公开(公告)号：US20220090592A1

公开(公告)日：2022-03-24

申请号：US17428918

申请日：2020-02-20

Applicant: EDWARDS LIMITED

Inventor： Gerald Robin Shelley ,  Peter George Stammers ,  Brian Stuart Blakeley Roberts

IPC: F04B37/14 ,  F04B41/06 ,  F04B49/00 ,  F04B49/02 ,  F04B49/06 ,  F04B49/20 ,  F04B49/22 ,  F04C25/02 ,  F04C28/02 ,  F04C28/08 ,  F04C28/28 ,  F04D15/00 ,  F04D17/16 ,  F04D19/04 ,  F04D27/00 ,  F04D27/02

Abstract: A vacuum pumping apparatus may include: a common pumping line having a plurality of pumping line inlets and a pumping line outlet, each pumping line inlet being configured to couple with an outlet of an associated plurality of vacuum processing chambers; at least one primary vacuum pump in fluid communication with the pumping line outlet to pump gas from each vacuum processing chamber; and control logic operable to control operation of the primary vacuum pump in response to an indication of an operating state of the plurality of vacuum processing chambers. In this way, the performance of the primary vacuum pump can be adjusted to match the load provided by the processing chambers and when there is an excess capacity, the performance of the primary vacuum pumps can be reduced, which can lead to significant energy savings and reduce wear on the pump.

公开(公告)号：US12129841B2

公开(公告)日：2024-10-29

申请号：US17428918

申请日：2020-02-20

Applicant: Edwards Limited

Inventor： Gerald Robin Shelley ,  Peter George Stammers ,  Brian Stuart Blakeley Roberts

IPC: F04B37/14 ,  F04B41/06 ,  F04B49/00 ,  F04B49/02 ,  F04B49/06 ,  F04B49/20 ,  F04B49/22 ,  F04C25/02 ,  F04C28/02 ,  F04C28/08 ,  F04C28/28 ,  F04D15/00 ,  F04D17/16 ,  F04D19/04 ,  F04D27/00 ,  F04D27/02

CPC classification number: F04B37/14 ,  F04B41/06 ,  F04B49/007 ,  F04B49/02 ,  F04B49/06 ,  F04B49/20 ,  F04B49/22 ,  F04C25/02 ,  F04C28/02 ,  F04C28/08 ,  F04C28/28 ,  F04D15/0027 ,  F04D17/168 ,  F04D19/04 ,  F04D27/004 ,  F04D27/0261 ,  F04B2205/09 ,  F04C2220/30

Abstract: A vacuum pumping apparatus may include: a common pumping line having a plurality of pumping line inlets and a pumping line outlet, each pumping line inlet being configured to couple with an outlet of an associated plurality of vacuum processing chambers; at least one primary vacuum pump in fluid communication with the pumping line outlet to pump gas from each vacuum processing chamber; and control logic operable to control operation of the primary vacuum pump in response to an indication of an operating state of the plurality of vacuum processing chambers. In this way, the performance of the primary vacuum pump can be adjusted to match the load provided by the processing chambers and when there is an excess capacity, the performance of the primary vacuum pumps can be reduced, which can lead to significant energy savings and reduce wear on the pump.