公开(公告)号：US10920087B2

公开(公告)日：2021-02-16

申请号：US16098728

申请日：2017-03-27

Applicant: ENTEGRIS, INC.

Inventor： Steven Bishop ,  Sharad N. Yedave ,  Oleg Bly ,  Joseph Sweeney ,  Ying Tang

IPC: C09D1/00 ,  H01J37/08 ,  C01B35/06 ,  H01J37/317 ,  H01J37/32

Abstract: A hydrogenated isotopically enriched boron trifluoride (BF3) dopant source gas composition. The composition contains (i) boron trifluoride isotopically enriched above natural abundance in boron of atomic mass 11 (UB), and (ii) hydrogen in an amount of from 2 to 6.99 vol. %, based on total volume of boron trifluoride and hydrogen in the composition. Also described are methods of use of such dopant source gas composition, and associated apparatus therefor.

公开(公告)号：US20190136069A1

公开(公告)日：2019-05-09

申请号：US16098728

申请日：2017-03-27

Applicant: ENTEGRIS, INC.

Inventor： Steven Bishop ,  Sharad N. Yedave ,  Oleg Bly ,  Joseph Sweeney ,  Ying Tang

IPC: C09D1/00 ,  H01J37/08 ,  H01J37/317

Abstract: A hydrogenated isotopically enriched boron trifluoride (BF3) dopant source gas composition. The composition contains (i) boron trifluoride isotopically enriched above natural abundance in boron of atomic mass 11 (UB), and (ii) hydrogen in an amount of from 2 to 6.99 vol. %, based on total volume of boron trifluoride and hydrogen in the composition. Also described are methods of use of such dopant source gas composition, and associated apparatus therefor.