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公开(公告)号:US06893705B2
公开(公告)日:2005-05-17
申请号:US10156700
申请日:2002-05-28
申请人: Edwin L. Thomas , Claudio DeRosa , Cheolmin Park , Michael Fasolka , Bernard Lotz , Anne M. Mayes , Jongsesung Yoon
发明人: Edwin L. Thomas , Claudio DeRosa , Cheolmin Park , Michael Fasolka , Bernard Lotz , Anne M. Mayes , Jongsesung Yoon
IPC分类号: C08L53/00 , C08L53/02 , C09D153/00 , C09D153/02 , B82B1/00 , B82B3/00
CPC分类号: C08L53/00 , C08L53/02 , C08L53/025 , C09D153/00 , C09D153/02 , C09D153/025 , G03F7/0002 , Y10T428/24058 , Y10T428/24074 , Y10T428/24355 , Y10T428/24372 , Y10T428/24967 , Y10T428/249921 , Y10T428/31
摘要: A method and apparatus for orientation of block copolymer microdomains via rapid solidification. Rapid solidification from a solvent may include directional solidification and/or epitaxy to form patterns of microdomains in a film of block copolymer. Microdomains may include various structures formed by components of a block copolymer, such as vertical lamellae, in-plane cylinders, and vertical cylinders, and may depend on film thickness. Orientation of structures in microdomains may be controlled to be approximately uniform, and spatial arrangement of microdomains may be controlled.
摘要翻译: 一种通过快速固化取代嵌段共聚物微区的方法和装置。 来自溶剂的快速固化可以包括定向凝固和/或外延以在嵌段共聚物的膜中形成微区域的图案。 微畴可以包括由嵌段共聚物的组分形成的各种结构,例如垂直薄片,平面内圆柱体和垂直圆柱体,并且可以取决于膜厚度。 可以将微区域中的结构的取向控制为近似均匀,并且可以控制微区域的空间排列。