. The second filter includes a first axial end affixed to the housing at the outlet and a second filter media. The liquid directed radially outward through the first filter media and radially inward through the second filter media. A method of filtering a liquid within a filter unit includes passing the liquid radially outward through a first filter media of a first filter, directing the liquid from the first filter to a second filter, and passing the liquid radially inward through a second filter element of the second filter.
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公开(公告)号：US20230182045A1
公开(公告)日：2023-06-15
申请号：US18077813
申请日：2022-12-08
Applicant: ENTEGRIS, INC.
CPC classification number: B01D29/58 , B01D29/15 , B01D29/23 , B01D24/008 , B01D24/10 , B01D63/06 , B01D2201/291 , B01D2313/21 , B01D2313/08
Abstract: A filter unit for filtering liquid includes a housing with an inlet and an outlet, a first filter and a second filter disposed in the housing, and a liquid flow path extending from the inlet to the outlet. The liquid flow path directs the liquid one of radially inward and radially outward through a first filter media of the first filter and the other one of radially and directs the liquid the other one of radially inward and radially outward through a second filter media of the second filter. A method of filtering a liquid within a filter unit includes passing the liquid one of radially inward and radially outward through a first filter media of a first filter and passing the liquid the other one of radially inward and radially outward through a second filter media of a second filter.
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