公开(公告)号：US6137112A

公开(公告)日：2000-10-24

申请号：US150177

申请日：1998-09-10

申请人： Edward K. McIntyre ,  Kevin W. Wenzel ,  David R. Swenson ,  Ernst F. Scherer ,  William F. Divergilio ,  Kourosh Saadatmand

发明人： Edward K. McIntyre ,  Kevin W. Wenzel ,  David R. Swenson ,  Ernst F. Scherer ,  William F. Divergilio ,  Kourosh Saadatmand

IPC分类号： H01L21/66 ,  C23C14/48 ,  H01J37/304 ,  H01J37/317 ,  H01J49/40 ,  H01J49/44 ,  H01L21/265 ,  H01J37/244

CPC分类号： H01J49/40 ,  H01J37/304 ,  H01J37/3171

摘要： An ion implanter including a time of flight energy measurement apparatus for measuring and controlling the energy of an ion beam includes an ion source for generating the ion beam, an ion acceleration assembly for accelerating the beam resulting in the beam comprising a series of ion pulses having a predetermined frequency and beam forming and directing structure for directing the ion beam at workpieces supported in an implantation chamber of the implanter. The time of flight energy measurement apparatus includes spaced apart first and second sensors, timing circuitry and conversion circuitry. The time of flight energy measurement apparatus measures an average kinetic energy of an ion included in a selected ion pulse of the ion beam. The first sensor and a second sensor are disposed adjacent the ion beam and spaced a predetermined distance apart, the second sensor being downstream of the first sensor. The first sensor generates a signal when an ion pulse of the ion beam passes the first sensor and the second sensor generates a signal when an ion pulse of the ion beam passes the second sensor. The timing circuitry of the energy measurement apparatus is electrically coupled to the first and second sensors and determines an elapsed time, t, for the selected ion pulse to traverse the predetermined distance between the first and second sensors. The timing circuitry calculates an average number of ion pulses, N, in the ion beam between the first and second sensors based on the approximation of the ion beam energy and calculates an offset time, t(offset), for the selected ion pulse using the formula, t(offset)=N.times.T. The timing circuitry than determines the elapsed time, t. The conversion circuitry converts the elapsed time, t, for the selected ion pulse into a measure of the energy of the ion beam.

摘要翻译： 包括用于测量和控制离子束的能量的飞行时间能量测量装置的离子注入机包括用于产生离子束的离子源，用于加速所述束的束的离子加速组件，所述离子加速组件包括一系列具有 预定的频率和波束形成和引导结构，用于将离子束引导到支撑在注入机的植入室中的工件上。 飞行时间能量测量装置包括间隔开的第一和第二传感器，定时电路和转换电路。 飞行时间能量测量装置测量离子束的选定离子脉冲中包含的离子的平均动能。 第一传感器和第二传感器邻近离子束设置并间隔预定距离，第二传感器位于第一传感器的下游。 当离子束的离子脉冲通过第一传感器时，第一传感器产生信号，当离子束的离子脉冲通过第二传感器时，第二传感器产生信号。 能量测量装置的定时电路电耦合到第一和第二传感器，并且确定所选离子脉冲经过第一和第二传感器之间的预定距离的经过时间t。 定时电路基于离子束能量的近似计算第一和第二传感器之间的离子束中的离子脉冲的平均数目N，并且使用该离子脉冲计算所选离子脉冲的偏移时间t（偏移） 公式，t（offset）= NxT。 定时电路确定经过的时间t。 转换电路将所选择的离子脉冲的经过时间t转换成离子束的能量的量度。

公开(公告)号：US06653803B1

公开(公告)日：2003-11-25

申请号：US09583157

申请日：2000-05-30

申请人： William F. DiVergilio ,  Kourosh Saadatmand ,  Ernst F. Scherer

发明人： William F. DiVergilio ,  Kourosh Saadatmand ,  Ernst F. Scherer

IPC分类号： H05H900

CPC分类号： H05H7/02

摘要： An integrated RF amplifier and resonator is provided for use with an ion accelerator. The amplifier includes an output substantially directly coupled with a resonator coil. The amplifier output may be coupled capacitively or inductively. In addition, an apparatus is provided for accelerating ions in an ion implanter. The apparatus comprises an amplifier with an RF output, a tank circuit with a coil substantially directly coupled to the RF output of the amplifier, and an electrode connected to the coil for accelerating ions. Also provided is a method for coupling an RF amplifier with a resonator in an ion accelerator. The method comprises connecting the RF output of the amplifier to a coupler, and locating the coupler proximate the coil, thereby substantially directly coupling the RF output of the amplifier with the resonator coil.

