公开(公告)号：US11285443B2

公开(公告)日：2022-03-29

申请号：US16304900

申请日：2017-05-26

Applicant: ENTEGRIS, Inc.

Inventor： Jad Ali Jaber ,  Saksatha Ly ,  James Hamzik ,  Testu Kohyama

IPC: B01D67/00 ,  B01D69/02 ,  B01D71/26 ,  B01D71/78 ,  B01D71/82 ,  B01J20/26 ,  B01J20/28 ,  B01J20/32 ,  C07C45/78 ,  C08J5/22 ,  G03F7/027

Abstract: The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.

公开(公告)号：US11731085B2

公开(公告)日：2023-08-22

申请号：US17522159

申请日：2021-11-09

Applicant: ENTEGRIS, Inc.

Inventor： Jad Ali Jaber ,  Saksatha Ly ,  James Hamzik ,  Testu Kohyama

IPC: B01D67/00 ,  B01D69/02 ,  B01D71/26 ,  B01D71/78 ,  B01D71/82 ,  B01J20/26 ,  B01J20/28 ,  B01J20/32 ,  C07C45/78 ,  C08J5/22 ,  G03F7/027

CPC classification number: B01D67/0088 ,  B01D69/02 ,  B01D71/26 ,  B01D71/78 ,  B01D71/82 ,  B01J20/267 ,  B01J20/28035 ,  B01J20/3208 ,  B01J20/3282 ,  C07C45/786 ,  C08J5/2243 ,  G03F7/027 ,  B01D2323/30 ,  B01D2325/14 ,  B01D2325/16 ,  C08J2333/26

Abstract: The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.