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Patent Agency Ranking
公开(公告)号：US20220260079A1
公开(公告)日：2022-08-18
申请号：US17624645
申请日：2020-07-03
Applicant: Edwards Japan Limited
Inventor： Yoshihiro Enomoto
Abstract: Uniform exhaustion can be realized with a relatively simple structure in a vacuum pump device.
A vacuum pump portion includes an outer rotor and an inner stator, a lifting-type gate valve portion includes a valve body and a valve seat, and the valve body is lifted/lowered with respect to the valve seat along a rotating shaft direction. And the inner stator includes a through hole along the rotating shaft direction of the vacuum pump portion, and at least a part of a supporting member which supports the valve body is disposed in the through hole.-
公开(公告)号：US11835048B2
公开(公告)日：2023-12-05
申请号：US17624645
申请日：2020-07-03
Applicant: Edwards Japan Limited
Inventor： Yoshihiro Enomoto
Abstract: Uniform exhaustion can be realized with a relatively simple structure in a vacuum pump device.
A vacuum pump portion includes an outer rotor and an inner stator, a lifting-type gate valve portion includes a valve body and a valve seat, and the valve body is lifted/lowered with respect to the valve seat along a rotating shaft direction. And the inner stator includes a through hole along the rotating shaft direction of the vacuum pump portion, and at least a part of a supporting member which supports the valve body is disposed in the through hole.-
公开(公告)号：US20230056826A1
公开(公告)日：2023-02-23
申请号：US17796692
申请日：2021-02-12
Applicant: Edwards Japan Limited
Inventor： Yoshihiro Enomoto
Abstract: Provided is a vacuum pump that can realize energy conservation when performing abatement of exhaust gas.
A vacuum pump that sucks in and exhausts exhaust gas includes a motor serving as a drive source, and a first controller that controls driving of the motor. The first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state excluding when starting up and when stopped, outputs a specific signal (process signal) to an external entity.-
公开(公告)号：US20220235777A1
公开(公告)日：2022-07-28
申请号：US17611816
申请日：2020-05-22
Applicant: Edwards Japan Limited
Inventor： Yoshihiro Enomoto , Takashi Kabasawa
IPC: F04D19/04
Abstract: A vacuum pump in which a spark is not generated even when a rotor component and a stator component are brought into contact, and an explosive reaction in a vacuum container can be prevented, and a protection portion provided in the vacuum pump are provided. On head part sides of a thread ridge to a thread ridge of a threaded spacer with a narrow clearance of a gas channel therebetween, a protection portion 1a to a protection portion made of non-metal are formed in a peripheral state. A protection portion is similarly formed in the peripheral state also on an inner peripheral surface side of a stator blade spacer opposed to a distal end of a rotor blade with a narrow clearance of the gas channel. The protection portion is formed of non-metal with a sufficient thickness so that metal materials of base materials are not brought into contact with each other even when a rotor blade and a stationary portion are brought into contact with each other.
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公开(公告)号：US09777612B2
公开(公告)日：2017-10-03
申请号：US14394668
申请日：2013-03-07
Applicant: Edwards Japan Limited
Inventor： Yoshihiro Enomoto
CPC classification number: F01N11/00 , F01N2550/00 , F04C25/02 , F04C28/28 , F04C2220/30 , F04C2270/86 , F04C2280/02 , F04D19/042 , F04D27/001 , F05D2260/607 , H02P29/027
Abstract: A deposit detection device for an exhaust pump is provided, which can be easily put into operation without the burdens of, for example, installing equipment for flowing a gas, or adding or changing operation modes in apparatuses. The device is configured to include: a means for detecting motor current values a motor that rotates a rotating body; a current value storage portion that stores only motor current values that are equal to or greater than a preset value from among detected motor current values; an average value calculation portion that calculates an average value per unit time of the stored motor current values; an average value storage portion that stores the calculated average value; an approximation calculation portion that determines a linear approximation of the stored chronologically ordered average values; and a difference value calculation portion that determines a difference value between a predicted motor current value calculated by using the linear approximation and an initial motor current value at a start of use of the exhaust pump. A time when the difference value exceeds a predetermined threshold is determined as a time for maintenance of the exhaust pump.
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