摘要翻译： 提供集成的RF放大器和谐振器用于离子加速器。 放大器包括基本上直接与​​谐振器线圈耦合的输出。 放大器输出可以电容或电感耦合。 此外，提供了用于加速离子注入机中的离子的装置。 该装置包括具有RF输出的放大器，具有基本上直接耦合到放大器的RF输出的线圈的振荡电路，以及连接到用于加速离子的线圈的电极。 还提供了一种在离子加速器中将RF放大器与谐振器耦合的方法。 该方法包括将放大器的RF输出连接到耦合器，并将耦合器定位在线圈附近，从而基本上将放大器的RF输出与谐振器线圈直接耦合。

公开(公告)号：US06831280B2

公开(公告)日：2004-12-14

申请号：US10368825

申请日：2003-02-19

申请人： Ernst F. Scherer

发明人： Ernst F. Scherer

IPC分类号： G06F1520

CPC分类号： H01J37/3171 ,  G04F10/00 ,  G04F10/10 ,  H01J2237/05 ,  H01J2237/30472

摘要： Apparatus and methods are disclosed for measuring time delays between pulse streams or other input signals and for measuring ion beam energies in an ion implantation system. A variable delay apparatus is applied to one input signal, and the signals are correlated or compared in a correlator apparatus providing a minimum, maximum, or other ascertainable output signal value when a delay value of the variable delay is representative of the time delay between the first and second input signals. By adjusting or sweeping the variable delay until the ascertainable correlator apparatus output value is obtained, the actual time delay is determined as the dialed-in value of the variable delay that produces the ascertainable correlator output value. The variable delay measurement apparatus and methods may be employed in ion implantation system for measuring ion beam energies using time of flight probes, wherein the system and the time delay measurement apparatus may be calibrated to remove any residual delays of the system, such as delay offsets related to channel imbalance in the system and connecting devices. In addition, a unique error correction method is disclosed, which may be applied to the time delay measurement system measurement to minimize or mitigate errors introduced by electronic components of the system.

摘要翻译： 公开了用于测量脉冲流或其它输入信号之间的时间延迟以及用于在离子注入系统中测量离子束能量的装置和方法。 可变延迟装置被应用于一个输入信号，并且在可变延迟的延迟值表示时间延迟之间的相关器装置中提供最小，最大或其他可确定的输出信号值时，信号被相关或比较 第一和第二输入信号。 通过调整或扫描可变延迟直到获得可确定的相关器装置输出值，实际的时间延迟被确定为产生可确定的相关器输出值的可变延迟的拨入值。 可以使用离子注入系统中的可变延迟测量装置和方法来测量使用飞行时间探针的离子束能量，其中可以校准系统和时间延迟测量装置以消除系统的任何残余延迟，例如延迟偏移 与系统和连接设备的通道不平衡有关。 此外，公开了一种独特的纠错方法，其可以应用于时间延迟测量系统测量，以最小化或减轻由系统的电子部件引入的错误。

公开(公告)号：US06262638B1

公开(公告)日：2001-07-17

申请号：US09162181

申请日：1998-09-28

申请人： Ernst F. Scherer

发明人： Ernst F. Scherer

IPC分类号： H03H502

CPC分类号： H05H7/02 ,  H05H5/08 ,  H05H7/22

摘要： A resonator circuit capable of resonating at a predetermined frequency is provided. The resonator circuit comprises a fixed position coil inductor (62) having a longitudinal axis (92) and a capacitor (88, 82) electrically connected in parallel with each other to form a resonator (60), so that respective first and second ends of the inductor and the capacitor are electrically coupled together at a high-voltage end (64) and a low-voltage end (66) of the resonator (60). A radio frequency (RF) input coupling (70) is coupled directly to the inductor (62) at the low-voltage end (66) of the resonator. A high-voltage electrode (72) is coupled to the high-voltage end (64) of the resonator. A first resonator tuning mechanism is provided for varying the inductance of the inductor, comprising a plunger (90) movable within the coil of the inductor (62) along the longitudinal axis (92). A second resonator tuning mechanism is provided for varying the capacitance of the capacitor (88, 82). The first tuning mechanism provides fine tuning of the resonator by means of varying the inductance of the inductor (62), and the second tuning mechanism provides coarse or initial tuning of the resonator by means of varying the capacitance of the capacitor (88, 82).

摘要翻译： 提供能够以预定频率谐振的谐振电路。 谐振器电路包括具有纵向轴线（92）的固定位置线圈电感器（62）和彼此并联电连接以形成谐振器（60）的电容器（88,82），使得相应的第一和第二端 电感器和电容器在谐振器（60）的高压端（64）和低电压端（66）处电耦合在一起。 射频（RF）输入耦合（70）在谐振器的低压端（66）处直接耦合到电感器（62）。 高压电极（72）耦合到谐振器的高压端（64）。 提供了一种用于改变电感器的电感的第一谐振器调谐机构，包括沿着纵向轴线（92）在电感器（62）的线圈内可移动的柱塞（90）。 提供了第二谐振器调谐机构，用于改变电容器（88,82）的电容。 第一调谐机构通过改变电感器（62）的电感来提供谐振器的微调，并且第二调谐机构通过改变电容器（88,82）的电容来提供谐振器的粗调或初始调谐， 。