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公开(公告)号：US20220134293A1
公开(公告)日：2022-05-05
申请号：US17512474
申请日：2021-10-27
申请人： ENTEGRIS, INC.
摘要： Provided are certain polyolefinic membranes which are useful as components of filters for liquid purification. Advantageously, the filter membranes of the disclosure possess greatly reduced concentrations of certain trace metals, thus making them particularly useful in the filtration of liquids used in the fabrication of microelectronic devices. In one aspect, the disclosure provides a filter membrane comprising a polyolefin, wherein said polyolefin has less than about 4 ppm total of metals chosen from titanium, aluminum, iron, zinc, and magnesium.
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公开(公告)号：US20240350984A1
公开(公告)日：2024-10-24
申请号：US18761281
申请日：2024-07-01
申请人： ENTEGRIS, INC.
发明人： James Hamzik , Justin Brewster , Siddarth Sampath , Jad Ali Jaber , Aabid A. Mir
CPC分类号： B01D71/261 , B01D67/0093 , B01D2257/60
摘要： The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.
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公开(公告)号：US11285443B2
公开(公告)日：2022-03-29
申请号：US16304900
申请日：2017-05-26
申请人： ENTEGRIS, Inc.
发明人： Jad Ali Jaber , Saksatha Ly , James Hamzik , Testu Kohyama
IPC分类号： B01D67/00 , B01D69/02 , B01D71/26 , B01D71/78 , B01D71/82 , B01J20/26 , B01J20/28 , B01J20/32 , C07C45/78 , C08J5/22 , G03F7/027
摘要： The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.
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公开(公告)号：US20230372880A1
公开(公告)日：2023-11-23
申请号：US18199802
申请日：2023-05-19
申请人： ENTEGRIS, INC.
发明人： Alketa Gjoka , Jad Ali Jaber , David Crespo , Saksatha Ly
CPC分类号： B01D69/125 , B01D69/02 , B01D71/36 , B01D71/68 , B01D71/261 , B01D2325/36 , B01D2325/20
摘要： Described are porous polymeric membrane composites that contain crosslinked fluorinated ionomer at a surface of a microporous membrane support, and related methods.
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公开(公告)号：US11618016B2
公开(公告)日：2023-04-04
申请号：US17503986
申请日：2021-10-18
申请人： ENTEGRIS, INC.
发明人： Jad Ali Jaber , Alketa Gjoka , Saksatha Ly
IPC分类号： B01J47/12 , B01D67/00 , B01D69/02 , B01D71/68 , B01D71/78 , B01J39/05 , B01J39/19 , B01J41/07 , B01J41/13 , C08G81/02 , C08J5/22 , C08J7/12
摘要： A polysulfone membrane is modified so that monomers are wafted onto the surface of the membrane. The polysulfone membranes can be grafted by contacting the membrane with a grafting solution and exposing the membrane to electromagnetic radiation, typically within the ultraviolet portion of the spectrum. The monomers that are grafted are typically anionic or cationic. The grafted membranes can be used for filtering impurities, such as positively and negatively charged particles, from a liquid. Anionic membranes provide improved filtration of negatively charged impurities, while cationic membranes provide improved filtration of positively charged impurities.
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公开(公告)号：US20220184595A1
公开(公告)日：2022-06-16
申请号：US17543362
申请日：2021-12-06
申请人： ENTEGRIS, INC.
发明人： James Hamzik , Jad Ali Jaber
摘要： This disclosure provides certain strong cation-modified ion exchange resins and membranes useful for carrying out the removal of metal and metal ion contaminants in fluid compositions. Filtered liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist. The cation-modified ion exchange resins and membranes of the disclosure can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system. Advantageously, the filter materials and methods of this disclosure showed considerable improvement in preventing degradation and the formation of color bodies and dimeric and oligomeric materials from ketones (e.g., cyclohexanone) in the liquid compositions while not compromising the filter material's ability to remove undesired metal ions.
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公开(公告)号：US11413586B2
公开(公告)日：2022-08-16
申请号：US16381442
申请日：2019-04-11
申请人： ENTEGRIS, INC.
发明人： Jad Ali Jaber , Kwok-Shun Cheng , Saksatha Ly
摘要： Described are filter membranes coated with a polyamide, filters and filter cartridges that include the filter membranes, and methods of using and making the filter membranes.
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公开(公告)号：US11273436B2
公开(公告)日：2022-03-15
申请号：US15738969
申请日：2015-11-19
申请人： Entegris, Inc.
发明人： Jad Ali Jaber , Alketa Gjoka , Saksatha Ly
IPC分类号： B01J47/12 , B01D67/00 , B01D69/02 , B01D71/68 , B01D71/78 , B01J39/05 , B01J39/19 , B01J41/07 , B01J41/13 , C08G81/02 , C08J5/22 , C08J7/12
摘要： A polysulfone membrane is modified so that monomers are grafted onto the surface of the membrane. The polysulfone membranes can be grafted by contacting the membrane with a grafting solution and exposing the membrane to electromagnetic radiation, typically within the ultraviolet portion of the spectrum. The monomers that are grafted are typically anionic or cationic. The grafted membranes can be used for filtering impurities, such as positively and negatively charged particles, from a liquid. Anionic membranes provide improved filtration of negatively charged impurities, while cationic membranes provide improved filtration of positively charged impurities.
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公开(公告)号：US20220032282A1
公开(公告)日：2022-02-03
申请号：US17503986
申请日：2021-10-18
申请人： ENTEGRIS, INC.
发明人： Jad Ali Jaber , Alketa Gjoka , Saksatha Ly
IPC分类号： B01J47/12 , B01D67/00 , B01D69/02 , B01D71/68 , B01D71/78 , B01J39/05 , B01J39/19 , B01J41/07 , B01J41/13 , C08G81/02 , C08J5/22 , C08J7/12
摘要： A polysulfone membrane is modified so that monomers are wafted onto the surface of the membrane. The polysulfone membranes can be grafted by contacting the membrane with a grafting solution and exposing the membrane to electromagnetic radiation, typically within the ultraviolet portion of the spectrum. The monomers that are grafted are typically anionic or cationic. The grafted membranes can be used for filtering impurities, such as positively and negatively charged particles, from a liquid. Anionic membranes provide improved filtration of negatively charged impurities, while cationic membranes provide improved filtration of positively charged impurities.
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公开(公告)号：US10792620B2
公开(公告)日：2020-10-06
申请号：US15527094
申请日：2015-11-19
申请人： ENTEGRIS, INC.
发明人： Jad Ali Jaber , Alketa Gjoka
摘要： Grafted, asymmetric, porous, ultra high molecular weight polyethylene membranes having a bubble point between about 5.38 bar (78 psi) and 11.03 bar (160 psi) are disclosed. Monomers are grafted to the porous polymeric membrane surfaces, the monomers having one or more of neutral groups or ion exchange groups grafted to one or more surfaces of the membrane. A combination of two photoinitiators can be used to graft the monomers to the asymmetric, porous, ultra high molecular weight membrane resulting in grafted microporous membranes that have water flow rates that are at least 50% of the water flow rate of an ungrafted, asymmetric, porous ultra high molecular weight polyethylene membrane. The grafted membrane also wets in water.
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